Semiconductor device including nanowire transistors with hybrid channels

Patent metadata

Field	Value
Publication number	US-9595525-B2
Application number	US-201414176224-A
Country	US
Kind code	B2
Filing date	Feb 10, 2014
Priority date	Feb 10, 2014
Publication date	Mar 14, 2017
Grant date	Mar 14, 2017

Abstract

A semiconductor device is provided that includes an n-type field effect transistor including a plurality of vertically stacked silicon-containing nanowires located in one region of a semiconductor substrate, and a p-type field effect transistor including a plurality of vertically stacked silicon germanium alloy nanowires located in another region of a semiconductor substrate. Each vertically stacked silicon-containing nanowire of the n-type field effect transistor has a different shape than the shape of each vertically stacked silicon germanium alloy nanowire of the p-type field effect transistor.

First claim

What is claimed is:

1. A semiconductor device comprising:
an n-type field effect transistor comprising a plurality of vertically stacked silicon-containing nanowires located in one region of a semiconductor substrate;
a p-type field effect transistor comprising a plurality of vertically stacked silicon germanium alloy nanowires located in another region of said semiconductor substrate, wherein said vertically stacked silicon-containing nanowires have a different semiconductor composition than said vertically stacked silicon germanium alloy nanowires and wherein each vertically stacked silicon-containing nanowire of the n-type field effect transistor has a first geometric shape and each vertically stacked silicon germanium alloy nanowire of the p-type field effect transistor has a second geometric shape, wherein said second geometric shape is different from said first geometric shape; and
a passive device located between said n-type field effect transistor and said p-type field effect transistor and yet in another region of said semiconductor substrate, wherein said passive device comprises a gated diode that comprises a semiconductor material body that is entirely composed of a silicon germanium alloy having a germanium content of 40 atomic or less, an N+ region located on one sidewall surface of said semiconductor material body, a P+ region located on another sidewall surface of said semiconductor material body and opposite said sidewall containing said N+ region, and a gate structure straddling over said semiconductor material body, wherein a topmost surface of said semiconductor material body of said passive device is coplanar with a topmost surface of an uppermost silicon-containing nanowire and a bottommost surface of said semiconductor material body of said passive device directly contacts a portion of a topmost semiconductor material surface of said semiconductor substrate.

2. The semiconductor device of claim 1 , wherein said silicon germanium alloy of said passive device has a germanium content that is less than a germanium content of each of said vertically stacked silicon germanium alloy nanowires.

3. The semiconductor device of claim 1 , wherein said first geometric shape of each of said vertically stacked silicon-containing nanowires is parallelepiped, and said second geometric shape of each of said vertically stacked silicon germanium alloy nanowires is circular.

4. The semiconductor device of claim 1 , wherein said n-type field effect transistor comprises a gate dielectric material potion wrapped around each of said vertically stacked silicon-containing nanowires, and a gate conductor portion located on said gate dielectric portion.

5. The semiconductor device of claim 4 , wherein a source region is present in each of said vertically stacked silicon-containing nanowires and located on one side of the gate conductor portion, and a drain region is present in each of said of said vertically stacked silicon-containing nanowires and located on another side of the gate conductor portion.

6. The semiconductor device of claim 5 , wherein each source region is merged and each drain region is merged.

7. The semiconductor device of claim 1 , wherein said p-type field effect transistor comprises a gate dielectric material potion wrapped around each of said vertically stacked silicon germanium alloy nanowires, and a gate conductor portion located on said gate dielectric portion.

8. The semiconductor device of claim 7 , wherein a source region is present in each of said vertically stacked silicon germanium alloy nanowires and located on one side of the gate conductor portion, and a drain region is present in each of said of said vertically stacked silicon germanium alloy nanowires and located on another side of the gate conductor portion.

9. The semiconductor device of claim 8 , wherein each source region is merged and each drain region is merged.

10. The semiconductor device of claim 1 , wherein said N+ region comprises an n-doped silicon germanium alloy having a germanium content of 40 atomic or less.

11. The semiconductor device of claim 10 , further comprising an epitaxial semiconductor material located on said n-doped silicon germanium alloy.

12. The semiconductor device of claim 1 , wherein said P+ region comprises a p-doped silicon germanium alloy having a germanium content of 40 atomic or less.

13. The semiconductor device of claim 12 , further comprising an epitaxial semiconductor material is located on said p-doped silicon germanium alloy.

Assignees

• IBM

Inventors

• Cheng Kangguo
• Hashemi Pouya
• Khakifirooz Ali
• Reznicek Alexander

Classifications

• H10P50/693

  characterised by their size, orientation, disposition, behaviour or shape, in horizontal or vertical plane · CPC title

• H10P14/6322

  Formation by thermal treatments (formation by plasma treatment H10P14/6319) · CPC title

• H10P50/692

  characterised by their composition, e.g. multilayer masks or materials · CPC title

• H10P14/6308

  of Group IV semiconductors · CPC title

• H10P14/3411

  Silicon, silicon germanium or germanium · CPC title