Estimation of spectral feature of pulsed light beam

Patent metadata

Field	Value
Publication number	US-9599510-B2
Application number	US-201414488684-A
Country	US
Kind code	B2
Filing date	Sep 17, 2014
Priority date	Jun 4, 2014
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

First claim

What is claimed is:

1. A method of estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus, the method comprising:
receiving a set of N optical spectra of pulses of the light beam;
saving the received N optical spectra to a saved set;
transforming the optical spectra in the saved set to form a set of transformed optical spectra;
averaging at least two optical spectra of the set with each other to form an averaged spectrum; and
estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

2. The method of claim 1 , wherein receiving the set of N optical spectra of pulses of the light beam comprises receiving the set of N optical spectra of pulses from an output of a detector of a measurement system.

3. The method of claim 2 , wherein receiving the set of N optical spectra of pulses of the light beam comprises, for each of the N optical spectra of pulses, receiving a signal from a detector that is at an output of an etalon placed in the path of a portion of the pulsed light beam.

4. The method of claim 3 , wherein the portion of the pulsed light beam is divided from the main portion of the pulsed light beam.

5. The method of claim 1 , wherein transforming the optical spectra in the saved set comprises:
estimating a center of each optical spectrum in the saved set;
shifting the optical spectra so that all of the estimated centers align; and
scaling each optical spectrum.

6. The method of claim 1 , wherein transforming the optical spectra in the saved set comprises:
estimating a center of each optical spectrum in the saved set; and
shifting the optical spectra so that each of the estimated centers align with a target wavelength.

7. The method of claim 1 , further comprising receiving a request to change a wavelength of the pulsed light beam to a new wavelength.

8. The method of claim 7 , wherein transforming the optical spectra in the saved set comprises shifting the optical spectra to align their centers with the new wavelength.

9. The method of claim 1 , wherein averaging at least two optical spectra with each other comprises:
weighting each optical spectrum of the at least two optical spectra by a weighting factor; and
adding the intensities of each of the weighted optical spectra to form a summed spectrum.

10. The method of claim 9 , wherein averaging at least two optical spectra with each other comprises reducing the summed spectrum by a value that is a multiple of N.

11. The method of claim 1 , wherein estimating the spectral feature of the pulsed light beam based on the averaged spectrum comprises estimating a bandwidth value of the pulsed light beam based on the averaged spectrum.

12. The method of claim 11 , wherein estimating the bandwidth value of the pulsed light beam based on the averaged spectrum comprises measuring a width of the averaged spectrum.

13. The method of claim 12 , wherein measuring a width of the averaged spectrum comprises measuring a first width of the averaged spectrum at a first parameter and measuring a second width of the averaged spectrum at a second parameter.

14. The method of claim 11 , wherein estimating the bandwidth value of the pulsed light beam based on the averaged spectrum comprises deconvolving a source optical spectrum from an instrument function of the spectrometer that produces the optical spectra and measuring a width of the deconvolved source spectrum.

15. The method of claim 1 , further comprising outputting a signal based on the estimated spectral feature, the signal including a set of commands for operating a spectral property selection system connected to the optical source.

16. The method of claim 1 , further comprising scanning the pulsed light beam across the exposure field of the wafer, wherein each exposure field receives a plurality of pulses of the light beam.

17. The method of claim 16 , wherein estimating the spectral feature of the pulsed light beam based on the averaged spectrum comprises estimating the spectral feature within each exposure field of the wafer.

18. The method of claim 1 , further comprising:
removing an oldest optical spectrum from the saved set;
receiving an optical spectrum of another pulse of the light beam; and
saving the received optical spectrum of the other pulse to the saved set to form a refreshed saved set.

19. The method of claim 18 , further comprising:
transforming the optical spectra in the refreshed saved set to form a set of transformed optical spectra;
averaging at least two optical spectra of the set with each other to form an averaged spectrum; and
estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

20. The method of claim 18 , wherein receiving the optical spectrum of another pulse of the light beam comprises receiving the optical spectrum of the next pulse of the light beam that follows the last pulse that forms the set of N optical spectra.

21. A method of estimating a spectral feature of a pulsed light beam produced by an optical source and directed to an exposure window of a wafer of a lithography apparatus, the exposure window having N pulses, the method comprising:
scanning the pulsed light beam across an exposure field; and
for each exposure window within the exposure field:
receiving one or more optical spectra of pulses of the scanned light beam;
saving the received one or more optical spectra to a saved set;
transforming the one or more optical spectra in the saved set to form a set of transformed optical spectra;
averaging at least two optical spectra of the set with each other to form an averaged spectrum; and
estimating a spectral feature of the pulsed light beam across the exposure window of N pulses from the averaged spectrum.

22. The method of claim 21 , wherein receiving the one or more optical spectra of pulses of the scanned light beam comprises receiving the one or more optical spectra of pulses from an output of a detector of a measurement system.

23. The method of claim 21 , wherein transforming the one or more optical spectra in the saved set comprises:
estimating a center of each optical spectrum in the saved set;
shifting the optical spectra so that all of the estimated centers align; and
scaling each optical spectrum.

24. The method of claim 21 , wherein averaging at least two optical spectra with each other comprises:
weighting each optical spectrum of the at least two optical spectra by a weighting factor; and
adding the intensities of each of the weighted optical spectra to form a summed spectrum.

25. The method of claim 21 , wherein estimating the spectral feature of the pulsed light beam based on the averaged spectrum comprises determining a metric value of the bandwidth of the pulsed light beam based on the averaged spectrum.

26. The method of claim 21 , wherein each exposure field is shifted from the preceding or the succeeding exposure field in time by one or more pulses of the scanned light beam.

27. The method of claim 21 , further comprising, for at least some of the exposure windows within the exposure field, removing an oldest optical spectrum from the saved set before receiving the one or more optical spectra of pulses of the scanned light beam.

28. The method of claim 21 , wherein, for at least one exposure window within the exposure f

Assignees

• Cymer LLC
• Asml Netherlands Bv

Inventors

• Duffey Thomas P
• Godfried Herman Philip

Classifications

• G03F7/70058

  Mask illumination systems · CPC title

• G03F7/70041

  by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control · CPC title

• G01J3/027

  Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation · CPC title

• G01J2003/2853

  Averaging successive scans or readings · CPC title

• G01J3/26

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title