Mechanical resonator with a spring-mass system comprising a phase-change material

Patent metadata

Field	Value
Publication number	US-9584092-B2
Application number	US-201514686509-A
Country	US
Kind code	B2
Filing date	Apr 14, 2015
Priority date	Apr 14, 2015
Publication date	Feb 28, 2017
Grant date	Feb 28, 2017

Abstract

A mechanical resonator includes a spring-mass system, wherein the spring-mass system comprises a phase-change material. The mechanical resonator typically comprises an electrical circuit portion, coupled to the phase-change material to alter a phase configuration within the phase-change material. Methods of operation are also disclosed.

First claim

What is claimed is:

1. A method for tuning a resonance frequency of a spring-mass system of a mechanical resonator comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material, the method comprising:
altering, by a first mechanism, a reversibly transformable crystalline/amorphous phase configuration of the phase-change material to tune the resonance frequency; and
altering, by the first mechanism, the reversibly transformable phase configuration of the phase-change material to at least partially reverse a prior alteration of the reversibly transformable phase configuration of the phase-change material to further tune the resonance frequency.

2. The method of claim 1 , wherein altering the phase configuration of the phase-change material comprises electrically altering the phase configuration of the phase-change material.

3. The method of claim 2 , wherein the phase configuration of the phase-change material is electrically altered by Joule heating.

4. The method of claim 2 , wherein the phase configuration of the phase-change material is electrically altered by electrically heating a heating element in thermal communication with the phase-change material.

5. The method of claim 1 , wherein altering the phase configuration of the phase-change material is performed by applying one or more laser pulses to the phase-change material.

6. The method of claim 1 , wherein altering the phase configuration of the phase-change material is performed so as to change the resonance frequency of the spring-mass system by at least 10%.

7. The method of claim 1 , further comprising monitoring the resonance frequency of the spring-mass system, wherein the altering and the monitoring are iteratively performed to tune the resonance frequency.

8. The method of claim 1 , further comprising fine-tuning, by a second mechanism distinct from the first mechanism, the resonance frequency by modifying a force-gradient of the spring-mass system.

9. The method of claim 8 , wherein the fine tuning does not further alter the phase configuration of the phase-change material.

10. A method for tuning a resonance frequency of a spring-mass system of a mechanical resonator comprising a spring-mass system, wherein the spring-mass system comprises a phase-change material, the method comprising:
altering, by a first mechanism, a reversibly transformable phase configuration of the phase-change material to tune the resonance frequency; and
fine-tuning, by a second mechanism distinct from the first mechanism and not affecting the phase configuration, the resonance frequency.

Assignees

• IBM

Inventors

• Engelen Johan B C
• Lantz Mark A
• Koelmans Wabe W

Classifications

• H03H2009/02165

  Tuning · CPC title

• H03H2009/02299

  Comb-like, i.e. the beam comprising a plurality of fingers or protrusions along its length · CPC title

• B81B3/0045

  Improve properties related to angular swinging, e.g. control resonance frequency · CPC title

• B81B7/008

  MEMS characterised by an electronic circuit specially adapted for controlling or driving the same (B81B7/0087 takes precedence; arrangements for starting, regulating, braking, or otherwise controlling an actuator H02N; control arrangements or circuits for visual indicators G09G3/00) · CPC title

• H03H9/02393 Primary

  Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor · CPC title