Density multiplication and improved lithography by directed block copolymer assembly
US-9183870-B2 · Nov 10, 2015 · US
US9595284B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9595284-B2 |
| Application number | US-201414767515-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 24, 2014 |
| Priority date | Feb 22, 2013 |
| Publication date | Mar 14, 2017 |
| Grant date | Mar 14, 2017 |
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A magnetic-disk glass substrate has a circular hole at a center, and includes a pair of main surfaces and a side wall surface orthogonal to the main surfaces. A roundness of the circular hole is 1.5 μm or less. A difference between a maximum value and a minimum value of radii of three inscribed circles that are respectively derived from outlines in the circumferential direction at three positions spaced apart by 200 μm in a substrate thickness direction on the side wall surface of the circular hole is 3.5 μm or less.
Opening claim text (preview).
The invention claimed is: 1. A magnetic-disk glass substrate having a circular hole at a center, the magnetic-disk glass substrate comprising: a pair of main surfaces; and a side wall surface orthogonal to the main surfaces, a substrate thickness of the magnetic-disk glass substrate being 0.635 mm or less, a roundness of the circular hole being 1.5 μm or less, and a difference between a maximum value and a minimum value of radii of three inscribed circles that are respectively derived from outlines in a circumferential direction at three positions spaced apart by 100 μm in a substrate thickness direction on the side wall surface of the circular hole being 3.5 μm or less. 2. The magnetic-disk glass substrate according to claim 1 , wherein a surface roughness Rz of the side wall surface of the circular hole is 0.2 μm or less. 3. The magnetic-disk glass substrate according to claim 1 , wherein an average coefficient of thermal expansion from 100° C. to 300° C. is 60×10 −7 (K −1 ) or less. 4. The magnetic-disk glass substrate according to claim 1 , wherein with regard to a surface roughness of the side wall surface of the circular hole, in a case where a maximum height in the substrate thickness direction is Rz(t) and a maximum height in the circumferential direction is Rz(c), Rz(t)/Rz(c) is 1.2 or less. 5. The magnetic-disk glass substrate according to claim 1 , wherein when a measurement point is provided every 30 degrees in the circumferential direction referenced on the center of the magnetic-disk glass substrate, and a radius of curvature of a shape of a portion between the side wall surface and a chamfered surface of the circular hole at the measurement point is derived, a difference in the radius of curvature between adjacent measurement points is 0.01 mm or less. 6. A magnetic disk in which at least a magnetic layer is formed on a main surface of the magnetic-disk glass substrate according to claim 1 .
manufacturing base layers · CPC title
Disk carriers · CPC title
Physics · mapped topic
Glass or ceramic substrates · CPC title
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