Electronic device handling apparatus and electronic device testing apparatus

Patent metadata

Field	Value
Publication number	US-9588142-B2
Application number	US-201414523009-A
Country	US
Kind code	B2
Filing date	Oct 24, 2014
Priority date	Oct 24, 2014
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

Provided is an electronic device handling apparatus capable of increasing the number of simultaneous measurements while suppressing the increase in cost. An electronic device handling apparatus, which moves bare dies relative to a probe card, includes: a thermal head which includes a plurality of holding regions each of which holds the bare die and has openings; at least one lift unit which is movably held by the thermal head so as to correspond to the holding regions and is able to advance and retreat through the openings; a moving device which moves the thermal head; and a fixed arm which is able to support the one lift unit.

First claim

The invention claimed is:

1. An electronic device handling apparatus which moves electronic devices under test relative to a contact unit, comprising:
a holding member which includes at least one holding region which holds the electronic device under test, the at least one holding region having at least one opening;
at least one position adjusting member which is movably held by the holding member so as to correspond to the holding region;
a first moving unit which moves the holding member; and
a supporting member which is able to support the at least one one position adjusting member, wherein:
the holding member includes:
a storage space in which the at least one position adjusting member is stored; and
at least one through-hole through which the opening and the storage space communicate with each other,

the storage space includes a window portion through which the supporting member is able to enter the storage space to support the at least one position adjusting member,
the at least one position adjusting member includes:
at least one pin which includes an end portion which is able to advance and retreat through the opening,
a block on which the pin is standingly provided,
the pin is inserted into the through-hole; and
the block is stored in the storage space,

when the supporting member supports the at least one position adjusting member, the end portion of the at least one position adjusting member protrudes to an outside of the holding member through the opening, and
when the supporting member is separate from the at least one position adjusting member, the end portion of the at least one position adjusting member retracts to an inside of the holding member through the opening.

2. The electronic device handling apparatus according to claim 1 , wherein
the first moving unit and the supporting member are fixed relative to a same base member, and
the supporting member includes:
a first arm portion which is standingly provided on the base member; and
a second arm portion which is supported by the first arm portion and is able to enter the storage space through the window portion to support the block.

3. The electronic device handling apparatus according to claim 2 , wherein
the through-hole extends in a first direction,
the window portion is open from the storage space toward a second direction which is substantially perpendicular to the first direction, and
the second arm portion extends in a third direction which is substantially opposite to the second direction.

4. An electronic device handling apparatus which moves electronic devices under test relative to a contact unit, comprising:
a holding member which includes at least one holding region which holds the electronic device under test, the at least one holding region having at least one opening;
at least one position adjusting member which is movably held by the holding member so as to correspond to the holding region;
a first moving unit which moves the holding member; and
a supporting member which is able to support the at least one one position adjusting member, wherein:
the holding member includes:
a storage space in which the at least one position adjusting member is stored, and
at least one through-hole through which the opening and the storage space communicate with each other,

the storage space includes a window portion through which the supporting member is able to enter the storage space to support the at least one position adjusting member,
the at least one position adjusting member includes:
at least one pin which includes an end portion which is able to advance and retreat through the opening,
a block on which the pin is standingly provided,
the pin is inserted into the through-hole, and
the block is stored in the storage space,

when the supporting member supports the at least one position adjusting member, the end portion of the at least one position adjusting member protrudes to an outside of the holding member through the opening, and
when the supporting member is separate from the at least one position adjusting member, the end portion of the at least one position adjusting member retracts to an inside of the holding member through the opening.

5. The electronic device handling apparatus according to claim 4 , wherein
the supporting member is able to enter the storage space through the window portion to support the block.

6. The electronic device handling apparatus according to claim 5 , wherein
the through-hole extends in a first direction,
the window portion is open from the storage space toward a second direction which is substantially perpendicular to the first direction, and
the supporting member extends in a third direction which is substantially opposite to the second direction.

Assignees

• Advantest Corp

Inventors

• Kiyokawa Toshiyuki
• Karino Koya
• Takano Daisuke

Classifications

• G01R1/06794 Primary

  Devices for sensing when probes are in contact, or in position to contact, with measured object · CPC title

• G01R31/2601

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title

• G01R1/07342

  the body of the probe being at an angle other than perpendicular to test object, e.g. probe card · CPC title

• G01R31/2887 Primary

  involving moving the probe head or the IC under test; docking stations (moving single probes G01R1/06705; moving individual probes in multiple probes G01R1/07392) · CPC title

• G01R31/2893

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title