Positive photosensitive composition, thin film transistor, and compound

Patent metadata

Field	Value
Publication number	US-9588425-B2
Application number	US-201615288722-A
Country	US
Kind code	B2
Filing date	Oct 7, 2016
Priority date	Jul 4, 2012
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

The present invention aims to provide positive photosensitive compositions that have excellent patterning properties and can exhibit excellent electrical insulation reliability when cured (as thin films). The positive photosensitive composition according to a first aspect of the present invention is characterized by including (A) a compound that contains an alkenyl group or a SiH group within a molecule and has a structure that decomposes in the presence of acid to generate an acidic group or a hydroxyl group; (B) a compound that contains a SiH group or an alkenyl group within a molecule; (C) a hydrosilylation catalyst; and (D) a photoacid generator.

First claim

The invention claimed is:

1. A positive photosensitive composition, comprising:
(G) a compound having a structure represented by formula (X1) or (X2);
(H) a compound having a structure that decomposes in the presence of acid to generate an acidic group or a hydroxyl group; and
(D) a photoacid generator,
the formulas (X1) and (X2) respectively being:

2. The positive photosensitive composition according to claim 1 ,
wherein the component (H) is a compound that contains a SiH group within a molecule and has a structure that decomposes in the presence of acid to generate an acidic group or a hydroxyl group.

3. The positive photosensitive composition according to claim 1 ,
wherein the structure that decomposes in the presence of acid to generate an acidic group or a hydroxyl group in the component (H) is a phenol structure with protected functionality or a carboxylic acid structure with protected functionality.

4. The positive photosensitive composition according to claim 3 ,
wherein the phenol structure with protected functionality is a bisphenol structure with protected functionality.

5. The positive photosensitive composition according to claim 4 ,
wherein the bisphenol structure with protected functionality is a bisphenol structure whose functionality is protected by a trialkylsilyl group or a butoxycarbonyl group.

6. The positive photosensitive composition according to claim 3 ,
wherein the carboxylic acid structure with protected functionality contains an acetal bond or a carboxylic acid tertiary ester bond.

7. The positive photosensitive composition according to claim 6 ,
wherein the structure containing a carboxylic acid tertiary ester bond is protected by an aliphatic ring structure.

8. The positive photosensitive composition according to claim 7 ,
wherein the aliphatic ring structure is an adamantine structure.

9. The positive photosensitive composition according to claim 1 ,
wherein the component (H) has a bisphenol structure.

10. The positive photosensitive composition according to claim 9 ,
wherein the bisphenol structure is a bisphenol S structure or a bisphenol F structure.

11. The positive photosensitive composition according to claim 1 ,
wherein the component (D) is an iodonium salt or a sulfonium salt.

12. The positive photosensitive composition according to claim 1 , further comprising
(I) an alkali-soluble component.

13. The positive photosensitive composition according to claim 12 ,
wherein the component (I) is a SiH group- or alkenyl group-containing compound.

14. The positive photosensitive composition according to claim 12 ,
wherein the component (I) is a compound having a structure represented by the following formula (X1) or (X2):

15. The positive photosensitive composition according to claim 1 , further comprising
(J) a compound that contains an alkenyl group and has no structure that decomposes in the presence of acid to generate an acidic group or a hydroxyl group.

16. The positive photosensitive composition according to claim 1 , further comprising
(K) a sensitizer.

17. A thin film transistor, comprising as a gate insulator a thin film obtained by curing the positive photosensitive composition according to claim 1 .

18. A thin film transistor, comprising as a passivation film a thin film obtained by curing the positive photosensitive composition according to claim 1 .

Assignees

• Kaneka Corp

Inventors

• Ide Masahito
• Inari Hirofumi
• Kitajima Aki
• Tahara Komei
• Manabe Takao

Classifications

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title

• H10P14/6922

  the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC · CPC title

• H10P14/6686

  the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane · CPC title

• H10D64/011

  of electrodes ohmically coupled to a semiconductor · CPC title

• H10W74/47

  comprising organic materials, e.g. plastics or resins · CPC title