Imaging and Sensing of Thin Layer Using High-Frequency Ultrasonic Transducers
US-2024036005-A1 · Feb 1, 2024 · US
US9588084B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9588084-B2 |
| Application number | US-201013497962-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 24, 2010 |
| Priority date | Sep 25, 2009 |
| Publication date | Mar 7, 2017 |
| Grant date | Mar 7, 2017 |
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The present invention concerns a device for detecting gases or volatile organic compounds (VOC) comprising an electrically conducting or semiconducting zone functionalized with an organic film resulting from the polymerization of aromatic diazonium salt derived monomer.
Opening claim text (preview).
The invention claimed is: 1. A device for detecting at least one gas and/or volatile organic compound (VOC), comprising transduction means and a gas sensor, characterized in that a surface of said gas sensor comprises at least one electrically conducting and/or semiconducting zone functionalized with at least two layers of organic film resulting from a polymerization of at least one aromatic diazonium salt, wherein a thickness of these at least two layers is from 5 to 50 nm; and wherein the at least one gas and/or the volatile organic compound is detected by measuring a shift in a frequency of mechanical motion of the gas sensor when the at least one gas and/or the volatile organic compound is added on the surface. 2. The device according to claim 1 characterized in that said electrically conducting and/or semiconducting zone of said gas sensor is made of a material selected from: steel, iron, copper, nickel, cobalt, niobium, aluminium, silver, titanium, silicon, tungsten, tantalum, gold, germanium, platinum, iridium, silicon-aluminium alloy, platinum-aluminium alloy and others alloys comprising at least one of these materials. 3. The device according to claim 1 characterized in that said transduction means comprise means for applying electrical signals across electrodes, wherein the organic film is between the electrodes; and detection means for detecting a chosen electrical signal in the presence of the at least one gas and/or the volatile organic compound. 4. The device according to claim 1 characterized in that said gas sensor is at least one device selected from a surface acoustic wave (SAW) sensor, a bulk acoustic wave (BAW) sensor, and a quartz crystal microbalance (QCM). 5. The device of claim 1 , wherein the least one aromatic diazonium salt has the following formula: m ((R) n Ar—N 2 + )X m− (I) in which: X − is an anion, Ar is an aryl group which can be mono-, di-, or trisubstituted with one or more R groups, R is selected from a hydrogen atom, linear or branched aliphatic radicals comprising from 1 to 30 carbon atoms, aromatic radicals comprising 5 or 6 carbon atoms, aromatic radicals comprising 5 or 6 carbon atoms and 1 to 3 heteroatoms chosen from —N, —O or —S, halogen atoms, carboxyl, nitro, amino, amido, cyano groups, or alkoxy or alkoxycarbonyl groups comprising from 1 to 3 alkoxy units, m is equal to 1, 2 or 3, and n is equal to 1, 2 or 3. 6. The device of claim 1 , wherein the gas sensor is a Micro ElectroMechanical System (MEMS) sensor or a Nano ElectroMechanical System (NEMS) sensor. 7. The device according to claim 5 characterized in that said substituent —R is selected from: —Br, —COOH, —NO 2 , —OCH 3 , —CONH 2 and —OCH 3 . 8. The device according to claim 5 characterized in that said anion X − is selected from: Cl − , Br − , I − , HSO 4 − , ClO 4 − , BF 4 − , PF 6 − , C 8 H 17 SO 3 − , CH 3 C 6 H 4 SO 3 − , ZnCl 4 2− , and Fe(CN) 6 3− . 9. The device according to claim 5 characterized in that said aromatic diazonium salt of formula (I) is selected from a 4-nitrophenyl diazonium salt, a the 4-bromophenyl diazonium salt, a 4-methoxyphenyl diazonium salt and a fast blue red salt. 10. A process for detecting gases and/or volatile organic compounds (VOC) characterized in that it comprises the following steps: exposing at least one gas and/or volatile organic compound (VOC) to a gas sensor of a device, wherein the gas sensor comprises at least one electrically conducting and/or semiconducting zone functionalized with at least two layers of organic film resulting from a polymerization of at least one aromatic diazonium salt, wherein a thickness of these at least two layers is from 5 to 50 nm; monitoring the resonance frequency of the gas sensor with a measuring apparatus by placing a resonant sensor element in an electrical oscillator feedback loop that continually excites the gas sensor into mechanical motion at one of its natural resonance frequencies, that is in turn transduced into an electrical frequency signal; and transmitting the electrical frequency signal of the measuring apparatus to a computer. 11. The process according to claim 10 characterized in that the partition coefficient K p of the gas and/or the volatile organic compound (VOC) is from 200 to 4500. 12. The process of claim 10 , wherein the at least one aromatic diazonium salt has the following formula: m ((R) n Ar—N 2 + )X m− (I) in which: X − is an anion, Ar is an aryl group which can be mono-, di- or trisubstituted with one or more R groups, R is selected from a hydrogen atom, linear or branched aliphatic radicals comprising from 1 to 30 carbon atoms, aromatic radicals comprising 5 or 6 carbon atoms, aromatic radicals comprising 5 or 6 carbon atoms and 1 to 3 heteroatoms chosen from —N, —O or —S, halogen atoms, carboxyl, nitro, amino, amido, cyano groups, or alkoxy or alkoxycarbonyl groups comprising from 1 to 3 alkoxy units; m is equal to 1, 2 or 3, and n is equal to 1, 2 or 3. 13. A device for detecting a gas, comprising: an electrode comprising at least two layers of organic film, the organic film comprising an aromatic diazonium salt derived polymer, and the aromatic diazonium salt derived polymer selected to detect a specific gas, wherein a thickness of these at least two layers is from 5 to 50 nm; and wherein the specific gas is detected by measuring a shift in a frequency of mechanical motion of the electrode when the specific gas is added on the organic film.
(Bio)chemical reactions, e.g. on biosensors · CPC title
Adsorption, desorption, surface mass change, e.g. on biosensors · CPC title
Bulk waves, e.g. quartz crystal microbalance, torsional waves · CPC title
Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B) · CPC title
by measuring frequency or resonance of acoustic waves · CPC title
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