Temperature controllable gas laser oscillator

Patent metadata

Field	Value
Publication number	US-9583909-B2
Application number	US-201615053152-A
Country	US
Kind code	B2
Filing date	Feb 25, 2016
Priority date	Feb 27, 2015
Publication date	Feb 28, 2017
Grant date	Feb 28, 2017

Abstract

A gas laser oscillator according to the present invention comprises a resonator unit, a heat exchanger through which a fluid exchanging heat with a laser gas flows, a chiller for cooling the fluid in the heat exchanger and supplying the fluid to the heat exchanger, and a heat transfer device for transferring heat of the fluid to the resonator unit. The gas laser oscillator further comprises a first flow path for supplying the fluid used for cooling the laser gas in the heat exchanger to the heat transfer device, a second flow path for supplying the fluid cooled by the chiller to the heat transfer device prior to supplying the fluid to the heat exchanger, and a switching valve for switching either one of a first flow path and a second flow path.

First claim

What is claimed is:

1. A gas laser oscillator comprising:
a resonator unit including a discharge unit for exciting a laser gas by a discharge, the resonator unit configured to oscillate a laser beam generated by excitation of the laser gas;
a heat exchanger configured to flow a fluid therethrough to exchange heat with the laser gas;
a chiller configured to suction the fluid in the heat exchanger, cool the fluid, and supply the fluid into the heat exchanger;
a heat transfer device configured to transfer heat of the fluid to the resonator unit;
a first flow path configured to supply the fluid used for cooling the laser gas in the heat exchanger from the heat exchanger to the heat transfer device;
a second flow path configured to supply the fluid cooled by the chiller to the heat transfer device prior to supplying the fluid to the heat exchanger; and
a switching valve configured to switch either one of the first flow path and the second flow path.

2. The gas laser oscillator according to claim 1 , further comprising a regulating valve configured to regulate a flow rate of the fluid, which is cooled by the chiller, to be supplied to the heat exchanger.

3. The gas laser oscillator according to claim 2 , wherein the resonator unit comprises an oscillation prevention device configured to prevent oscillation of the laser beam.

4. The gas laser oscillator according to claim 3 , further comprising:
a temperature sensor configured to measure a temperature of the resonator unit; and
a control device configured to compare a measurement temperature measured by the temperature sensor with a predetermined temperature, the control device controlling the switching valve and at least one of the regulating valve and the oscillation prevention device on the basis of the comparison result.

5. The gas laser oscillator according to claim 1 , further comprising:
a temperature sensor configured to measure a temperature of the resonator unit; and
a control device configured to compare a measurement temperature measured by the temperature sensor with a predetermined temperature, the control device controlling the switching valve on the basis of the comparison result.

6. The gas laser oscillator according to claim 1 , wherein the heat transfer device comprises a radiator configured to flow the fluid from either one of the first flow path and the second flow path therethrough and a fan configured to send heat of the radiator to the resonator unit.

7. The gas laser oscillator according to claim 1 , wherein the heat transfer device comprises a flow path configured to flow the fluid from either one of the first flow path and the second flow path therethrough, and the flow path is formed in the resonator unit.

Assignees

• Fanuc Corp

Inventors

• Takazane Tetsuhisa

Classifications

• H01S3/0014

  Monitoring arrangements not otherwise provided for (photometry G01J1/00, e.g. G01J1/4257; radiation pyrometry G01J5/00; measuring coherence of light G01J9/00; measuring wavelength of light G01J9/00, e.g. G01J9/0246; measuring optical pulses G01J11/00; calorimetrically measuring power of laser beams G01K17/003) · CPC title

• H01S3/036

  Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title

• H01S3/0401

  of optical elements being part of laser resonator, e.g. windows, mirrors, lenses · CPC title

• H01S3/0407 Primary

  Liquid cooling, e.g. by water · CPC title

• H01S3/03

  of gas laser discharge tubes · CPC title