Reflective optical element for a dynamic deflection of a laser beam and method for manufacture thereof

Patent metadata

Field	Value
Publication number	US-9588338-B2
Application number	US-201414808975-A
Country	US
Kind code	B2
Filing date	Jan 20, 2014
Priority date	Jan 24, 2013
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

The invention relates to reflective optical elements for a dynamic deflection of a laser beam and to a manufacturing method for these reflective elements. It is the object of the invention to provide reflective optical elements for a dynamic deflection of laser beams which can be manufactured less expensively and which are flexible in their geometrical design so that they achieve improved properties in dynamic operation. In the reflective optical element in accordance with the invention, a surface of a base body and a plate-shaped reflective element are connected to one another in a planar manner and with material continuity by means of a solder connection.

First claim

What is claimed is:

1. A method of manufacturing a reflective optical element, for a dynamic deflection of a laser beam, said reflective optical element including a base body and a plate-shaped reflective element, characterized in that reactive nanometer layers and at least one solder layer are formed or arranged between a respective surface of the base body and a respective surface of the base body and a surface of the plate-shaped reflective element;
in that the base body and the plate-shaped reflective element are pressed together by a pressure application with the reactive nanometer multilayers arranged or present therebetween, with a pressure in the range of 0.5 MPa to 15 MPa being observed; and
in that the reactive nanometer multilayers are activated by an energy input which will be achieved by an electric ignition or by a laser beam so that the solder is melted and the connection of the base body to the plate-shaped reflective element with material continuity after the solidifying of the solder is established by the released heat.

2. A method in accordance with claim 1 , characterized in that a wetting layer is formed on at least one of the surfaces to be joined to one another of the base body and/or of the plate-shaped reflective element before the joining.

3. A method in accordance with claim 1 , characterized in that reactive nanometer multilayers are used whose surface area is larger than the surface area of the plate-shaped reflective element so that an exposed surface region is present for the energy input for activating the reactive nanometer multilayers.

4. A method in accordance with claim 1 , characterized in a solder is used which is selected from pure tin, pure indium, a silver-tin alloy, a gold-tin alloy, a silver-copper-tin alloy, an indium-copper silver alloy and an aluminum-silicon compound.

5. A method in accordance with claim 1 , characterized in that the joining surface of the plate-shaped reflective element is cleaned before the joining, with the cleaning taking place by means of direct ion bombardment or using a plasma in a vacuum.

6. A method in accordance with claim 1 , characterized in the base body is manufactured using a rapid prototyping process, including a printing process with a subsequent thermal treatment.

7. A method in accordance with claim 2 , characterized in that the wetting layer is formed from Au, Cu, Sn, Ag, Ni or an alloy of these elements.

8. A reflective optical element for a dynamic deflection of a laser beam, manufactured by a method according to claim 1 , wherein a surface of the base body and the plate-shaped reflective element are connected with material continuity and in a planar manner by means of a solder connection and the plate-shaped reflective element has a thickness smaller than 1 mm.

9. The reflective optical element in accordance with claim 8 , characterized in that the plate-shaped reflective element is formed from silicon, an optical glass, sapphire, ULE or Zerodur.

10. The reflective optical element in accordance with claim 8 , characterized in that one or more of the respective surfaces of the base body and the plate-shaped reflective element to be joined are provided with a wetting layer.

11. The reflective optical element in accordance with claim 8 , characterized in that a mount for a holder of a drive for pivoting the element is formed directly at the base body and the base body is thereby formed in one part.

12. The reflective optical element in accordance with claim 8 , characterized in that the plate-shaped reflective element has a thickness smaller than 500 μm.

13. The reflective optical element in accordance with claim 12 , characterized in that the plate-shaped reflective element has a thickness smaller than 100 μm.

Assignees

• Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E V

Inventors

• Hannweber Jan
• Bonss Steffen
• Braun Stefan
• Dietrich Georg

Classifications

• B23K1/206

  Cleaning · CPC title

• G02B5/0808

  having a single reflecting layer (G02B5/0883, G02B5/0891 take precedence) · CPC title

• G02B5/08

  Mirrors {(vehicle mirrors involving special optical features B60R1/08)} · CPC title

• G02B7/1821

  for rotating or oscillating mirrors · CPC title

• G02B26/105 Primary

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title