Methods of establishing low-resistance electrical contact to carbon nanostructures with graphitic interfacial layer

Patent metadata

Field	Value
Publication number	US-9593014-B2
Application number	US-201113199702-A
Country	US
Kind code	B2
Filing date	Sep 7, 2011
Priority date	Sep 7, 2011
Publication date	Mar 14, 2017
Grant date	Mar 14, 2017

Abstract

A method of conductively coupling a carbon nanostructure and a metal electrode is provided that includes disposing a carbon nanostructure on a substrate, depositing a carbon-containing layer on the carbon nanostructure, according to one embodiment, and depositing a metal electrode on the carbon-containing layer. Further provided is a conductively coupled carbon nanostructure device that includes a carbon nanostructure disposed on a substrate, a carbon-containing layer disposed on the carbon nanostructure and a metal electrode disposed on the carbon-containing layer, where a low resistance coupling between the carbon nanostructure and metal elements is provided.

First claim

What is claimed:

1. An electrically conductive carbon nanostructure device comprising a single carbon nanotube disposed on a planar substrate, an ˜2 nm thick nickel catalized electrically conductive amorphous carbon-containing interfacial layer disposed on said single carbon nanotube, wherein said single carbon nanotube is fully wrapped by said ˜2 nm thick nickel catalized electrically conductive amorphous carbon-containing interfacial layer, and a metal electrode disposed on top of said ˜2 nm thick nickel catalized electrically conductive amorphous carbon-containing interfacial layer and on top of said planar substrate, wherein said ˜2 nm thick nickel catalized electrically conductive amorphous carbon-containing interfacial layer is in a graphitized state, wherein said ˜2 nm thick nickel catalized carbon-containing interfacial layer in a graphitized state comprises a covalent chemical bond to said single carbon nanotube having an enhanced electrical contact area relative to a non-graphitized electrically conductive interfacial layer, wherein said covalent bonding between said single carbon nanotube and said ˜2 nm thick nickel catalized electrically conductive amorphous carbon-containing interfacial layer in a graphitized state comprises a sp 2 bonding that is similar to a sp 2 bonding of said the carbon nanotube forming an extended effective wave function overlap for electrical conduction band electrons in the form of P z -P z covalent bonding, wherein said ˜2 nm thick nickel catalized electrically conductive amorphous electrically conductive carbon-containing interfacial layer in a graphitized state is configured to enhance electrical conductivity between said single carbon nanotube and said metal electrode.

2. The carbon nanostructure device of claim 1 , wherein said metal electrode comprises a metal-mediated layer or a metal carbide mediated layer.

3. The carbon nanostructure device of claim 2 , wherein said metal-mediated layer or said metal carbide mediated layer comprises a material selected from the group consisting of Ni, Co, Fe, Cr, Ti, Nb, Zr, Hf, Ta, Mo and Cu.

4. The carbon nanostructure device of claim 1 , wherein said ˜2 nm thick nickel catalized carbon-containing interfacial layer in a graphitized state is selected from the group consisting of graphene, amorphous carbon, carbon-hydrogen system and carbon-containing organic materials.

5. The carbon nanostructure device of claim 1 , wherein said metal electrode is a material selected from the group consisting of Au, Pt, Pd, W, Al, Ta, Ca, Cu, Y and Sc.

6. The carbon nanostructure device of claim 1 , wherein said metal electrode comprises a mediated or metal carbide mediated layer.

7. The carbon nanostructure device of claim 1 , wherein said ˜2 nm thick nickel catalized carbon-containing interfacial layer in a graphitized state is a patterned layer.

8. The carbon nanostructure device of claim 1 , wherein said metal electrode is a patterned layer.

9. The carbon nanostructure device of claim 1 further comprises a semiconducting structure or a metallic structure.

10. The carbon nanostructure device of claim 1 , wherein said substrate is selected from the group consisting Si/SiO 2 , quartz, glass, plastic, paper, polymide and Kapton.

Assignees

• Chai yang
• Hazeghi Arash
• Takei Kuniharu
• Javey Ali
• Wong H S Philip
• Univ Leland Stanford Junior
• Univ California

Inventors

• Chai yang
• Hazeghi Arash
• Takei Kuniharu
• Javey Ali
• Wong H S Philip

Classifications

• Y10T428/25

  Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• Y10T428/30

  Self-sustaining carbon mass or layer with impregnant or other layer · CPC title

• B82Y10/00 Primary

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• Y10T428/24917

  including metal layer · CPC title