Light absorption and filtering properties of vertically oriented semiconductor nano wires

Patent metadata

Field	Value
Publication number	US-9601529-B2
Application number	US-201514632739-A
Country	US
Kind code	B2
Filing date	Feb 26, 2015
Priority date	Sep 4, 2008
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

A nanowire array is described herein. The nanowire array comprises a substrate and a plurality of nanowires extending essentially vertically from the substrate; wherein: each of the nanowires has uniform chemical along its entire length; a refractive index of the nanowires is at least two times of a refractive index of a cladding of the nanowires. This nanowire array is useful as a photodetector, a submicron color filter, a static color display or a dynamic color display.

First claim

What is claimed is:

1. A nanowire array, comprising a substrate and a plurality of nanowires extending essentially perpendicularly from the substrate, wherein a ratio of a radius of the nanowires to a pitch of the nanowires is at most 0.5, wherein radii of the nanowires are from 10 to 1000 nm; lengths of the nanowires are from 0.01 to 10 μm.

2. A nanowire array of claim 1 ; wherein:
a refractive index of the nanowires is at least two times of a refractive index of a cladding of the nanowires.

3. A nanowire array of claim 1 , wherein a number density of the nanowires is at most about 1.8/μm2.

4. The nanowire array of claim 1 , wherein each of the nanowires is single crystalline, multi-crystalline or amorphous.

5. The nanowire array of claim 1 , wherein the nanowires are composed of a semiconductor.

6. The nanowire array of claim 1 , wherein the nanowires comprise one or more materials selected from the group consisting of Si, Ge, GaN, GaAs, SiO2, and Si3N4.

7. The nanowire array of claim 1 , wherein the nanowires and the substrate are single crystalline and the lattices of the nanowires and the lattice of the substrate are continuous at interfaces therebetween.

8. The nanowire array of claim 1 , wherein the nanowires are arranged in a predetermined pattern.

9. The nanowire array of claim 1 , wherein a distance of a nanowire to a nearest neighbor of the nanowire along a direction parallel to the substrate is at least 800 nm.

10. The nanowire array of claim 1 , wherein a reflectance spectrum thereof has a dip; the dip position shifts to shorter wavelength with decreasing radii of the nanowires; and the dip position is independent from a distance of a nanowire to a nearest neighbor of the nanowire along a direction parallel to the substrate.

11. The nanowire array of claim 1 , wherein a reflectance spectrum thereof is independent from incident angles of illumination.

12. A method of fabricating the nanowire array of claim 1 , comprising:
generating a pattern of dots in a resist layer using a lithography technique;
forming the nanowires by etching the substrate;
wherein shapes and sizes of the dots determine the cross-sectional shapes and sizes of the nanowires.

13. The method of claim 12 , further comprising:
coating the substrate with the resist layer;
developing the pattern in the resist layer;
depositing a mask layer; lifting off the resist layer; and
optionally removing the mask player.

14. The method of claim 12 , wherein the etching is dry etching.

15. A method using the nanowire array of claim 1 as a photodetector comprises:
shining light on the nanowire array;
measuring photocurrent on the nanowires;
measuring photocurrent on the substrate;
comparing the photocurrent on the nanowires to the photocurrent on the substrate.

16. A method using the nanowire array of claim 1 as a static color display comprises:
determining locations and radii of the nanowires from an image to be displayed;
fabricating the nanowires with the determined radii at the determined locations on the substrate;
shining white light on the nanowire array.

17. A color filter comprising the nanowire array of claim 1 , wherein each nanowire is placed on a photodetector, wherein only incident light with wavelengths in a dip of a reflectance spectrum of each nanowire is allowed reach the photodetector below.

18. A method using the color filter of claim 17 comprises shining white light on the nanowire array, detecting transmitted light below the nanowires.

19. The nanowire array of claim 1 , wherein the nanowires are composed of an electrically insulating material.

20. The nanowire array of claim 1 , wherein the nanowire array is operable as a submicron color filter.

21. The nanowire array of claim 1 , wherein at least one nanowire among the plurality of nanowires has a dip in a reflectance spectrum of the at least one nanowire, wherein a light of a wavelength in the dip incident on the at least one nanowire is guided by the at least one nanowire to be transmitted through the substrate.

22. The nanowire array of claim 21 , wherein the dip is at an IR wavelength.

23. The nanowire array of claim 21 , wherein the nanowire array is operable as an infrared light filter.

24. The nanowire array of claim 21 , wherein the at least one nanowire comprises GaAs.

25. The nanowire array of claim 21 , wherein the at least one nanowire has a diameter of between about 70 nm and about 500 nm.

26. A dynamic display comprises the nanowire array of claim 21 .

27. A photodetector comprising the nanowire array of claim 21 .

28. The nanowire array of claim 21 , wherein the nanowire array is operable as a light filter.

29. The nanowire array of claim 21 , wherein the nanowires do not substantially couple.

30. A dynamic color display comprises a nanowire array comprising a substrate and a plurality of nanowires extending essentially perpendicularly from the substrate, the nanowire array being operable as a color filter;
an array of independently addressable white light sources on a side of the substrate opposite the nanowires, wherein each white light source corresponds to and is aligned in the substrate plane with one of the nanowires.

31. The dynamic color display of claim 30 , wherein the white light sources are white LEDs or a scanning white light beam.

32. The dynamic color display of claim 30 , wherein a first group of the nanowires have a first radius, a second group of the nanowires have a second radius, and a third group of the nanowires have a third radius, wherein the first group of the nanowires only allow red light to pass, the second group of the nanowires only allow green light to pass, and the third group of the nanowires only allow blue light to pass.

Assignees

• Harvard College
• Zena Tech Inc

Inventors

• Seo Kwanyong
• Wober Munib
• Steinvurzel Paul
• Schonbrun Ethan
• Dan Yaping
• Crozier Kenneth

Classifications

• Y10S977/954

  Of radiant energy · CPC title

• B82Y20/00 Primary

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title

• Y10T428/24893

  including particulate material · CPC title

• H01L27/14629

  Electricity · mapped topic

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title