Apparatus for fabricating semiconductor devices
US-9040884-B2 · May 26, 2015 · US
US9585203B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9585203-B2 |
| Application number | US-201214237094-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 31, 2012 |
| Priority date | Aug 4, 2011 |
| Publication date | Feb 28, 2017 |
| Grant date | Feb 28, 2017 |
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In a microwave heating device of the present invention, a heating-chamber input portion is adapted to direct, to a heating chamber, microwaves having propagated through a waveguide tube and having passed through the positions where microwave radiating portions are formed, thereby realizing a state where progressive waves are dominant among the microwaves propagating through the waveguide tube, so that the microwave radiating portions are caused to radiate, to the inside of the heating chamber, microwaves based on the progressive waves propagating through the waveguide tube. This enables uniformly heating an object to be heated, without using a rotational mechanism.
Opening claim text (preview).
The invention claimed is: 1. A microwave heating device comprising: a heating chamber adapted to house an object to be heated; a microwave supply portion for supplying microwaves to the heating chamber; a waveguide tube for propagating microwaves supplied from the microwave supply portion, to the heating chamber; a plurality of microwave radiating portions which are formed on the waveguide tube and are for radiating microwaves propagating through the waveguide tube, to inside of the heating chamber; and a heating-chamber input portion which is adapted to direct, to the inside of the heating chamber, microwaves having propagated through the waveguide tube and having passed through positions where the microwave radiating portions are formed, to realize a state where a progressive wave is dominant, among the microwaves propagating through the waveguide tube; wherein the microwave radiating portions are adapted to radiate, to the inside of the heating chamber, microwaves based on the progressive wave propagating through the waveguide tube. 2. The microwave heating device according to claim 1 , wherein the plurality of the microwave radiating portions are placed symmetrically with respect to a center of the heating chamber. 3. The microwave heating device according to claim 1 , which is adapted such that an amount of microwaves input to the inside of the heating chamber through the heating-chamber input portion is equal to or less than 10% of a total amount of microwaves radiated to the inside of the heating chamber through the plurality of the microwave radiating portions. 4. The microwave heating device according to claim 1 , wherein surfaces forming the heating chamber are adapted such that a surface in which the heating-chamber input portion is placed, and a surface in which the microwave radiating portions are placed, are facing each other. 5. The microwave heating device according to claim 1 , wherein the heating-chamber input portion comprises a reflective-surface structural portion formed in a termination end of the waveguide tube in a microwave propagation direction, and an inputting opening portion adapted to direct, to the inside of the heating chamber, microwaves having been reflected by the reflective-surface structural portion. 6. The microwave heating device according to claim 1 , wherein the microwave radiating portions are adapted to have a shape capable of radiating a circularly-polarized wave. 7. The microwave heating device according to claim 1 , wherein the heating-chamber input portion comprises a termination-end closure portion formed in a termination end of the waveguide tube in a microwave propagation direction, and a termination-end radiating portion adapted to direct, to the inside of the heating chamber, microwaves based on a standing wave having an in-tube wavelength which is induced in the termination-end closure portion, and a distance in the microwave propagation direction from the termination-end closure portion to a center of the termination-end radiating portion has a length of an odd multiple of about ¼ the in-tube wavelength in the waveguide tube. 8. The microwave heating device according to claim 1 , wherein the heating-chamber input portion comprises a termination-end closure portion formed in a termination end of the waveguide tube in a microwave propagation direction, and a termination-end radiating portion adapted to direct, to the inside of the heating chamber, microwaves based on a standing wave having an oscillation wavelength of the microwave supply portion which is induced in the termination-end closure portion, and a distance in the microwave propagation direction from the termination-end closure portion to a center of the termination-end radiating portion has a length of an odd multiple of about ¼ the oscillation wavelength of the microwave supply portion. 9. The microwave heating device according to claim 7 , wherein the termination-end radiating portion is adapted to have a microwave ejecting function for ejecting microwaves propagating through the waveguide tube to the inside of the heating chamber and, also, to perform a function as a microwave radiating portion for heating the object to be heated. 10. The microwave heating device according to claim 2 , which is adapted such that an amount of microwaves input to the inside of the heating chamber through the heating-chamber input portion is equal to or less than 10% of a total amount of microwaves radiated to the inside of the heating chamber through the plurality of the microwave radiating portions. 11. The microwave heating device according to claim 2 , wherein surfaces forming the heating chamber are adapted such that a surface in which the heating-chamber input portion is placed, and a surface in which the microwave radiating portions are placed, are facing each other. 12. The microwave heating device according to claim 3 , wherein surfaces forming the heating chamber are adapted such that a surface in which the heating-chamber input portion is placed, and a surface in which the microwave radiating portions are placed, are facing each other. 13. The microwave heating device according to claim 10 , wherein surfaces forming the heating chamber are adapted such that a surface in which the heating-chamber input portion is placed, and a surface in which the microwave radiating portions are placed, are facing each other. 14. The microwave heating device according to claim 2 , wherein the heating-chamber input portion comprises a reflective-surface structural portion formed in a termination end of the waveguide tube in a microwave propagation direction, and an inputting opening portion adapted to direct, to the inside of the heating chamber, microwaves having been reflected by the reflective-surface structural portion. 15. The microwave heating device according to claim 3 , wherein the heating-chamber input portion comprises a reflective-surface structural portion formed in a termination end of the waveguide tube in a microwave propagation direction, and an inputting opening portion adapted to direct, to the inside of the heating chamber, microwaves having been reflected by the reflective-surface structural portion. 16. The microwave heating device according to claim 2 , wherein the microwave radiating portions are adapted to have a shape capable of radiating a circularly-polarized wave. 17. The microwave heating device according to claim 3 , wherein the microwave radiating portions are adapted to have a shape capable of radiating a circularly-polarized wave. 18. The microwave heating device according to claim 2 , wherein the heating-chamber input portion comprises a termination-end closure portion formed in a termination end of the waveguide tube in a microwave propagation direction, and a termination-end radiating portion adapted to direct, to the inside of the heating chamber, microwaves based on a standing wave having an in-tube wavelength which is induced in the termination-end closure portion, and a distance in the microwave propagation direction from the termination-end closure portion to a center of the termination-end radiating portion has a length of an odd multiple of about ¼ the in-tube wavelength in the waveguide tube. 19. The microwave heating device according to claim 3 , wherein the heating-chamber input portion comprises a termination-end closure portion formed in a termination end of the waveguide tube in a microwave propagation direction, and a termination-end radiating portion adapted
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