Analyzing apparatus and calibration method

Patent metadata

Field	Value
Publication number	US-9594037-B2
Application number	US-201514715812-A
Country	US
Kind code	B2
Filing date	May 19, 2015
Priority date	May 20, 2014
Publication date	Mar 14, 2017
Grant date	Mar 14, 2017

Abstract

In an analyzing apparatus for analyzing compositions using a fluorescent X-ray in the atmosphere, a calibration to eliminate influences caused by a time-dependent change is performed. The analyzing apparatus includes an emission unit, a detection unit, an environment measurement unit, and a time-dependent change calculation unit. The emission unit emits a primary X-ray. The detection unit detects an intensity of a secondary X-ray passing through the atmosphere. The environment measurement unit measures an environment parameter defining the atmosphere. The time-dependent change calculation unit calculates a time-dependent change of the intensity of the secondary X-ray between a first timing and a second timing, based on a first environment parameter, a first intensity of the secondary X-ray, a second environment parameter, and a second intensity of the secondary X-ray.

First claim

What is claimed is:

1. An analyzing apparatus for analyzing compositions of particulate matter based on a fluorescent X-ray generated from the particulate matter, the analyzing apparatus comprising:
an emission unit configured to emit a primary X-ray in the atmosphere, the primary X-ray exciting the particulate matter to generate the fluorescent X-ray;
a detection unit configured to detect a secondary X-ray generated by emitting the primary X-ray and passing through the atmosphere;
an environment measurement unit configured to measure an environment parameter comprising at least one of temperature, pressure, and humidity defining the atmosphere; and
a time-dependent change calculation unit configured to calculate a time-dependent change or a rate of the time-dependent change between intensities of the secondary X-rays detected at a first timing and at a second timing, based on a first environment parameter, a first intensity of the secondary X-ray, a second environment parameter, and a second intensity of the secondary X-ray, wherein
the first timing is the timing after the elapse of a predetermined period from the second timing, the first environment parameter is measured at the first timing by the environment measurement unit, the first intensity of the secondary X-ray is an intensity of the secondary X-ray detected at the first timing by the detection unit, the second environment parameter is measured at the second timing by the environment measurement unit, and the second intensity of the secondary X-ray is an intensity of the secondary X-ray detected at the second timing by the detection unit.

2. The analyzing apparatus according to claim 1 , further comprising a collection filter configured to collect the particulate matter, and wherein the first intensity of the secondary X-ray and the second intensity of the secondary X-ray are intensities of scattered X-rays generated by emitting the primary X-ray to a non-collection area of the collection filter.

3. A calibration method of an analyzing apparatus for analyzing compositions of particulate matter based on a fluorescent X-ray generated by emitting a primary X-ray to the particulate matter, the calibration method comprising:
measuring a first environment parameter comprising at least one of temperature, pressure, and humidity at a first timing;
measuring a first intensity of a secondary X-ray at the first timing;
measuring a second environment parameter comprising at least one of temperature, pressure, and humidity at a second timing, the first timing being the timing after the elapse of a predetermined period from the second timing;
measuring a second intensity of the secondary X-ray at the second timing; and
calculating a time-dependent change or a rate of the time-dependent change between intensities of the secondary X-rays detected at the first timing and at the second timing, based on the first environment parameter, the first intensity of the secondary X-ray, the second environment parameter, and the second intensity of the secondary X-ray.

Assignees

• Horiba Ltd

Inventors

• Mizuno Yusuke
• Aoyama Tomoki

Classifications

• G01N2223/651

  dust · CPC title

• G01N23/223 Primary

  by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence · CPC title

• G01N1/2205

  with filters · CPC title

• G01T7/005

  calibration techniques (stabilization of spectrometer G01T1/40) · CPC title

• G01N15/0625

  Optical scan of the deposits · CPC title