Spectroscopic sensor

Patent metadata

Field	Value
Publication number	US-9587980-B2
Application number	US-201214349080-A
Country	US
Kind code	B2
Filing date	Sep 10, 2012
Priority date	Oct 4, 2011
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

A spectroscopic sensor 1 comprises an interference filter unit 20 , having a cavity layer 21 and mirror layers 22, 23 opposing each other through the layer 21 , for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3 , arranged on the layer 22 side, for transmitting therethrough light incident on the unit 20 ; and a light-detecting substrate 4 , arranged on the layer 23 side, for detecting the light transmitted through the unit 20 . The layer 21 has a filter region 24 held between the layers 22, 23 ; an annular surrounding region 25 surrounding the region 24 with a predetermined distance therefrom; and an annular connecting region 26 connecting an end part 24 e on the substrate 4 side of the region 24 and an end part 25 e on the substrate 4 side of the region 25 to each other.

First claim

The invention claimed is:

1. A spectroscopic sensor comprising:
an interference filter unit, having a cavity layer and first and second mirror layers opposing each other through the cavity layer, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof;
a light-transmitting substrate, arranged on the first mirror layer side, for transmitting therethrough light incident on the interference filter unit; and
a light-detecting substrate, arranged on the second mirror layer side, for detecting the light transmitted through the interference filter unit;
wherein the cavity layer has:
a filter region held between the first and second mirror layers;
a surrounding region surrounding the filter region with a predetermined distance therefrom when seen in an opposing direction of the light-transmitting and light-detecting substrates; and
a connecting region connecting an end part on the light-detecting substrate side of the filter region and an end part on the light-detecting substrate side of the surrounding region to each other,
wherein the filter region, the surrounding region, and the connecting region are formed integrally.

2. A spectroscopic sensor according to claim 1 , wherein an end face on the light-transmitting substrate side of the surrounding region has substantially the same height as with a part located closest to the light-transmitting substrate in a surface for forming the first mirror layer in the filter region or is positioned nearer to the light-transmitting substrate than is the part.

3. A spectroscopic sensor according to claim 1 , wherein an end face on the light-transmitting substrate side of the connecting region has substantially the same height as with a part located closest to the light-detecting substrate in a surface for forming the first mirror layer in the filter region or is positioned nearer to the light-detecting substrate than is the part.

4. A spectroscopic sensor according to claim 1 , further comprising an optical filter layer, formed on the light-transmitting substrate so as to oppose the first mirror layer, for transmitting therethrough light in the predetermined wavelength range.

Assignees

• Shibayama Katsumi
• Kasahara Takashi
• Hamamatsu Photonics Kk

Inventors

• Shibayama Katsumi
• Kasahara Takashi

Classifications

• G01J3/36

  Investigating two or more bands of a spectrum by separate detectors · CPC title

• G01J3/0229 Primary

  using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters · CPC title

• G01J3/2803

  using photoelectric array detector · CPC title

• G01J3/26 Primary

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• G01J2003/1234

  Continuously variable IF [CVIF]; Wedge type · CPC title