Spectroscopic element and charged particle beam device using the same

Patent metadata

Field	Value
Publication number	US-9601308-B2
Application number	US-201214439993-A
Country	US
Kind code	B2
Filing date	Oct 31, 2012
Priority date	Oct 31, 2012
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

To analyze an element to be evaluated with high sensitivity and high accuracy in a short period of time, in an electron beam analyzer including a wavelength dispersive X-ray analyzer in an electron microscope. The electron beam analyzer has one diffraction grating in which a plurality of patterns having maximum X-ray reflectance with respect to the respective X-rays are formed. It simultaneously detects an X-ray as an energy reference and an X-ray spectrum to be evaluated. The positional displacement of X-ray energy due to the installation/replacement of the diffraction grating is corrected using the X-ray spectrum as the energy reference, thereby enabling to perform an analysis with high sensitivity and high accuracy in a short period of time.

First claim

The invention claimed is:

1. A spectroscopic element comprising:
a first pattern for dispersing an irradiated X-ray into a first spectrum having a first plurality of intensity distributions each having a linear form; and
a second pattern for generating a second spectrum different from the first pattern and having a second plurality of intensity distributions each having a linear form, for said irradiated X-ray,
wherein said first and second patterns of said spectroscopic element are arranged side-by-side with respect to each other on said spectroscopic element in a direction of the linear form to cause said second plurality of intensity distributions to be disposed side-by-side in a direction orthogonal to said direction of the linear form with said first plurality of intensity distributions on an X-ray position detector in correspondence with said first and second patterns,
wherein said first and second patterns of said spectroscopic element are further arranged to cause each said intensity distribution of said first plurality of intensity distributions to be disposed on the X-ray position detector collinearly head-to-tail in said direction of the linear form with a corresponding intensity distribution of said second pluality of intensity distributions, and
wherein an area ratio of the first pattern to the second pattern is determined based on an X-ray, reflectance as an energy reference and an X-ray reflectance of a target to be evaluated.

2. The spectroscopic element according to claim 1 , wherein
a shape of the first pattern is determined based on X-ray reflectance as an energy reference, and
a shape of the second pattern is determined based on X-ray reflectance of a target to be evaluated.

3. The spectroscopic element according to claim 1 , wherein
a material of the first pattern or a material of a coating film is determined based on an X-ray reflectance as an energy reference, and
a material of the second pattern or a material of a coating film is determined based on an X-ray reflectance of a target to be evaluated.

4. The spectroscopic element according to claim 1 , wherein
the first pattern and the second pattern are provided in accordance with a design rule which determines a relative positional displacement of said first and second patterns.

5. The spectroscopic element according to claim 1 , wherein
the first pattern and the second pattern are provided on a same plane surface or a same curved surface.

6. The spectroscopic element according to claim 1 , wherein
the first pattern and the second pattern are provided in an irradiated region of the X-ray.

7. A charged particle beam device comprising:
an irradiation optical system which applies a charged particle beam to a sample; and
an X-ray detection system which detects an X-ray generated from the sample, and wherein
the X-ray detection system has a spectroscopic element having
a first pattern for dispersing an irradiated X-ray into a first spectrum having a first plurality of intensity distributions each having a linear form; and
a second pattern for generating a second spectrum different from the first pattern and having a second plurality of intensity distributions each having a linear form, for said irradiated X-ray,

wherein said first and second patterns of said spectroscopic element are arranged side-by-side with respect to each other on said spectroscopic element in a direction of the linear form to cause said second plurality of intensity distributions to be disposed side-by-side in a direction orthogonal to said direction of the linear form with said first plurality of intensity distributions on an X-ray position detector in correspondence with said first and second patterns,
wherein said first and second patterns of said spectroscopic element are further arranged to cause each said intensity distribution of said first plurality of intensity distributions to be disposed on the X-ray position detector collinearly head-to-tail in said direction of the linear form with a corresponding intensity distribution of said second plurality of intensity distributions, and
wherein an area ratio of the first pattern to the second pattern is determined based on an X-ray reflectance as an energy reference and an X-ray reflectance of a target to be evaluated.

8. The charged particle beam device according to claim 7 , wherein
a shape of the first pattern is determined based on X-ray reflectance as an energy reference, and
a shape of the second pattern is determined based on X-ray reflectance of a target to be evaluated.

9. The charged particle beam device according to claim 7 , wherein
the first pattern and the second pattern are provided in accordance with a design rule which determines a relative positional displacement of said first and second patterns.

10. The charged particle beam device according to claim 7 , further comprising
an X-ray lens provided on an optical path of the sample and the spectroscopic element.

11. The charged particle beam device according to claim 10 , further comprising
a control unit which moves the X-ray lens within a range of the optical path of the sample and the spectroscopic element.

Assignees

• Hitachi Ltd

Inventors

• Anan Yoshihiro
• Koguchi Masanari

Classifications

• H01J2237/2442

  Energy-dispersive (Si-Li type) spectrometer · CPC title

• G01N23/2252

  Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA] · CPC title

• H01J37/252

  Tubes for spot-analysing by electron or ion beams; Microanalysers · CPC title

• H01J2237/2445

  Photon detectors for X-rays, light, e.g. photomultipliers · CPC title

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title