Substrate transport apparatus, and system and method for manufacturing electronic device
US-9346171-B2 · May 24, 2016 · US
US9579794B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9579794-B2 |
| Application number | US-201514798673-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 14, 2015 |
| Priority date | Dec 25, 2014 |
| Publication date | Feb 28, 2017 |
| Grant date | Feb 28, 2017 |
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An articulated robot comprises a control unit including: a track information storage unit which stores track information corresponding to a combination of a start point and an end point; a setting unit which sets a current position and a target position of an arm distal end as the start point and the end point; and an operation command generation unit which generates an operation command based on track information corresponding to a combination of the set start point and the set end point (corresponding track information). If the corresponding track information is not stored but related track information corresponding to a combination of a start point and an end point having a predetermined relationship with a combination of the set start point and the set end point is stored in the track information storage unit, the operation command generation unit generates the operation command based on the related track information.
Opening claim text (preview).
What is claimed is: 1. An articulated robot comprising: an arm constituted by a plurality of rotatably connected arm elements; and a control unit configured to perform position control of an arm distal end by outputting an operation command to a driving unit that drives the arm elements, wherein the control unit includes a track information storage unit configured to store track information that corresponds to a combination of which any of a plurality of destinations to which the arm distal end is moved is set to be a start point and any other of the destinations is set to be an end point, and that includes position information of each of the arm elements arranged in time series, a setting unit configured to set a current position and a target position of the arm distal end as the start point and the end point, and an operation command generation unit configured to generate the operation command based on the track information corresponding to the combination of the start point and the end point set by the setting unit, and wherein, if the track information corresponding to the combination of the start point and the end point set by the setting unit is not stored but related track information corresponding to a combination of a start point and an end point having a predetermined relationship with the combination of the start point and the end point set by the setting unit is stored in the track information storage unit, the operation command generation unit generates the operation command based on the related track information. 2. The articulated robot according to claim 1 , wherein the related track information includes inverted track information that is track information corresponding to a combination of which the start point and the end point set by the setting unit are inverted, and the operation command generation unit is capable of generating the operation command by using the inverted track information in inverted time series. 3. The articulated robot according to claim 1 , wherein the related track information includes symmetry track information that is the track information corresponding to a combination of a start point and an end point located at symmetrical positions about a straight line passing through a center of rotation of the arm with respect to the start point and the end point set by the setting unit, and the operation command generation unit is capable of generating the operation command by using the symmetrically transformed position information of the symmetry track information. 4. The articulated robot according to claim 2 , wherein the related track information includes symmetry track information that is the track information corresponding to a combination of a start point and an end point located at symmetrical positions about a straight line passing through a center of rotation of the arm with respect to the start point and the end point set by the setting unit, and the operation command generation unit is capable of generating the operation command by using the symmetrically transformed position information of the symmetry track information. 5. The articulated robot according to claim 1 , wherein on the opposite side of the base end of the arm, a first hand and a second hand as the arm elements are provided rotatably about the same rotation axis, the control unit performs position control of a first hand distal end and a second hand distal end that form the arm distal end, and the operation command generation unit generates the operation command used to perform position control of the first hand distal end and the second hand distal end based on the track information stored in the track information storage unit. 6. The articulated robot according to claim 2 , wherein on the opposite side of the base end of the arm, a first hand and a second hand as the arm elements are provided rotatably about the same rotation axis, the control unit performs position control of a first hand distal end and a second hand distal end that form the arm distal end, and the operation command generation unit generates the operation command used to perform position control of the first hand distal end and the second hand distal end based on the track information stored in the track information storage unit. 7. The articulated robot according to claim 3 , wherein on the opposite side of the base end of the arm, a first hand and a second hand as the arm elements are provided rotatably about the same rotation axis, the control unit performs position control of a first hand distal end and a second hand distal end that form the arm distal end, and the operation command generation unit generates the operation command used to perform position control of the first hand distal end and the second hand distal end based on the track information stored in the track information storage unit. 8. The articulated robot according to claim 4 , wherein on the opposite side of the base end of the arm, a first hand and a second hand as the arm elements are provided rotatably about the same rotation axis, the control unit performs position control of a first hand distal end and a second hand distal end that form the arm distal end, and the operation command generation unit generates the operation command used to perform position control of the first hand distal end and the second hand distal end based on the track information stored in the track information storage unit. 9. A method for controlling an articulated robot that includes an arm constituted by a plurality of rotatably connected arm elements, a driving unit configured to drive the arm elements, and a track information storage unit configured to store track information corresponding to a combination of which any of a plurality of destinations to which the arm distal end is moved is set to be a start point and any other of the destinations is set to be an end point, in which position control of the arm distal end is performed by outputting the operation command to the driving unit, the method comprising: a step of setting a start point and an end point based on current position information and target position information; a step of determining whether track information corresponding to the combination of the set start point and the set end point is stored in the track information storage unit; a step of generating an operation command based on the track information if it is determined that the track information exists in the track information storage unit; a step of determining whether related track information corresponding to a combination of a start point and an end point having a predetermined relationship with the combination of the start point and the end point is stored in the track information storage unit if it is determined that the track information is not stored in the track information storage unit; and a step of generating the operation command based on the related track information if it is determined that the related track information is stored in the track information storage unit.
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