3D-MEMS optical switch
US-9733432-B2 · Aug 15, 2017 · US
US9588300B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9588300-B2 |
| Application number | US-201314649363-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 6, 2013 |
| Priority date | Dec 7, 2012 |
| Publication date | Mar 7, 2017 |
| Grant date | Mar 7, 2017 |
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An optical input/output device includes a phase modulator element and an optical element. The phase modulator element includes a plurality of pixels arranged in a matrix and is configured to change an optical phase of signal light by applying a driving signal corresponding to a phase pattern. The optical element is configured to convert a direction of exit of the signal light so as to irradiate each pixel with the signal light from the input port. A pattern generator unit includes superimposing means for superimposing a periodic phase pattern having a predetermined period in at least one direction in a plane of the phase modulator element, and means for controlling an amplitude of the periodic phase pattern. The signal light is diffracted to a position according to the period of the superimposed periodic phase pattern, so that light intensity of the signal light is dispersed.
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The invention claimed is: 1. An optical input/output device comprising: an input port and an output port configured to input and output signal light, respectively; a phase modulator element including a plurality of pixels arranged in a matrix in a plane, a pattern generator unit configured to generate a phase pattern which is a combination of phase values set for each pixel to provide optical coupling to a desired port out of the output port, a control unit configured to convert the phase pattern into a driving signal for each pixel, a driver unit configured to drive the pixel according to the driving signal, the phase modulator element being configured to change an optical phase of the signal light entering each pixel, by the driver unit applying the driving signal corresponding to the phase pattern; and an optical element configured to convert a direction of exit of the signal light so as to irradiate each pixel in the plane of the phase modulator element with the signal light exiting from the input port to a space, wherein the pattern generator unit includes superimposing means for superimposing a periodic phase pattern having a predetermined period in at least one direction in the plane of the phase modulator element which the signal light enters, and means for controlling an amplitude of the periodic phase pattern, wherein the signal light is diffracted to a position according to the period and pattern shape of the periodic phase pattern superimposed on the phase pattern capable of providing desired optical coupling between the input port and the output port, so that light intensity of the signal light is dispersed, wherein the output port or the input port includes a plurality of ports, and the driver unit changes a phase φ (y) along a y axis of the signal light thereby to provide optical coupling between each input port and each output port, when the y axis is an axis in the plane of the phase modulator element corresponding to a direction of arrangement of the plurality of output ports or the plurality of input ports, and the superimposing means superimposes a periodic phase pattern having periodicity in a direction of the y axis, in which a length w of one period of the pattern is represented as w<λ/tan(θ max −θ min ), when a maximum value and a minimum value of an angle θ formed by outgoing light and incoming light during the coupling between the input port and the output port are θmax and θmin, respectively, and λ is a wavelength of the input signal light, wherein: the superimposing means controls light power by superimposing at least two periodic phase patterns selected from a first periodic phase pattern, a second periodic phase pattern, a third periodic phase pattern, and a fourth periodic phase pattern, the first periodic phase pattern is such that a phase φ in one period is represented as φ=k×(r/w+b), by using k determined according to the light intensity of an output optical signal and an arbitrary constant b, where w is a length of one period of the superimposed periodic phase pattern, and r is the position of the phase modulator element along an r axis in the plane in the period, the second periodic phase pattern is such that the phase φ in one period is represented as φ=k×(sin( 2 π·r/w+ψ)+b), by using k determined according to the light intensity of the output optical signal and arbitrary constants b, ψ, where w is the length of one period of the superimposed periodic phase pattern, and r is the position of the phase modulator element along the r axis in the plane in the period, the third periodic phase pattern is such that the phase φ in one period is represented as: φ= k ×( sr+b )( r≦p ) φ= k ′×( s′r+b ′)( r>p ) by using k, k′ determined according to the light intensity of the output optical signal and arbitrary constants b, b′, s, s′, p, where r is the position of the phase modulator element along the r axis in the plane in the period, and the fourth periodic phase pattern is such that the phase φ in one period is represented as: φ= b ( r<p, r>q ) φ= k+b ( p≦r≦q ) by using k determined according to the light intensity of the output optical signal and arbitrary constants b, p, q, where r is the position of the phase modulator element along the r axis in the plane in the period, and wherein a length w of one period of the periodic phase pattern is equal to a length of an integer multiple of the pixel. 2. The optical input/output device according to claim 1 , wherein the output port or the input port includes N ports, and the driver unit changes a phase φ (y) along a y axis of the signal light thereby to provide optical coupling to each output port for each exit angle or for each entry angle, when the y axis is an axis in the plane of the phase modulator element corresponding to a direction of arrangement of the plurality of output ports or the plurality of input ports, the periodic phase pattern has periodicity such that a length of one period is w in a direction of the y axis, and when an angle θ formed by outgoing light and incoming light as the signal light exiting and entering, respectively, during the optical coupling between the input port and the output port is θi (i=1 to N), λis a wavelength of the input signal light, m is an integer other than zero, and Δθs=arctan(λ/w), an angle formed by the exit angle of the outgoing light to the output port and the entry angle of the signal light entering from the input port is not set in a direction of θi+ m×Δθs. 3. The optical input/output device according to claim 1 , wherein the output port or the input port includes a plurality of ports, and the driver unit changes a phase φ (y) along a y axis of the signal light thereby to provide coupling between each input port and each output port, when the y axis is an axis in the plane of the phase modulator element corresponding to a direction of arrangement of the plurality of output ports or the plurality of input ports, and the superimposing means superimposes a periodic phase pattern having periodicity in a direction other than the y axis. 4. The optical input/output device according to claim 1 , wherein the superimposing means divides a plane region which the signal light enters in the plane of the phase modulator element into two or more regions, and superimposes phase patterns having different periodicities on the regions. 5. The optical input/output device according to claim 1 , wherein a length w of one period of the periodic phase pattern varies according to a position of the input port or the output port for the optical coupling. 6. An optical input/output device comprising: an input port and an output port configured to input and output signal light, respectively; a phase modulator element including a plurality of pixels arranged in a matrix in a plane, a pattern generator unit configured to generate a phase pattern which is a combination of phase values set for each pixel to provide optical coupling to a desired port out of the output port, a control unit configured to convert the phase pattern into a driving signal for each pixel, a driver unit configured to drive the pixel according to the driving signal, the phase modulator element being configured to change an optical phase of the signal light entering each pixel, by the driver unit applying the driving signal corresponding to the phase pattern; and an optical element configured to convert a direction of exit of the signal light so as to irradiate each pixel in the plane of the phase modulator element with the signal light exiting from the input port to a space, wherein the pattern generator unit includes superimposing means for superimposing a periodic phase pattern having a predetermined period in at least one direction in the plane of the phase modulator element which the
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