Electrostatic actuator

Patent metadata

Field	Value
Publication number	US-9595892-B2
Application number	US-201113639017-A
Country	US
Kind code	B2
Filing date	Apr 28, 2011
Priority date	May 28, 2010
Publication date	Mar 14, 2017
Grant date	Mar 14, 2017

Abstract

An electrostatic actuator 100 includes: a stator 1 that includes a substrate 102 and a plurality of linear electrodes 1 a to 1 d separately provided on the substrate 102 and arranged in parallel; and a movable element 2 disposed on the linear electrodes 1 a to 1 d of the stator 1 . Multiple projecting elements 104 b are provided at regular intervals on a surface of the stator 1 so as to face the movable element 2 , forming a mat surface. A smooth layer 105 is formed on a surface of the movable element 2 so as to face the mat surface.

First claim

The invention claimed is:

1. An electrostatic actuator comprising:
a stator that includes a substrate and electrodes provided on the substrate; and
a movable element disposed on a surface of the stator with the electrodes disposed on the surface,
wherein the electrostatic actuator further comprises:
multiple projecting elements equally spaced on a surface of the stator so as to face the movable element or on a surface of the movable element so as to face the stator, the multiple projecting elements being distributed in triangular lattices on the surface of the stator or on the surface of the movable element; and
a smooth layer formed on the surface of the movable element or the surface of the stator so as to face the multiple projecting elements, wherein all adjacent multiple projecting elements are evenly spaced so as to have smaller in-plane variations in the distribution of the projecting elements.

2. The electrostatic actuator according to claim 1 , wherein the multiple projecting elements are multiple linear projecting elements.

3. The electrostatic actuator according to claim 2 , wherein the electrodes are a plurality of linear electrodes that are separately provided on the substrate and are arranged in parallel, and
the linear projecting elements are extended perpendicularly to the plurality of linear electrodes.

4. The electrostatic actuator according to claim 3 , further comprising an additional smooth layer at least in a part other than the multiple projecting elements on the surface of the stator or the surface of the movable element.

5. The electrostatic actuator according to claim 2 , further comprising an additional smooth layer at least in a part other than the multiple projecting elements on the surface of the stator or the surface of the movable element.

6. The electrostatic actuator according to claim 2 , wherein the multiple projecting elements are made of a conductive material.

7. The electrostatic actuator according to claim 3 , wherein the multiple projecting elements are made of a conductive material.

8. The electrostatic actuator according to claim 1 , wherein the multiple projecting elements are conical elements.

9. The electrostatic actuator according to claim 8 , further comprising an additional smooth layer at least in a part other than the multiple projecting elements on the surface of the stator or the surface of the movable element.

10. The electrostatic actuator according to claim 8 , wherein the multiple projecting elements are made of a conductive material.

11. The electrostatic actuator according to claim 1 , further comprising an additional smooth layer at least in a part other than the multiple projecting elements on the surface of the stator or the surface of the movable element.

12. The electrostatic actuator according to claim 11 , further comprising additional smooth layers formed on surfaces of the multiple projecting elements.

13. The electrostatic actuator according to claim 12 , wherein the multiple projecting elements are made of a conductive material.

14. The electrostatic actuator according to claim 11 , wherein the multiple projecting elements are made of a conductive material.

15. The electrostatic actuator according to claim 1 , wherein the multiple projecting elements are made of a conductive material.

16. The electrostatic actuator according to claim 1 , wherein the smooth layer is made of carbon-containing silica.

Assignees

• Takahashi Norio
• Dainippon Printing Co Ltd

Inventors

• Takahashi Norio

Classifications

• H02N3/00

  Generators in which thermal or kinetic energy is converted into electrical energy by ionisation of a fluid and removal of the charge therefrom (discharge tubes functioning as thermionic generators H01J45/00) · CPC title

• H02N1/004 Primary

  in which a body is moved along a path due to interaction with an electric field travelling along the path · CPC title

• H02N1/00

  Electrostatic generators or motors using a solid moving electrostatic charge carrier · CPC title