Reactance filter having a steep edge

Patent metadata

Field	Value
Publication number	US-9595939-B2
Application number	US-201013254383-A
Country	US
Kind code	B2
Filing date	Mar 2, 2010
Priority date	Mar 4, 2009
Publication date	Mar 14, 2017
Grant date	Mar 14, 2017

Abstract

A reactance filter includes a series branch that connects a signal input to a signal output. At least one parallel branch branches off from the series branch with respect to ground. A parallel resonator is arranged in each parallel branch. Two or more series resonators are connected in series in the series branch. A capacitor is connected in parallel with one of the series resonators in the series branch.

First claim

The invention claimed is:

1. A reactance filter comprising:
a series branch, which connects a signal input to a signal output;
at least one parallel branch that branches off from the series branch with respect to ground, wherein a parallel resonator is arranged in each of the at least one parallel branch;
two or more series resonators connected in series in the series branch, wherein the two or more series resonators and the parallel resonator(s) of the at least one parallel branch comprise BAW resonators and are realized as a structured layer construction on a substrate;
a capacitor connected in parallel with one of the two or more series resonators in the series branch;
an insulation layer arranged between the capacitor and the substrate, wherein the capacitor comprises a metal 1 /dielectric/metal 2 layer sequence, wherein a partial area of an electrode layer of one of the two or more series resonators connected in parallel with the capacitor comprises a bottom electrode and a top electrode of the one series resonator, wherein one of the electrode layers is the metal 2 layer; and
an acoustic mirror arranged on the substrate,
wherein the one series resonator connected in parallel with the capacitor is located over the acoustic mirror,
wherein the acoustic mirror comprises a high-impedance layer comprising a metal, and
wherein the high-impedance layer is the metal 1 layer in the layer sequence of the capacitor.

2. The reactance filter according to claim 1 , wherein the capacitor and the two or more series resonators in the series branch and the parallel resonator(s) in the at least one parallel branch, are located next to each other in the structured layer construction.

3. The reactance filter according to claim 1 ,
wherein the structured layer construction comprises the acoustic mirror below the bottom electrode of the one series resonator in a resonator region that includes the one or more of the series resonators in the series branch and the parallel resonator(s) in the at least one parallel branch, and
wherein no bottom electrode of the one series resonator is located in a capacitor region, such that the capacitor is formed between the metal 2 layer comprising the top electrode of the one series resonator and the metal 1 layer comprising the high-impedance layer.

4. The reactance filter according to claim 1 ,
wherein the structured layer construction comprises the acoustic mirror below the bottom electrode of the one series resonator in a resonator region that includes one or more of the series and parallel resonators, and
wherein the capacitor is formed between the metal 2 layer comprising the bottom electrode of the one series resonator and the metal 1 layer comprising the high-impedance layer.

5. The reactance filter according to claim 4 , wherein the top electrode of the one series resonator and the high-impedance layer are electrically conductively connected via a plated-through hole arranged outside the resonator region.

6. The reactance filter according to claim 4 , wherein the structured layer construction is divided into the resonator region and a capacitor region arranged laterally thereto, and wherein the capacitor region and the resonator region at least partly overlap.

7. The reactance filter according to claim 1 ,
wherein the capacitor is connected in parallel with the one series resonator of the two or more series resonators situated closest to the signal input, and
wherein at least one remaining series resonator of the two or more series resonators does not have the capacitor connected in parallel.

8. The reactance filter according to claim 1 , wherein the capacitor has a capacitance of between 1% and 50% of a static capacitance of the associated series resonator.

9. The reactance filter according to claim 1 , wherein the capacitor has a resonant frequency that is shifted relative to a resonant frequency of the one series resonator by a layer applied to a top electrode of the capacitor.

10. The reactance filter according to claim 1 , wherein the capacitor has a resonant frequency that is shifted relative to a resonant frequency of the one series resonator by virtue of the fact that the capacitor has one layer fewer than the one series resonator.

11. A method comprising:
providing the reactance filter according to claim 1 ; and
applying a signal to the signal input.

12. The method according to claim 11 , wherein the reactance filter operates as a transmission filter in a duplexer for a CDMA or a WCDMA mobile radio system.

13. The method according to claim 12 , wherein the duplexer comprises the reactance filter as the transmission filter and a further filter which operates as a reception filter, wherein the transmission filter and reception filter are formed on separate substrates.

14. The method according to claim 11 , wherein the reactance filter operates as a transmission filter in a duplexer for a PCS mobile radio system.

15. The method according to claim 14 , wherein the duplexer comprises the reactance filter as a transmission filter and a further filter as a reception filter, wherein the transmission filter and reception filter are formed on separate substrates.

16. A reactance filter comprising:
a series branch, which connects a signal input to a signal output;
at least one parallel branch that branches off from the series branch with respect to ground, wherein a parallel resonator is arranged in each of the at least one parallel branch;
two or more series resonators connected in series in the series branch; and
a capacitor connected in parallel with one of the two or more series resonators in the series branch, wherein the capacitor has a capacitance of between 1% and 50% of a static capacitance of the associated series resonator.

17. A reactance filter comprising:
a series branch, which connects a signal input to a signal output;
at least one parallel branch that branches off from the series branch with respect to ground, wherein a parallel resonator is arranged in each of the at least one parallel branch;
two or more series resonators connected in series in the series branch, wherein the two or more series resonators and the parallel resonator(s) of the at least one parallel branch comprise BAW resonators and are realized as a structured layer construction on a substrate;
a capacitor connected in parallel with one of the two or more series resonators in the series branch;
an insulation layer arranged between the capacitor and the substrate, wherein the capacitor comprises a metal 1 /dielectric/metal 2 layer sequence, wherein a partial area of an electrode layer of the one series resonator connected in parallel with the capacitor is the metal 1 layer or the metal 2 layer; and
an acoustic mirror on the substrate, the one series resonator connected in parallel with the capacitor being located over the acoustic mirror,
wherein the structured layer construction is divided into a resonator region and a capacitor region arranged laterally thereto,
wherein a piezoelectric layer is provided above a bottom electrode and a top electrode is provided above the piezoelectric layer in the resonator region,
wherein the metal 2 layer is the top electrode and the metal 1 layer is the bottom electrode in the capacitor region,
wherein the bottom electrode comprises a layer of a hard metal and a layer of a soft metal, and
wherein one of the two layers of the hard metal or the soft metal is present in the capacitor region, while the other one of the two layers is not present.

Assignees

• Link Andreas
• Marksteiner Stephan
• Epcos Ag

Inventors

• Link Andreas
• Marksteiner Stephan

Classifications

• H03H9/542 Primary

  including passive elements (H03H9/545 takes precedence) · CPC title

• H03H9/02007

  of bulk acoustic wave devices · CPC title

• H03H9/568

  consisting of a ladder configuration · CPC title

• H03H9/605

  consisting of a ladder configuration · CPC title

• H03H9/02157

  Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness · CPC title