Plasma boundary limiter unit and apparatus for treating substrate

Patent metadata

Field	Value
Publication number	US-9597704-B2
Application number	US-201313779992-A
Country	US
Kind code	B2
Filing date	Feb 28, 2013
Priority date	Feb 29, 2012
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

Provided is an apparatus for treating a substrate. The apparatus comprises a plasma boundary limiter unit disposed within a process chamber to surround a discharge space defined above a support unit. The plasma boundary limiter unit comprises a plurality of plates disposed along a circumference of the discharge space, and the plurality of plates are spaced apart from each other along the circumference of the discharge space so that a gas within the discharge space flows to the outside of the discharge space through passages provided between the adjacent plates.

First claim

What is claimed is:

1. An apparatus for treating a substrate, the apparatus comprising:
a process chamber having an opening through which the substrate is loaded or unloaded, the process chamber including a door assembly adjacent to the opening, the door assembly including an outer door and an inner door:
a support within the process chamber configured to support the substrate; a gas supply configured to supply a process gas into the process chamber; a plasma generator configured to generate plasma from the process gas; and a plasma boundary limiter within the process chamber configured to surround a discharge space defined above the support, the plasma boundary limiter configured to reduce the plasma from leaking from the discharge space, the plasma boundary limiter including,
a plurality of plates along a circumference of the discharge space, the plurality of plates being spaced apart from each other along the circumference of the discharge space so that a gas within the discharge space flows outside of the discharge space through passages provided between adjacent ones of the plurality of plates, and a coupling member configured to couple the plurality of plates with each other, the coupling member having a first body that is fixedly coupled to the door.

2. The apparatus of claim 1 , wherein the coupling member is a ring body.

3. The apparatus of claim 2 , wherein the ring body is on upper ends of the plates.

4. The apparatus of claim 2 , wherein the ring body further comprises:
a second body combined with the first body to form a ring shape, wherein
the first body is vertically movable with respect to the second body within the process chamber.

5. The apparatus of claim 1 , wherein each of the plurality of plates have the same distance therebetween.

6. The apparatus of claim 1 , wherein the plurality of plates have different thicknesses in a vertical direction so that the passages have different widths in the vertical direction.

7. The apparatus of claim 6 , wherein each of the passages has a lower width less than an upper width thereof.

8. The apparatus of claim 4 , wherein the first body and the second body are combined with each other to form a circular ring shape, and
a length of a side parallel to a radius direction of the ring body of each of the plurality of plates is longer than that of a width side of the ring body.

9. The apparatus of claim 4 , wherein the first body and the second body are combined with each other to form a circular ring shape, and
the plurality of plates have the same width in a length direction thereof so that a distance between the plurality of plates along a radius direction of the ring body is gradually widened toward the outside of the discharge space.

10. The apparatus of claim 4 , wherein the first body and the second body are combined with each other to form a circular ring shape, and
each of the plurality of plates has a width gradually increasing in a length direction thereof toward the outside of the discharge space so that the plurality of plates along a radius direction of the ring body have the same distance therebetween.

11. The apparatus of claim 2 , wherein the plurality of plates along a length direction of the ring body have different distances therebetween.

12. The apparatus of claim 1 , wherein lower ends of the plurality of plates are adjacent to an upper end of the support.

13. The apparatus of claim 1 , wherein lower ends of the plurality of plates are under an upper end of the support.

14. The apparatus of claim 1 , wherein each of the plurality of plates is bent in a direction away from the discharge space.

15. The apparatus of claim 1 , wherein each of the plurality of plates is vertically bent.

16. The apparatus of claim 1 , wherein
the outer door is outside the process chamber,
the inner door is inside the process chamber facing the outer door, the inner door being coupled to the coupling member, and
the door assembly further includes a connection plate connecting the outer door to the inner door.

17. The apparatus of claim 1 , wherein the plasma boundary limiter is formed of a conductive material, and
the plasma boundary limiter is in contact with an upper electrode so that the plasma boundary limiter is electrically connected to the upper electrode.

18. A plasma boundary limiter configured to reduce leakage of plasma outside of a discharge space associated with an apparatus for treating a substrate using the plasma, the plasma boundary limiter comprising:
a plurality of plates; and
a coupling member configured to couple the plurality of plates with each other such that the plates are arranged along a circumference of the coupling member, the coupling member having a first body that is configured to be fixedly coupled to a door assembly of the apparatus for allowing the door assembly and the first body to be vertically driven together, the door assembly including an outer door and an inner door, the door driver configured to move the outer door and the plasma boundary limiter, wherein
the plurality of plates are spaced apart from each other along the circumference of the coupling member for allowing a gas to flow through passages provided between adjacent ones of the plurality of plates.

19. The plasma boundary limiter of claim 18 , wherein
the coupling member is a ring body, and
the plurality of plates are coupled to the ring body.

20. The plasma boundary limiter of claim 18 , wherein the ring body further comprises:
a second body combined with the first body to form a ring shape, wherein
the first body is vertically movable with respect to the second body within the process chamber.

21. The plasma boundary limiter of claim 19 , wherein a length of a side parallel to a radius direction of the ring body of each of the plurality of plates is longer than that of a width side of the ring body when viewed from an upper side.

22. The plasma boundary limiter of claim 18 , wherein the plurality of plates have different thicknesses in a vertical direction so that the passages have different widths in the vertical direction.

23. The plasma boundary limiter of claim 20 , wherein the plurality of plates along a length direction of the ring body have different distances therebetween.

24. The apparatus of claim 1 , wherein the first body is directly connected to the door assembly such that the door driver is configured to adjust the position of the plasma boundary limiter.

Assignees

• Semes Co Ltd

Inventors

• Koo Il Gyo
• Shim Hyun Jong

Classifications

• H10P72/0441

  Apparatus for sealing, encapsulating, glassing, decapsulating or the like · CPC title

• H01J37/32623 Primary

  Mechanical discharge control means · CPC title

• H01J37/32633

  Baffles · CPC title

• H01L21/67126

  Electricity · mapped topic

• B05C11/00 Primary

  Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00 (means for manipulating or holding work B05C13/00; enclosures for apparatus, booths B05C15/00; spray booths B05B16/00) · CPC title