Spectral apparatus, detection apparatus, light source apparatus, reaction apparatus, and measurement apparatus

Patent metadata

Field	Value
Publication number	US-9594253-B2
Application number	US-201414294480-A
Country	US
Kind code	B2
Filing date	Jun 3, 2014
Priority date	Jun 7, 2013
Publication date	Mar 14, 2017
Grant date	Mar 14, 2017

Abstract

The present invention provides a spectral apparatus for spectrally separating light including a predetermined wavelength, including a slit that the light enters, a first optical system configured to collimate the light from the slit, a transmissive type diffraction element configured to diffract the light from the first optical system, and a second optical system including a first mirror configured to reflect the light diffracted by the transmissive type diffraction element, and a second mirror configured to reflect the light reflected by the first mirror and diffracted by the transmissive type diffraction element, and configured to make the light reciprocally travel between the first mirror and the second mirror via the transmissive type diffraction element.

First claim

What is claimed is:

1. An apparatus comprising:
a slit that light enters;
a first optical system configured to collimate the light from the slit;
a transmissive type diffraction element configured to diffract the light from the first optical system; and
a second optical system including a first mirror configured to reflect the light diffracted by the transmissive type diffraction element, and a second mirror configured to reflect the light reflected by the first mirror and diffracted by the transmissive type diffraction element, and configured to make the light reciprocally travel between the first mirror and the second mirror via the transmissive type diffraction element,
wherein the first optical system and the transmissive type diffraction element are arranged such that an incident angle of the light that enters the transmissive type diffraction element equals an exit angle of the light that exits from the transmissive type diffraction element,
the first mirror is arranged such that an optical path of the light diffracted by the transmissive type diffraction element and traveling toward the first mirror and an optical path of the light reflected by the first mirror and traveling toward the transmissive type diffraction element exist in one first plane without overlapping each other in the first plane, and
the second mirror is arranged such that an optical path of the light diffracted by the transmissive type diffraction element and traveling toward the second mirror and an optical path of the light reflected by the second mirror and traveling toward the transmissive type diffraction element exist in one second plane without overlapping each other in the second plane.

2. The apparatus according to claim 1 , wherein the first optical system enlarges the light from the slit by a first magnification in a repeating direction of a grating of the transmissive type diffraction element and by a second magnification lower than the first magnification in a direction perpendicular to the repeating direction.

3. The apparatus according to claim 1 , additionally comprising:
a detector including a plurality of pixels configured to detect an intensity of diffracted light transmitted through the transmissive type diffraction element; and
an imaging optical system configured to form an image of the transmission diffracted light on the plurality of pixels.

4. The apparatus according to claim 3 , wherein the plurality of pixels are two-dimensionally arrayed.

5. The apparatus according to claim 3 , wherein the light including the predetermined wavelength comprises light from an optical comb light source having a longitudinal mode interval that can spatially be separated by the detector, and
the detector detects the intensity for each wavelength of the light from the optical comb light source.

6. The apparatus according to claim 1 , additionally comprising:
an optical comb light source configured to emit light including the predetermined wavelength and having a longitudinal mode interval that can spatially be separated;
an imaging optical system configured to form an image of light of a longitudinal mode that stops entering said first mirror by repetitively reciprocally traveling in the second optical system; and
an extraction unit arranged on an imaging plane of the imaging optical system and configured to extract the light of the longitudinal mode whose image has been formed by the imaging optical system.

7. The apparatus according to claim 6 , wherein the extraction unit includes an optical fiber arranged at a position where the imaging optical system forms an image of light of a longitudinal mode corresponding to the predetermined wavelength out of light components of a plurality of longitudinal modes included in the light from the optical comb light source.

8. The apparatus according to claim 6 , wherein the extraction unit includes a plurality of optical fibers arranged at a plurality of positions where the imaging optical system forms images of light components of a plurality of longitudinal modes included in the light from the optical comb light source.

9. The apparatus according to claim 6 , wherein the extraction unit extracts each of light components of a plurality of longitudinal modes included in the light from the optical comb light source,
the apparatus further comprising:
a modulation unit configured to modulate each of the light components of the plurality of longitudinal modes extracted by the extraction unit; and
a combining unit configured to combine the light components of the plurality of longitudinal modes modulated by the modulation unit.

10. The apparatus according to claim 9 , wherein the modulation unit modulates each of the light components of the plurality of longitudinal modes extracted by the extraction unit such that the light combined by the combining unit has a predetermined shape.

11. The apparatus according to claim 9 , wherein the combining unit includes:
a third mirror configured to reflect each of the light components of the plurality of longitudinal modes modulated by the modulation unit; and
a circulator configured to separate combined light of the plurality of longitudinal modes reflected by the third mirror,
the third mirror reflects each of the light components of the plurality of longitudinal modes modulated by the modulation unit such that each of the light components of the plurality of longitudinal modes modulated by the modulation unit returns to an optical path until the light component enters the third mirror, and
the circulator is arranged between the optical comb light source and the slit.

12. The apparatus according to claim 9 , additionally comprising:
an optical system configured to irradiate an object with light emitted by the light source apparatus; and
a measurement unit configured to measure at least one of a reaction rate and a reaction state of the object by light irradiation from the optical system.

13. The apparatus according to claim 7 , additionally comprising:
an optical system configured to irradiate an object with light emitted by the light source apparatus; and
a measurement unit configured to measure information about light absorbed by the object out of the light with which the optical system irradiates the object.

14. The apparatus according to claim 6 , further comprising:
an adjustment unit configured to adjust an intensity of the light emitted by the optical comb light source such that at least one of a plurality of longitudinal modes obtained by the light source apparatus has a predetermined wavelength.

Assignees

• Canon Kk
• Univ Tokyo

Inventors

• Sukegawa Takashi
• Kobayashi Yohei
• Ozawa Akira
• Endo Mamoru
• Gonokami Makoto

Classifications

• G01J3/2823

  Imaging spectrometer · CPC title

• G01J1/0414

  using plane or convex mirrors, parallel phase plates, or plane beam-splitters · CPC title

• G01J1/0411

  using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction · CPC title

• G01N21/75

  Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated (systems in which material is burnt in a flame or plasma G01N21/72, G01N21/73) · CPC title

• G01J3/0208

  using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction · CPC title