Slit valve with a pressurized gas bearing

Patent metadata

Field	Value
Publication number	US-9587749-B2
Application number	US-201414456258-A
Country	US
Kind code	B2
Filing date	Aug 11, 2014
Priority date	Aug 12, 2013
Publication date	Mar 7, 2017
Grant date	Mar 7, 2017

Abstract

There is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.

First claim

What is claimed is:

1. A slit valve comprising:
a first slit valve portion having a first window therethrough, the first window permitting passage of an object therethrough; wherein the first window is surrounded by a first area of the first slit valve portion;
a second slit valve portion comprising a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window;
wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions; and
wherein one or more slit valve portions of the first and second slit valve portions comprise a first group and a second group of first vacuum openings for sucking at least a portion of the pressurized gas so as to reduce a propagation of the pressurized gas outside a vicinity of the first and second slit valve portions; wherein the at least one first gas opening is positioned between the first and second groups of first vacuum openings and is surrounded by the first and second groups of first vacuum openings.

2. The slit valve according to claim 1 wherein the first group of first vacuum openings is positioned between the at least one first gas opening and the first window.

3. The slit valve according to claim 1 wherein one or more slit valve portions of the first and second slit valve portions comprises multiple first vacuum openings for applying a differential pressure sucking scheme for sucking at least a portion of the pressurized gas so as to assist in a prevention of a propagation of the pressurized gas outside a vicinity of the first and second slit valve portions.

4. The slit valve according to claim 1 wherein the first sealing plate comprises the at least one first gas opening for emitting pressurized gas.

5. The slit valve according to claim 1 wherein the at least one first gas opening comprises a first gas groove that surrounds the window.

6. The slit valve according to claim 1 wherein the at least one first gas opening comprises multiple grooves that are spaced apart from each other, each groove surrounding the window.

7. The slit valve according to claim 1 further comprising sealing elements for sealing at least one portion of the first positioning module.

8. The slit valve according to claim 1 wherein the first slit valve portion is integrated with a sidewall of an object processing chamber.

9. The slit valve according to claim 1 ,
wherein the first positioning module is configured to move the first sealing element to reduce a gap between the first area and the first sealing element; and
wherein at least one slit valve portion of the first and second slit valve portions is configured to create a pressure difference between two sides of the first sealing element to further reduce the gap between the first area and the first sealing element.

10. The slit valve according to claim 9 wherein at least one slit valve portion of the first and second slit valve portions is configured to create the pressure difference between two sides of the first sealing element to further reduce the gap between the first area and the first sealing element to below 10 microns.

11. The slit valve according to claim 1 further comprising:
a third slit valve portion having a second window therethrough, the second window is sized to permit passage of the object through the second window; wherein the second window is surrounded by a second area of the third slit valve portion; and
a fourth slit valve portion that comprises a second sealing element and a second positioning module; wherein the second positioning module is arranged to move the second sealing element in relation to the second window;
wherein the slit valve is arranged to seal the second window with the second sealing element.

12. The slit valve according to claim 11 wherein at least one slit valve portion of the third and fourth slit valve portions comprises at least one second gas opening for emitting another pressurized gas so as to assist in a creation of a second gas cushion between the second area and the second sealing element when the second sealing element is placed adjacent to the second window thus creating a seal between the third and fourth slit valve portions.

13. The slit valve according to claim 12 wherein one or more slit valve portions of the third and fourth slit valve portions comprises at least one second vacuum opening for sucking at least a portion of the other pressurized gas so as to assist in a prevention of a propagation of the other pressurized gas outside a vicinity of the second and third slit valve portions.

14. An object processing system comprising:
a first chamber, comprising a first chamber wall defining a first window therethrough, the first window permitting passage of an object therethrough; wherein the first window is surrounded by a first area of the first chamber wall;
a slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window;
wherein at least one of the first chamber wall and the slit valve portion comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first chamber wall and the slit valve portion; and
wherein one of the slit valve portion or the first chamber wall comprises a first group and a second group of first vacuum openings for sucking at least a portion of the pressurized gas so as to reduce a propagation of the pressurized gas outside a vicinity of the first area of the first chamber wall; and wherein the at least one first gas opening is positioned between the first and second groups of first vacuum openings and is surrounded by the first and second groups of first vacuum openings.

15. The object processing system according to claim 14 comprising:
a second chamber, comprising a second chamber wall defining a second window therethrough, the second window permitting passage of an object therethrough; wherein the second window is surrounded by a second area of the second chamber wall;
another slit valve portion that comprises a second sealing element and a second positioning module; wherein the second positioning module is arranged to move the second sealing element in relation to the second window.

16. An object processing system comprising:
a first chamber including a first chamber wall defining a first window therethrough and a first area surrounding the first window, the first window permitting passage of an object through the first chamber wall;
a slit valve portion including a first sealing element sized and shaped to cover the first window and a first positioning module configured to move the first sealing element between a first position in which the first sealing element is displaced from the first window and a second position in which the first sealing element covers the first window enabling creation of a seal between the first chamber wall and the slit valve portion;
a vacuum pump;
a first annular gas channel formed in the first area and surro

Assignees

• Applied Materials Israel Ltd

Inventors

• Rice Michael R
• Schlimoff Natan
• Krivts (Krayvitz) Igor
• Avneri Israel
• Uziel Yoram
• Admoni Erez
• Reuter Paul
• Weaver William (Ty)

Classifications

• F16K3/188

  by means of hydraulic forces · CPC title

• F16K3/0236 Primary

  the packing being of a non-resilient material, e.g. ceramic, metal · CPC title

• Y10T137/877

  With flow control means for branched passages · CPC title

• F16K51/02

  specially adapted for high-vacuum installations · CPC title

• F16K3/0227

  Packings · CPC title