Electro-absorption modulators with stacked waveguide tapers
US-2024085624-A1 · Mar 14, 2024 · US
US9588298B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9588298-B2 |
| Application number | US-201514798780-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 14, 2015 |
| Priority date | Jun 4, 2015 |
| Publication date | Mar 7, 2017 |
| Grant date | Mar 7, 2017 |
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A composite optical waveguide is constructed using an array of waveguide cores, in which one core is tapered to a larger dimension, so that all the cores are used as a composite input port, and the one larger core is used as an output port. In addition, transverse couplers can be fabricated in a similar fashion. The waveguide cores are preferably made of SiN. In some cases, a layer of SiN which is provided as an etch stop is used as at least one of the waveguide cores. The waveguide cores can be spaced away from a semiconductor layer so as to minimize loses.
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What is claimed is: 1. A composite waveguide, comprising: a first group of waveguide cores on a substrate, said first group of waveguide cores having an optical propagation direction, each of said first group of waveguide cores having at a respective first end thereof a first cross section defined by two dimensions measured along orthogonal coordinates and having at a respective second end thereof a second cross section defined by two dimensions measured along orthogonal coordinates; said first group of waveguide cores having an input port comprising at least one of: said respective first ends together comprising said optical input port for directed illumination, and a segment of one or more of said first group of waveguide cores comprising said optical input port for evanescent waves; and said first group of waveguide cores having an output port comprising at least one of: said respective second ends comprising said output port for directed illumination; and a segment of one or more of said first group of waveguide cores comprising said optical output port for evanescent waves. 2. The composite waveguide of claim 1 , wherein said substrate is a semiconductor chip. 3. The composite waveguide of claim 1 , wherein one or more of said first group of waveguide cores has a different second cross section than the second cross section of each of the remaining ones of said first group of waveguide cores. 4. The composite waveguide of claim 1 , configured to operate bidirectionally. 5. The composite waveguide of claim 1 , wherein at least one of said first end and said second end is configured as a coupler selected from the group of couplers consisting of a butt coupler, a taper coupler and an evanescent coupler. 6. The composite waveguide of claim 1 , wherein all of said first group of waveguide cores having substantially equal first cross sections. 7. The composite waveguide of claim 1 , wherein at least two of said first group of waveguide cores have unequal first cross sections. 8. The composite waveguide of claim 1 , wherein said first group of waveguide cores disposed in an array are disposed in a one-dimensional array. 9. The composite waveguide of claim 1 , wherein said first group of waveguide cores disposed in an array are disposed in a two-dimensional array. 10. The composite waveguide of claim 1 , wherein said first group of waveguide cores comprise a material selected from the group of materials consisting of crystalline silicon, poly-silicon, amorphous silicon, silicon nitride, silicon oxynitride, silicon dioxide, doped silicon dioxide and a polymer. 11. The composite waveguide of claim 10 , wherein said first cross section defined by two dimensions measured along orthogonal coordinates has a first dimension and a second dimension each no larger than 1 micron. 12. The composite waveguide of claim 1 , wherein said respective first end of each of said first group of waveguide cores is located at a facet. 13. The composite waveguide of claim 12 , wherein said facet is a facet selected from the group of facets consisting of etched facets, polished facets, sawed facets, angled facets and curved facets. 14. The composite waveguide of claim 1 , wherein said respective first end of each of said first group of waveguide cores is located within 50 microns of a facet. 15. The composite waveguide of claim 1 , further comprising: a second group of waveguide cores having a second optical propagation direction, said second group of waveguide cores disposed on said substrate, said second group of waveguide cores displaced from said first group of waveguide cores in a direction transverse to said optical propagation direction of said first group of waveguide cores, said second group of waveguide cores in optical communication with said first group of waveguide cores; each of said second group of waveguide cores having at a respective first end thereof a first cross section defined by two dimensions measured along orthogonal coordinates and at a respective second end thereof a second cross section defined by two dimensions measured along orthogonal coordinates; said second group of waveguide cores having an input port comprising at least one of: said respective first ends together comprising said optical input port for directed illumination, and a segment of one or more of said second group of waveguide cores comprising said optical input port for evanescent waves; and said second group of waveguide cores having an output port comprising at least one of: said respective second ends comprising said output port for directed illumination, and a segment of one or more of said second group of waveguide cores comprising said optical output port for evanescent waves. 16. The composite waveguide of claim 15 , wherein one or more of said second group of waveguide cores has a different second cross section than the second cross section of each of the remaining ones of said second group of waveguide cores. 17. The composite waveguide of claim 15 , configured to operate bidirectionally. 18. The composite waveguide of claim 15 , wherein at least one of said first end and said second end is configured as a coupler selected from the group of couplers consisting of a butt coupler, a taper coupler and an evanescent coupler. 19. The composite waveguide of claim 15 , wherein said second group of waveguide cores is configured to provide an optical signal at a location displaced in said transverse direction from said optical input port of said first group of waveguide cores. 20. The composite waveguide of claim 15 , wherein said second group of waveguide cores comprise a material selected from the group of materials consisting of crystalline silicon, poly-silicon, amorphous silicon, silicon nitride, silicon oxynitride, silicon dioxide, doped silicon dioxide and a polymer. 21. The composite waveguide of claim 20 , wherein said first cross section defined by two dimensions measured along orthogonal coordinates has a first dimension and a second dimension each no larger than 1 micron. 22. The composite waveguide of claim 15 , wherein said respective first end of each of said second group of waveguide cores is located at a facet. 23. The composite waveguide of claim 22 , wherein said facet is a facet selected from the group of facets consisting of etched facets, polished facets, sawed facets, angled facets and curved facets. 24. The composite waveguide of claim 15 , wherein said respective first end of each of said second group of waveguide cores is located within 50 microns of a facet. 25. The composite waveguide of claim 15 , wherein said second optical propagation direction is parallel to said optical propagation direction of said first group of waveguide cores. 26. A composite waveguide having a first group of waveguide cores on a substrate, said first group of waveguide cores having an optical propagation direction, each of said first group of waveguide cores having at a respective first end thereof a first cross section defined by two dimensions measured along orthogonal coordinates and having at a respective second end thereof a second cross section defined by two dimensions measured along orthogonal coordinates; wherein the improvement comprises: said first group of waveguide cores having an input port comprising at least one of: said respective first ends together comprising said optical input port for directed
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