Fluxgate device with low fluxgate noise

Patent metadata

Field	Value
Publication number	US-9577185-B1
Application number	US-201615141003-A
Country	US
Kind code	B1
Filing date	Apr 28, 2016
Priority date	Apr 28, 2016
Publication date	Feb 21, 2017
Grant date	Feb 21, 2017

Abstract

An integrated fluxgate device, which includes a magnetic core, an excitation coil, and a sense coil. The magnetic core has a longitudinal edge and a terminal edge. The excitation coil coils around the longitudinal edge of the magnetic core, and the excitation coil has a first number of excitation coil members within a proximity of the terminal edge. The sense coil coils around the longitudinal edge of the magnetic core, and the sense coil has a second number of sense coil members within the proximity of the terminal edge. For reducing fluxgate noise, the second number of sense coil members may be less than the first number of excitation coil members within the proximity of the terminal edge.

First claim

What is claimed is:

1. An integrated fluxgate device, comprising:
a magnetic core having a longitudinal edge and a terminal edge;
an excitation coil coiling around the longitudinal edge of the magnetic core and having a first number of excitation coil members within a proximity of the terminal edge; and
a sense coil coiling around the longitudinal edge of the magnetic core and having a second number of sense coil members within the proximity of the terminal edge, the second number of sense coil members less than the first number of excitation coil members.

2. The integrated fluxgate device of claim 1 , further comprising:
a dielectric layer having an extension region abutting the terminal edge of the magnetic core,
wherein the excitation coil extends from the terminal edge of the magnetic core and coils around the extension region of the dielectric layer.

3. The integrated fluxgate device of claim 2 , wherein the sense coil terminates before reaching the extension region of the dielectric layer.

4. The integrated fluxgate device of claim 2 , further comprising:
a dummy coil having split coil members interleaving with the excitation coil members within the extension region of the dielectric layer.

5. The integrated fluxgate device of claim 1 , wherein:
the terminal edge includes a straight edge defining a width;
the proximity of the terminal edge is defined by a half of the width measured from the terminal edge toward and away from a center of the magnetic core.

6. The integrated fluxgate device of claim 1 , wherein:
the terminal edge includes a protrusion edge protruding away from a center of the magnetic core, the protrusion edge defining a protrusion distance;
the proximity of the terminal edge is defined by the protrusion distance measured from the protrusion edge away from the center of the magnetic core and two times the protrusion distance measured from the protrusion edge toward the center of the magnetic core.

7. The integrated fluxgate device of claim 6 , wherein the protrusion edge includes a semi-circular edge and the protrusion distance is defined by a radius of the semi-circular edge.

8. The integrated fluxgate device of claim 1 , wherein the second number of sense coil members is zero within the proximity of the terminal edge.

9. The integrated fluxgate device of claim 1 , further comprising:
a dummy coil having split coil members interleaving with the excitation coil members within the proximity of the terminal edge.

10. The integrated fluxgate device of claim 1 , further comprising:
a semiconductor substrate positioned under the magnetic core;
an excitation circuit having first transistors formed in the semiconductor substrate, the excitation circuit coupled to the excitation coil;
a sense circuit having second transistors formed in the semiconductor substrate, the sense circuit coupled to the sense coil; and
an insulation layer insulating the excitation circuit and the sense circuit from the magnetic core.

11. An integrated circuit, comprising:
a semiconductor substrate;
a circuit having transistors formed in the semiconductor substrate; and
a fluxgate device positioned above the circuit, the fluxgate device including:
a magnetic core having a longitudinal edge and a terminal region;
an excitation coil coupled to the circuit, the excitation coil coiling around the longitudinal edge of the magnetic core and extending to the terminal region; and
a sense coil coupled to the circuit, the sense coil coiling around the longitudinal edge of the magnetic core and terminated outside the terminal region.

12. The integrated circuit of claim 11 , further comprising:
a dielectric layer having an extension region abutting the terminal region of the magnetic core,
wherein the excitation coil extends from the terminal region of the magnetic core and coils around the extension region of the dielectric layer.

13. The integrated circuit of claim 12 , further comprising:
a dummy coil having split coil members interleaving with the excitation coil within the extension region of the dielectric layer.

14. The integrated circuit of claim 11 , further comprising:
a dummy coil having split coil members interleaving with the excitation coil within the terminal region of the magnetic core.

15. The integrated circuit of claim 11 , wherein:
the terminal region includes a straight edge defining a width; and
the terminal region is defined by a half of the width measured from the straight edge toward a center of the magnetic core.

16. The integrated circuit of claim 11 , wherein:
the terminal region includes a protrusion edge protruding away from a center of the magnetic core, the protrusion edge defining a protrusion distance; and
the terminal region is defined by two times the protrusion distance measured from the protrusion edge toward the center of the magnetic core.

17. The integrated circuit of claim 16 , wherein the protrusion edge includes a semi-circular edge and the protrusion distance is defined by a radius of the semi-circular edge.

18. An integrated circuit, comprising:
a semiconductor substrate;
a circuit having transistors formed in the semiconductor substrate; and
a fluxgate device positioned above the circuit, the fluxgate device including:
a magnetic core having a longitudinal edge and a terminal region;
a dielectric layer having an extension region abutting the terminal region of the magnetic core;
an excitation coil coupled to the circuit, the excitation coil coiling around the longitudinal edge of the magnetic core, the excitation coil extending to the terminal region of the magnetic core and the extension region of the dielectric layer; and
a sense coil coupled to the circuit, the sense coil coiling around the longitudinal edge of the magnetic core and terminated before reaching the terminal region of the magnetic core.

19. The integrated circuit of claim 18 , further comprising:
a dummy coil having split coil members interleaving with the excitation coil across the extension region of the dielectric layer and the terminal region of the magnetic core.

20. The integrated circuit of claim 18 , wherein:
the terminal region includes a semi-circular edge defining a radius; and
the terminal region is defined by two times the radius measured from the semi-circular edge toward a center of the magnetic core.

Assignees

• Texas Instruments Inc

Inventors

• Lee Dok Won
• Lavangkul Sudtida
• Mazotti Erika Lynn
• French William David

Classifications

• H10W20/43

  Layouts of interconnections · CPC title

• H10W20/42

  Vias, e.g. via plugs · CPC title

• H01L43/12 Primary

  Electricity · mapped topic

• H01L23/5226

  Electricity · mapped topic

• H01L43/02

  Electricity · mapped topic