Use of self-assembled layers for checking the threshold voltage of organic transistors

Patent metadata

Field	Value
Publication number	US-9583540-B2
Application number	US-201214233949-A
Country	US
Kind code	B2
Filing date	Jul 20, 2012
Priority date	Jul 22, 2011
Publication date	Feb 28, 2017
Grant date	Feb 28, 2017

Abstract

The invention relates to an electronic device comprising at least two organic transistors having different threshold voltages. The device comprises at least two transistors, each including a self-assembled layer of molecules having dipole moments that differ from one another by an absolute value of between 0.2 and 10 debye. The invention is particularly suitable for use in the field of electronic circuit production.

First claim

The invention claimed is:

1. An electronic device comprising a first organic transistor having a threshold voltage V 1 and at least one second organic transistor having a threshold voltage V 2 , V 1 and V 2 differing from one another by a value of at least 0.2 V, each of the first and second transistors comprising a layer of a semiconductor material, on top of a layer of a dielectric material, wherein the device further comprises:
a first self-assembled layer of molecules having a first dipole moment M 1 , between the layer of dielectric material and the layer of a semiconductor material of the first organic transistor, and
a second self-assembled layer of molecules having a second dipole moment M 2 , between the layer of a dielectric material and the layer of a semiconductor material of the second organic transistor, and in that
the absolute value of the difference between the dipole moment M 1 and the dipole moment M 2 , |M 1 -M 2 |, is between 0.2 and 10 Debye units.

2. A method of fabrication of an electronic circuit comprising a first organic transistor and at least one second organic transistor, each of the first and of the at least one second organic transistors comprising a layer of a semiconductor material on top of a layer of a dielectric material, wherein the method comprises the following steps:
a) forming, on the layer of a dielectric material of the first transistor, a self-assembled layer formed from molecules having a dipole moment M 1 , and
b) a step of forming, on the layer of a dielectric material of at least one second organic transistor, a self-assembled layer formed from molecules having a dipole moment M 2 , such that the absolute value, |M 1 -M 2 |, is between 0.2 and 10 Debye units.

3. The method as claimed in claim 2 , wherein
the molecules from which the self-assembled layers of the first and of the at least one second organic transistors have the following formula I:
A-D-Z Formula I

in which:
A is a grafted group of the molecule of formula I on the dielectric material comprising one or more of a trihalogenosilane group, trialkoxysilane, carboxylic acid, phosphoric acid, an unsaturated group, comprising a vinyl or acetylene group, a diazonium salt, a nitride, a radical initiator compound, an isocyanate, a group of the organolithium, organomagnesium, or organozinc type, or sulfonic acid,
Z is an end group comprising 3 to 8 carbon atoms, linear or branched or aromatic, optionally comprising at least one fluorine atom,
D is a linear or branched, saturated or unsaturated carbon chain, optionally comprising a cyclic group, optionally aromatic and/or several heteroatoms,

and in that
the difference between the value of water contact angle of the self-assembled layer of the first organic transistor and the value of the water contact angle of the self-assembled layer of the at least one second organic transistor is less than 5%.

4. The method as claimed in claim 2 , wherein the dielectric material of the first and at least one second transistors is of silica, alumina or a surface-oxidized polymer, and in that the grafted group A of the molecules of formula I is a trihalogenosilane or (C 1 to C 4 ) trialkoxysilane group.

5. The method as claimed in claim 2 , wherein the group D comprises an optionally substituted aromatic nucleus.

6. The method as claimed in claim 2 , wherein the end group Z in the compounds of formula I is selected from an aromatic group and/or a saturated or unsaturated, linear or branched C 3 to C 8 alkyl group, optionally comprising a fluorine atom, Z is selected from a tert-butyl, isopropyl, adamantyl, perfluoroethyl, benzyl or butyl group.

7. The method as claimed in claim 2 , wherein the molecules of formula I from which the self-assembled layers of the transistors are formed have the following formula I′:

in which R 1 , R 2 , R 3 and R 4 are selected independently of one another from electron-accepting or electron-donating groups.

8. The method as claimed in claim 7 , wherein the groups R 1 , R 2 , R 3 and R 4 are selected, each independently of one another, from a hydrogen atom, a substituted or unsubstituted C 1 -C 10 alkyl group, a halogen atom, a nitro group (—NO 2 ), ester, amide, trichloromethyl, dialkylamine, alkoxy, cyano, aldehyde, ketone, carboxylic acid (—COOH) or amine (—NH 2 ).

9. The method as claimed in claim 2 , wherein the molecules of formula I from which the self-assembled layers of the transistors are formed are selected from the molecules with the following formula L, formula M and formula N:

10. The method as claimed in claim 7 , wherein the groups R 1 , R 2 , R 3 and R 4 are selected, each independently of one another, from a hydrogen atom, a nitro group and an amine group.

11. The method as claimed in claim 2 , wherein the difference between the value of water contact angle of the self-assembled layer of the first organic transistor and the value of the water contact angle of the self-assembled layer of the at least one second organic transistor is less than 3%.

12. The method as claimed in claim 2 , wherein the dielectric material of the first and at least one second transistors is of silica, alumina or a surface-oxidized polymer, and in that the grafted group A of the molecules of formula I is a trimethoxysilane, trichlorosilane or triethoxysilane group.

Assignees

• Simonato Jean-Pierre
• Celle Caroline
• Commissariat Energie Atomique

Inventors

• Simonato Jean-Pierre
• Celle Caroline

Classifications

• H01L27/283 Primary

  Electricity · mapped topic

• H01L51/0566

  Electricity · mapped topic

• H01L51/0558

  Electricity · mapped topic

• H10K19/10 Primary

  comprising field-effect transistors · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title