Defect detection using thermal laser stimulation and atomic force microscopy
US-2024069095-A1 · Feb 29, 2024 · US
US9599666B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9599666-B2 |
| Application number | US-201414525539-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 28, 2014 |
| Priority date | Oct 28, 2014 |
| Publication date | Mar 21, 2017 |
| Grant date | Mar 21, 2017 |
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A method and apparatus for mapping an electronic device. The electronic device is loaded into a test fixture, which may be an automated test equipment (ATE). A laser beam is stepped across locations of interest. At each location of interest a minimum voltage and/or maximum frequency are computed. A contour map of the changes in minimum voltage and maximum frequency across a field of view of the electronic device is generated. Additional embodiments provide signaling a laser scan module during the rising edge of a synchronization pulse to indicate that minimum voltage (Vmin) and maximum frequency (Fmax) specification search data is provided to a laser voltage probe. A Vmin/Fmax module compares the specification search data with the data read from the laser voltage probe and computes a parameter shift value. The laser beam is moved to another location when the falling edge of the synchronization pulse occurs.
Opening claim text (preview).
What is claimed is: 1. A method of mapping an electronic device, comprising: loading an electronic device into a test fixture; stepping a laser beam across locations of interest on the electronic device; parking the laser beam at one location of interest at a time on the electronic device; computing a minimum voltage at each location of interest; computing a maximum frequency at each location of interest; and generating a contour map of changes in minimum voltage and maximum frequency across a field of view of the electronic device. 2. The method of claim 1 , wherein the test fixture is an automated test fixture. 3. The method of claim 1 , wherein the locations of interest on the electronic device are failing cells. 4. The method of claim 3 , wherein the failing cells are determined by tests performed by the automated test equipment. 5. A method of mapping an electronic device, comprising: loading an electronic device into a test fixture; stepping a laser beam across locations of interest on the electronic device, wherein stepping a laser beam across locations of interest on the electronic device further comprises: signaling a laser scan module during a rising edge of a synchronization pulse that minimum voltage (Vmin) and maximum frequency (Fmax) specification search data is available; sending the Vmin and Fmax data from the test fixture to a laser voltage probe; logging the Vmin and the Fmax specification search data into a Vmin/Fmax mapping module; generating, by the Vmin/Fmax mapping module, a parameter shift value; and moving the laser beam to another position at a falling edge of the synchronization pulse; computing a minimum voltage at each location of interest; computing a maximum frequency at each location of interest; and generating a contour map of changes in minimum voltage and maximum frequency across a field of view of the electronic device. 6. The method of claim 5 , wherein the Vmin/Fmax mapping module uses the specification data and initial Vmin and Fmax data measured with no laser stimulation to generate the parameter shift value. 7. The method of claim 5 , wherein the laser beam is a continuous laser. 8. A method of mapping an electronic device, comprising: loading an electronic device into a test fixture; stepping a laser beam across locations of interest on the electronic device, wherein stepping a laser beam across locations of interest on the electronic device further comprises: logging data, by the test fixture, when a laser stimulus signal is at a high value; signaling, by the test fixture, the minimum voltage (Vmin) and maximum frequency (Fmax) specification search data availability, during a rising edge of a synchronization pulse; logging, by the test fixture and a laser scan module, the specification search data and coordinate locations; moving the laser to a next position when a falling edge of the synchronization pulse occurs; stopping logging data, by the test fixture, when the laser stimulus signal is at a low value; sending, by the test fixture, the Vmin and Fmax data to a laser voltage probe; and determining, by a Vmin/Fmax mapping module, a shift in Vmin and Fmax; computing a minimum voltage at each location of interest; computing a maximum frequency at each location of interest; and generating a contour map of changes in minimum voltage and maximum frequency across a field of view of the electronic device. 9. The method of claim 8 , wherein the laser beam is a continuous laser.
Characterising or performance testing, e.g. of frequency response (transient response G01R27/28) · CPC title
Automated test systems [ATE]; using microprocessors or computers (G01R31/317 takes precedence; ATE for detection of defective computer hardware G06F11/2736) · CPC title
of integrated circuits {(G01R31/31728 takes precedence)} · CPC title
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