Ignition apparatus for arc sources

Patent metadata

Field	Value
Publication number	US-9601316-B2
Application number	US-201313963128-A
Country	US
Kind code	B2
Filing date	Aug 9, 2013
Priority date	Nov 12, 2008
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

The present invention relates to an ignition device for igniting a high-current discharge of an electrical arc evaporator in a vacuum coating system. Ignition is performed by means of mechanically closing and opening a contact between the cathode and the anode. Contact is established by means of an ignition finger that can move on a forced path. On account of the forced path, the ignition finger can be moved by means of a simple mechanical drive to a park position, which is protected against coating, and said ignition finger can also be used to ignite a second target.

First claim

The invention claimed is:

1. An arc source, comprising:
a first target;
a second target, the first and second targets being positioned substantially in a first plane; and
an ignition device provided for igniting a spark at the first target and at the second target,
wherein the ignition device comprises a trigger finger that is mounted movably such that a moving means is provided for moving a fingertip of the trigger finger towards a surface of the first target and towards a surface of the second target,
wherein the moving means comprises a rotary drive and a shaft,
wherein the rotary drive cooperates with a guide means to drive the fingertip such that, when driven, the fingertip moves on a forced path that at least one of touches and intersects both targets,
wherein the trigger finger is arranged movably on the shaft such that the height of the fingertip, defined by the vertical projection of the fingertip to the shaft, is variable, the height of the fingertip being dependent upon a rotation of the trigger finger about the shaft, and
wherein the guide means is formed as a sliding block guide spaced radially from the shaft, the sliding block guide comprising a cylindrical sleeve having a slotted element through which the trigger finger extends, the slotted element being configured to define the variable height of the fingertip.

2. An arc source, comprising:
a first target;
a second target, the first and second targets being positioned substantially in a first plane; and
an ignition device provided for igniting a spark at the first target and at the second target,
wherein the ignition device comprises a trigger finger that is mounted movably such that a moving means is provided for moving a fingertip of the trigger finger towards a surface of the first target and towards a surface of the second target,
wherein the moving means comprises a linear drive,
wherein the linear drive cooperates with a guide means to drive the fingertip such that, when driven, the fingertip moves on a forced path that at least one of touches and intersects both targets,
wherein the moving means comprises a rail on which the trigger finger is mounted in a linearly movable manner, the trigger finger being configured to move along the rail, and
wherein the guide means is formed as a sliding block guide, the sliding block guide comprising a slotted element configured to define a variable height of the fingertip, the trigger finger extending from the rail through the slotted element to the fingertip of the trigger finger.

3. A device for treating workpieces in a vacuum comprising an arc source according to claim 1 .

4. A device according to claim 3 that is a coating plant.

5. A device according to claim 4 that is a plasma etching plant.

6. A device for treating workpieces in a vacuum comprising an arc source according to claim 2 .

7. A device according to claim 6 that is a coating plant.

8. A device according to claim 7 that is a plasma etching plant.

9. The arc source according to claim 1 , wherein the slotted element is positioned in a circumference of the cylindrical sleeve that is spaced radially from the shaft, the slot being arranged to vary the height of the fingertip as the trigger finger rotates on the shaft around an axis parallel to an axis of the cylindrical sleeve.

Assignees

• Oerlikon Trading Ag
• Oerlikon Surface Solutions Ag Pfaffikon

Inventors

• Krassnitzer Siegfried
• Gstoehl Oliver
• Hagmann Juerg

Classifications

• H01J37/32055

  Arc discharge · CPC title

• H01J37/32 Primary

  Gas-filled discharge tubes (heating by discharge H05B) · CPC title

• C23F1/08

  Apparatus, e.g. for photomechanical printing surfaces (photo- mechanical reproduction G03F) · CPC title

• H01J37/32009 Primary

  Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources (plasma generation in general H05H1/24) · CPC title