Adjustable ventilation openings in MEMS structures

Patent metadata

Field	Value
Publication number	US-9591408-B2
Application number	US-201414553718-A
Country	US
Kind code	B2
Filing date	Nov 25, 2014
Priority date	Feb 29, 2012
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

A MEMS structure and a method for operation a MEMS structure are disclosed. In accordance with an embodiment of the present invention, a MEMS structure comprises a substrate, a backplate, and a membrane comprising a first region and a second region, wherein the first region is configured to sense a signal and the second region is configured to adjust a threshold frequency from a first value to a second value, and wherein the backplate and the membrane are mechanically connected to the substrate.

First claim

What is claimed is:

1. A MEMS structure comprising:
a substrate;
a backplate; and
a membrane comprising an adjustable ventilation opening,
wherein the backplate and the membrane are mechanically connected to the substrate,
wherein the adjustable ventilation opening is formed in the membrane by a movable portion of the membrane, and
wherein the movable portion of the membrane is displaceable out of the membrane.

2. The MEMS structure according to claim 1 , wherein the membrane comprises a central region and an outer region, the out region encompassing the central region, and wherein the adjustable ventilation opening is located in the outer region.

3. The MEMS structure according to claim 1 , wherein the backplate is a structured backplate having a first electrode and a second electrode, and wherein the adjustable ventilation opening corresponds to the second electrode but not to the first electrode.

4. The MEMS structure according to claim 1 , wherein the adjustable ventilation opening is configured to move toward the substrate if actuated.

5. The MEMS structure according to claim 1 , wherein the adjustable ventilation opening is configured to move toward the backplate if actuated.

6. The MEMS structure according to claim 1 , wherein the adjustable ventilation opening comprises a cantilever, and wherein the cantilever is without ventilation openings.

7. The MEMS structure according to claim 1 , wherein the adjustable ventilation opening comprises a cantilever, and wherein the cantilever comprises ventilation openings.

8. The MEMS structure according to claim 1 , wherein the adjustable ventilation opening comprises a plurality of adjustable ventilation openings, and wherein the adjustable ventilation openings are disposed in a periphery of the membrane placed in equidistant distances.

9. A method for operating a MEMS structure, the method comprising:
sensing an acoustic signal by moving a sensing region of a membrane relative to a backplate; and
opening or closing an adjustable ventilation opening in the membrane if a low frequency high energy signal is detected, wherein the adjustable ventilation opening is formed in the membrane by a movable portion of the membrane, and wherein the movable portion of the membrane is displaceable out of the membrane.

10. The method according to claim 9 , wherein the adjustable ventilation opening is located in a periphery region of the membrane.

11. The method according to claim 9 , wherein the adjustable ventilation opening is located in a tuning region of the membrane, and wherein the tuning region of the membrane is located outside the sensing region of the membrane.

12. A method for operating a MEMS structure, the method comprising:
sensing an acoustic signal by moving a membrane relative to a backplate; and
opening or closing an adjustable ventilation opening in the membrane if an application setting of the MEMS structure is changed, wherein the adjustable ventilation opening is formed in the membrane by a movable portion of the membrane, and wherein the movable portion of the membrane is displaceable out of the membrane.

13. The method according to claim 12 , wherein the adjustable ventilation opening is located in a periphery region of the membrane.

Assignees

• Infineon Technologies Ag

Inventors

• Dehe Alfons
• Wurzer Martin

Classifications

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title

• H04R1/222

  for microphones (H04R1/24, H04R1/26 take precedence) · CPC title

• B81B2201/0257

  Microphones or microspeakers · CPC title

• H04R2201/003

  Mems transducers or their use · CPC title

• H04R19/005

  using semiconductor materials · CPC title