Methods and apparatus for treating exhaust gas in a processing system

Patent metadata

Field	Value
Publication number	US-9597634-B2
Application number	US-201414300372-A
Country	US
Kind code	B2
Filing date	Jun 10, 2014
Priority date	Dec 3, 2009
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, an apparatus for treating an exhaust gas in a foreline of a substrate processing system includes a plasma source coupled to a foreline of a process chamber, a reagent source coupled to the foreline upstream of the plasma source, and a foreline gas injection kit coupled to the foreline to controllably deliver a gas to the foreline, wherein the foreline injection kit includes a pressure regulator to set a foreline gas delivery pressure setpoint, and a first pressure gauge coupled to monitor a delivery pressure of the gas.

First claim

The invention claimed is:

1. An apparatus for treating an exhaust gas in an exhaust conduit of a substrate processing system, comprising:
a plasma source coupled to an exhaust conduit of a process chamber;
a reagent source coupled to the exhaust conduit upstream of the plasma source;
a first control valve disposed between the reagent source and the exhaust conduit;
a gas injection kit coupled to the exhaust conduit to controllably deliver a gas to the exhaust conduit, wherein the gas injection kit includes:
a pressure regulator to set a gas delivery pressure setpoint;
a flow control device to provide a known flow of the gas at the pressure setpoint of the pressure regulator;
a first pressure gauge disposed between the pressure regulator and the flow control device to monitor a delivery pressure of the gas; and
a second control valve to selectively turn on and off the flow of the gas to the exhaust conduit; and

a controller coupled to a signal from the first pressure gauge to provide a feedback loop to control the pressure of the gas delivered by the gas injection kit, wherein the controller is configured to turn the second control valve on or off in response to the first control valve being turned on or off.

2. The apparatus of claim 1 , wherein the gas is argon.

3. The apparatus of claim 1 , wherein the gas is nitrogen (N 2 ).

4. The apparatus of claim 1 , wherein the gas is clean dry air.

5. The apparatus of claim 1 , further comprising:
a second pressure gauge coupled to the exhaust conduit to monitor a pressure in the exhaust conduit.

6. The apparatus of claim 5 , wherein the controller is configured to control the pressure in the exhaust conduit based on the pressure measured by the second pressure gauge.

7. The apparatus of claim 6 , wherein the controller is further configured to control the pressure in the exhaust conduit by control of the flow rate of reagent provided to the exhaust conduit by the reagent source and a flow rate of the gas provided by the gas injection kit.

8. The apparatus of claim 6 , further comprising:
a vacuum pump having variable pumping capacity coupled to the exhaust conduit.

9. The apparatus of claim 8 , wherein the controller adjusts the pumping capacity of the vacuum pump based on the pressure measured by the second pressure gauge.

10. The apparatus of claim 1 , wherein the exhaust conduit comprises a foreline coupled to the process chamber and the plasma source is coupled to the foreline.

11. The apparatus of claim 1 , wherein the gas injection kit is coupled to the exhaust conduit upstream of the plasma source.

12. The apparatus of claim 1 , wherein the gas injection kit is coupled to the exhaust conduit at a first location different than a second location where the reagent source is coupled to the exhaust conduit.

13. The apparatus of claim 1 , further comprising:
a gas panel and control system coupled to the process chamber to supply a flow of a cleaning gas to the exhaust conduit, upstream of the plasma source.

14. The apparatus of claim 1 , wherein the controller is configured to control the second control valve such that gas is only provided when the first control valve is open and reagent from the reagent source is flowing into the exhaust conduit.

15. An apparatus for treating an exhaust gas in a foreline of a substrate processing system, comprising:
a plasma source coupled to a foreline of a process chamber;
a reagent source coupled to the foreline upstream of the plasma source;
a first control valve disposed between the reagent source and the foreline;
a gas injection kit coupled to the foreline to controllably deliver a gas to the foreline, wherein the gas injection kit includes a pressure regulator to set a gas delivery pressure setpoint, a flow control device to provide a known flow of the gas at the pressure setpoint of the pressure regulator, and a first pressure gauge disposed between the pressure regulator and the flow control device to monitor a delivery pressure of the gas;
a second control valve to selectively turn on and off the flow of the gas to the foreline;
a controller coupled to a signal from the first pressure gauge to provide a feedback loop to control the pressure of the gas delivered by the gas injection kit, wherein the controller is further configured to turn the second control valve on or off in response to the first control valve being turned on or off; and
a second pressure gauge coupled to the foreline to monitor a pressure in the foreline.

16. The apparatus of claim 15 , wherein the gas injection kit is coupled to the foreline upstream of the plasma source.

17. The apparatus of claim 15 , wherein the gas injection kit is coupled to the foreline at a first location different than a second location where the reagent source is coupled to the foreline.

18. The apparatus of claim 15 , further comprising:
a gas panel and control system coupled to the process chamber to supply a flow of a cleaning gas to the foreline, upstream of the plasma source.

19. The apparatus of claim 15 , wherein the controller is configured to control the second control valve such that gas is only provided when the first control valve is open and reagent from the reagent source is flowing into the foreline.

Assignees

• Applied Materials Inc

Inventors

• Dickinson Colin John
• Moalem Mehran
• Clark Daniel O

Classifications

• B01D2259/122

  Gaseous reactants · CPC title

• B01D2259/80

  Employing electric, magnetic, electromagnetic or wave energy, or particle radiation · CPC title

• H05H1/46

  using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) · CPC title

• B01D2258/0216

  from CVD treatment or semi-conductor manufacturing · CPC title

• B01D53/92 Primary

  of engine exhaust gases (exhaust {or silencing} apparatus {for internal combustion engines, machines or engines in general}, having means for purifying, {rendering innocuous} or otherwise treating exhaust gases F01N3/00) · CPC title