Method for manufacturing light-emitting element and deposition apparatus

Patent metadata

Field	Value
Publication number	US-9578718-B2
Application number	US-201313870246-A
Country	US
Kind code	B2
Filing date	Apr 25, 2013
Priority date	May 4, 2012
Publication date	Feb 21, 2017
Grant date	Feb 21, 2017

Abstract

In order to provide a highly reliable organic EL element, a first step in which a deposition material is heated and vaporized in a deposition chamber in which the pressure is reduced and a second step in which a layer included in an EL layer is deposited in the deposition chamber are performed while exhaustion is performed and the partial pressure of water in the deposition chamber is measured with a mass spectrometer. Alternatively, the deposition chamber in the deposition apparatus includes a deposition material chamber and is connected to an exhaust mechanism. The deposition material chamber is separated from the deposition chamber by a sluice valve, includes a deposition material holding portion including a heating mechanism, and is connected to a mass spectrometer and an exhaust mechanism.

First claim

What is claimed is:

1. A method for manufacturing a light-emitting element comprising the step of:
forming a first electrode over a substrate;
evaporating an organic compound under a reduced pressure to form a layer containing the organic compound over the first electrode in a chamber while measuring a partial pressure of water in the chamber; and
forming a second electrode over the layer containing the organic compound.

2. The method for manufacturing the light-emitting element according to claim 1 , wherein the evaporating step is performed while a wall of the chamber is cooled.

3. The method for manufacturing the light-emitting element according to claim 1 , wherein the evaporating step is performed at the partial pressure of water lower than or equal to 1×10 −4 Pa.

4. The method for manufacturing the light-emitting element according to claim 1 , wherein the evaporating step is performed at a partial pressure of an oxygen atom lower than or equal to 2×10 −6 Pa.

5. The method for manufacturing the light-emitting element according to claim 1 , wherein the partial pressure of water is measured by a mass spectrometer.

6. The method for manufacturing the light-emitting element according to claim 1 , wherein the partial pressure of water is measured by a quadrupole mass spectrometer.

7. The method for manufacturing the light-emitting element according to claim 1 , further comprising a step:
evaporating a second organic compound under a reduced pressure to form a layer containing the second organic compound over the layer containing the organic compound in a second chamber while measuring a partial pressure of water in the second chamber.

8. The method for manufacturing the light-emitting element according to claim 1 ,
wherein a partial pressure of oxygen in the chamber is also measured during the step of evaporating the organic compound.

9. The method for manufacturing the light-emitting element according to claim 1 ,
wherein a second organic compound is also evaporated during the step of evaporating the organic compound so that the layer containing the organic compound also contains the second organic compound.

10. A method for manufacturing a light-emitting element, comprising the steps of:
a first step of keeping a deposition material at a first temperature at which the deposition material is not vaporized and water is vaporized in a deposition chamber while measuring a partial pressure of water in the deposition chamber;
a second step of keeping the deposition material at a second temperature at which the deposition material is vaporized in the deposition chamber after the first step while measuring the partial pressure of water in the deposition chamber; and
a third step of starting deposition of the deposition material over a substrate after the second step while measuring the partial pressure of water in the deposition chamber,
wherein the partial pressure of water in the deposition chamber at a time when the deposition is started is lower than an average partial pressure of water in the first step and the second step.

11. The method for manufacturing the light-emitting element according to claim 10 , wherein deposition of the deposition material is not performed at the first step and the second step.

12. The method for manufacturing the light-emitting element according to claim 10 , wherein the first step, the second step and the third step are performed while measuring the partial pressure of water with use of a mass spectrometer.

13. The method for manufacturing the light-emitting element according to claim 12 , wherein the mass spectrometer is a quadrupole mass spectrometer.

14. The method for manufacturing the light-emitting element according to claim 10 , comprising the step of stopping heating the deposition material between the second step and the third step.

15. The method for manufacturing the light-emitting element according to claim 10 , wherein the first step and the second step are performed while a wall of the deposition chamber is heated.

16. The method for manufacturing the light-emitting element according to claim 10 , wherein the third step is performed while a wall of the deposition chamber is cooled.

17. The method for manufacturing the light-emitting element according to claim 10 , wherein the third step is performed at the partial pressure of water lower than or equal to 1×10 −4 Pa.

18. The method for manufacturing the light-emitting element according to claim 10 , wherein the third step is performed at a partial pressure of an oxygen atom lower than or equal to 2×10 −6 Pa.

19. The method for manufacturing the light-emitting element according to claim 10 ,
wherein the partial pressure of water in the deposition chamber at the time when the deposition is started is lower than or equal to 1×10 −4 Pa.

20. The method for manufacturing the light-emitting element according to claim 10 , further comprising steps:
forming a first electrode over the substrate before the third step; and
forming a second electrode over the substrate before the third step.

21. The method for manufacturing the light-emitting element according to claim 10 ,
wherein a partial pressure of oxygen in the deposition chamber is also measured in the first step.

22. The method for manufacturing the light-emitting element according to claim 10 ,
wherein a partial pressure of oxygen in the deposition chamber is also measured in the second step.

23. The method for manufacturing the light-emitting element according to claim 10 ,
wherein a partial pressure of oxygen in the deposition chamber is also measured in the third step.

Assignees

• Semiconductor Energy Lab

Inventors

• Yokoyama Kohei
• Ikeda Hisao
• Hirasa Shinichi
• Jinbo Yasuhiro
• Takase Natsuko

Classifications

• H05B33/10 Primary

  Apparatus or processes specially adapted to the manufacture of electroluminescent light sources · CPC title

• C23C14/54

  Controlling or regulating the coating process · CPC title

• C23C14/24 Primary

  Vacuum evaporation · CPC title

• H01J49/004

  Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn · CPC title

• A63F13/327

  using wireless networks, e.g. Wi-Fi® or piconet · CPC title