Optical filter and optical apparatus

Patent metadata

Field	Value
Publication number	US-9588266-B2
Application number	US-201214118002-A
Country	US
Kind code	B2
Filing date	May 17, 2012
Priority date	May 17, 2011
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

There is provided an optical filter of the type having absorption and with low reflection, which includes a light-transmitting substrate; and a light-absorbing gradient refractive index thin film provided on the substrate and whose refractive index changes so as to be close to the refractive index of the substrate toward the substrate side in a film thickness direction. There is also provided an optical apparatus using the optical filter.

First claim

The invention claimed is:

1. An optical filter comprising:
a light-transmitting substrate; and
a light-absorbing gradient refractive index thin film consisting of a thin film having no interface in the whole inner part thereof, and wherein the refractive index and an extinction coefficient continuously change by a change in film composition so that the refractive index is close to the refractive index of the substrate toward the substrate side in a film thickness direction thereof,
wherein the light-absorbing gradient refractive index thin film, in the film thickness direction, comprises:
(1) a first region where a spectral transmission characteristic of a visible wavelength region increases approaching a long wavelength side based on the changes of the refractive index and the extinction coefficient; and
(2) a second region, which is located in a region different from the first region in the film thickness, and where the spectral transmission characteristic of the visible wavelength region decreases approaching the long wavelength side based on the changes of the refractive index and the extinction coefficient, and
wherein the changes of the refractive index and the extinction coefficient per film thickness of the light-absorbing gradient refractive index thin film decrease approaching the interface of the light-absorbing gradient refractive index thin film on the side of the substrate so that the refractive index of the light-absorbing gradient refractive index thin film is close to the refractive index of the substrate.

2. The optical filter according to claim 1 , wherein a composition of a material constituting the light-absorbing gradient refractive index thin film continuously changes in the film thickness direction.

3. The optical filter according to claim 1 , further comprising an anti-reflection structure on a surface on a side opposite to the substrate side of the light-absorbing gradient refractive index thin film,
wherein the light-absorbing gradient refractive index thin film changes a refractive index in the film thickness direction so as to reduce a refractive index difference between the refractive index of the substrate and the refractive index of the anti-reflection structure.

4. The optical filter according to claim 3 , wherein the anti-reflection structure is a fine structure having a pitch shorter than a wavelength of visible light.

5. The optical filter according to claim 4 , wherein the fine structure has a periodic structure having a pitch shorter than a wavelength of visible light.

6. The optical filter according to claim 3 , comprising another anti-reflection structure on a surface on a side opposite to the anti-reflection structure side of the substrate.

7. The optical filter according to claim 6 , further comprising another gradient refractive index thin film whose refractive index changes in the film thickness direction between the substrate and the another anti-reflection structure so as to reduce the refractive index difference between the refractive index of the another anti-reflection structure and the refractive index of the substrate.

8. The optical filter according to claim 7 , wherein the another anti-reflection structure is an anti-reflection film of a single layer or a plurality of layers, and
wherein the another gradient refractive index thin film changes the refractive index in the film thickness direction so as to reduce the refractive index difference between the refractive index of a layer adjacent to the another gradient refractive index thin film of the anti-reflection film and the refractive index of the substrate.

9. The optical filter according to claim 7 , wherein the another anti-reflection structure is a fine structure having a pitch shorter than a wavelength of visible light.

10. The optical filter according to claim 9 , wherein the fine structure has a periodic structure having a pitch shorter than a wavelength of visible light.

11. The optical filter according to claim 1 , wherein the light-absorbing gradient refractive index thin film is composed of three or more elements.

12. The optical filter according to claim 1 , wherein the refractive index difference between an end point of the refractive index change on the substrate side of the light-absorbing gradient refractive index thin film and the substrate is less than 0.05.

13. An optical apparatus comprising the optical filter according to claim 1 in an imaging optical system.

14. The optical filter according to claim 1 , wherein the light-absorbing gradient refractive index thin film has a refractive index change comprising at least one inflection point at which the refractive index and the extinction coefficient decrease after the refractive index and the extinction coefficient increase in the film thickness direction of the light-absorbing gradient refractive index thin film.

15. An optical filter comprising:
a light-transmitting substrate; and
a light-absorbing gradient refractive index thin film consisting of a thin film having no interface in the whole inner part thereof, and wherein a refractive index and an extinction coefficient continuously change so that the refractive index is close to the refractive index of the substrate toward the substrate side in a film thickness direction thereof,
wherein the light-absorbing gradient refractive index thin film, in the film thickness direction, comprises:
(1) a first region where a spectral transmission characteristic of a visible wavelength region increases approaching a long wavelength side based on the changes of the refractive index and the extinction coefficient; and
(2) a second region, which is located in a region different from the first region in the film thickness, and where the spectral transmission characteristic of the visible wavelength region decreases approaching the long wavelength side based on the changes of the refractive index and the extinction coefficient, and
wherein the changes of the refractive index and the extinction coefficient per film thickness of the light-absorbing gradient refractive index think film decrease approaching the interface of the light-absorbing gradient refractive index thin film on the side of the substrate so that the refractive index of the light-absorbing gradient refractive index thin film is close to the refractive index of the substrate.

Assignees

• Uchiyama Masayuki
• Yanagi Michio
• Canon Denshi Kk

Inventors

• Uchiyama Masayuki
• Yanagi Michio

Classifications

• G02B5/205

  Neutral density filters · CPC title

• G02B3/0087

  with index gradient · CPC title

• G02B1/115 Primary

  Multilayers · CPC title

• G02B5/22 Primary

  Absorbing filters {(G02B5/201 - G02B5/208 take precedence)} · CPC title

• G02B1/118

  having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures · CPC title