Layer-selective laser ablation patterning
US-9209400-B2 · Dec 8, 2015 · US
US9583729B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9583729-B2 |
| Application number | US-201514885577-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 16, 2015 |
| Priority date | Sep 25, 2009 |
| Publication date | Feb 28, 2017 |
| Grant date | Feb 28, 2017 |
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A method for producing an electronic component with at least one first electrode zone ( 21 ) and one second electrode zone ( 23 ), which are separated from one another by an insulator ( 9 ) and each comprise at least one sublayer of a first electrically conductive material. Also disclosed is an electronic component, which may be produced using the disclosed method.
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The invention claimed is: 1. A method for producing an electronic component with at least one first electrode zone and one second electrode zone, which are separated from one another by an insulator and each comprise at least one sublayer of a first electrically conductive material, comprising the steps: A) providing a substrate layer and at least one first electrically conductive layer of the first electrically conductive material arranged on the substrate layer; B) arranging at least one second electrically conductive layer of a second electrically conductive material on the first electrically conductive layer; C) arranging at least one first insulator on the substrate, such that the second electrically conductive layer comprises at least one first subzone, which is covered with the insulator, and a second subzone, which is not covered with the insulator, the insulator being arranged such that it may serve to separate the first electrode zone and the second electrode zone from one another; D) arranging at least one functional layer and at least one second electrode layer on the second electrically conductive layer obtained in step C), which is covered in places with the insulator; J) establishing conditions in which the insulator may be brought at least partially into a flowable state; and K) introducing the insulator into at least one portion of the separation zone between the first electrode zone and the second electrode zone. 2. The method according to claim 1 , wherein the electronic component is an organic light-emitting diode, and wherein the functional layer is an organic fluorescent or phosphorescent emitter layer. 3. The method according to claim 1 , wherein the insulator is a lacquer and is applied to the second electrically conductive layer by screen printing, ink-jet printing or flexographic printing, a function of the insulator is an etch stop function of the second electrically conductive layer. 4. The method according to claim 1 , further comprising the step: G) arranging at least one protective material in at least one third subzone, which is arranged at least partially in the second subzone and also in the first subzone atop the protective layer, such that the second electrically conductive layer in at least one fourth subzone, which is arranged at least partially in the second subzone, is not covered with the protective material. 5. The method according to claim 4 , wherein in a step I) the protective material is removed using a solvent in which the insulator is insoluble, the insulator is not affected by removing the protective material, step I) is done before step J). 6. A method according to claim 5 , which is performed in such a way that at least one conductor track of the second electrically conductive material is arranged on the first electrically conductive layer in the first electrode zone. 7. The method according to claim 1 , wherein in step J) the insulator is softened by heating flows over exposed edges of the second electrically conductive layer and the first electrically conductive layer, a structure of the insulator is rectangular before step J) and becomes rounded in step J) when seen in cross-section. 8. The method according to claim 1 , further comprising the step: E) removing first electrically conductive material of the first electrically conductive layer along a predetermined separation zone between the first electrode zone and the second electrode zone, the separation zone has the form of a trench and in the separation zone the substrate layer is exposed, wherein in step C) the trench is completely covered but not filled with the insulator and in step J) the trench becomes completely filled with the insulator, step E) taking place between step A) and step B). 9. The method according to claim 1 , further comprising the step: F) removing first electrically conductive material of the first electrically conductive layer and second electrically conductive material of the second electrically conductive layer, located over the first electrically conductive material, at least along a predetermined separation zone between the first electrode zone and the second electrode zone, the separation zone has the form of a trench which is not covered with the insulator prior to step J) and becomes completely filled with the insulator in step J). 10. The method according to claim 9 , wherein the protective material is arranged at a distance from the insulator on the second subzone, such that a gap remains between the first subzone and the third subzone, and wherein at least some of the first electrically conductive material of the first electrically conductive layer and of the second electrically conductive material of the second electrically conductive layer, located in the zone of the gap, is removed according to step F), the gap corresponds to the trench and is completely filled with the insulator in step J). 11. The method according to claim 1 , wherein the first electrically conductive material is a transparent conductive oxide. 12. The method according to claim 11 , wherein the second electrically conductive material is a metal.
Electrodes · CPC title
Electrodes · CPC title
Providing a shape to conductive layers, e.g. patterning or selective deposition · CPC title
Electricity · mapped topic
Electricity · mapped topic
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