Cells including at least one fin field effect transistor and semiconductor integrated circuits including the same

Patent metadata

Field	Value
Publication number	US-9576978-B2
Application number	US-201314042900-A
Country	US
Kind code	B2
Filing date	Oct 1, 2013
Priority date	Oct 9, 2012
Publication date	Feb 21, 2017
Grant date	Feb 21, 2017

Abstract

A semiconductor integrated circuit (IC) may comprise at least one cell comprising at least one fin field-effect transistor (FET). The at least one cell may comprise a plurality of fins that extend in a first direction and are arranged in parallel to each other in a second direction that is perpendicular to the first direction. A size of the at least one cell in the second direction may correspond to a number and a pitch of the plurality of fins.

First claim

What is claimed is:

1. A semiconductor integrated circuit (IC), comprising:
at least one cell having at least one fin field-effect transistor (FET);
wherein the at least one cell comprises a plurality of fins that extend in a first direction and are arranged in parallel to each other in a second direction that is perpendicular to the first direction,
wherein the at least one cell comprises a plurality of metal lines extending in the first direction and arranged in parallel to each other in the second direction,
wherein a size of the at least one cell in the second direction corresponds to a number and a pitch of the plurality of fins,
wherein the plurality of metal lines comprises two power lines arranged at both ends of the at least one cell in the second direction and a plurality of wires between the power lines, and
wherein the plurality of fins include a plurality of active fins and a plurality of dummy fins.

2. The semiconductor IC of claim 1 , wherein
the plurality of active fins are adjacent to each other; and
the plurality of dummy fins are adjacent to each other.

3. The semiconductor IC of claim 1 , wherein the metal lines have a same width.

4. The semiconductor IC of claim 1 , wherein the wires have a same width.

5. The semiconductor IC of claim 1 , wherein a width of each of the power lines is greater than a width of each of the wires.

6. The semiconductor IC of claim 1 , wherein the pitch of the fins has a constant value irrespective of the number of fins included in the at least one cell, and
wherein the number of fins is determined according to a number of the metal lines included in the at least one cell.

7. A semiconductor integrated circuit (IC), comprising:
at least one cell having at least one fin field-effect transistor (FET);
wherein the at least one cell comprises,
a first region comprising a plurality of active fins arranged in parallel to each other in a first direction; and
a second region comprising a plurality of dummy fins arranged in parallel to the plurality of active fins; and

wherein the second region further comprises,
a power region in which a power line configured to supply power to the plurality of active fins is disposed; and
at least one middle region in which input and output terminals with respect to the at least one cell are disposed.

8. The semiconductor IC of claim 7 , wherein the first region includes no dummy fins.

9. The semiconductor IC of claim 7 , wherein the second region includes no active fins.

10. The semiconductor IC of claim 7 , wherein a first pitch of the active fins is less than a second pitch of the dummy fins.

11. The semiconductor IC of claim 7 , wherein the active fins and the dummy fins have a same width.

12. The semiconductor IC of claim 7 , wherein the first region includes no dummy fins, and
wherein the second region includes no active fins.

13. The semiconductor IC of claim 7 , wherein the first region further comprises:
a first active region; and
a second active region; and
wherein the second region further comprises,
a first dummy region between a first cell boundary of the at least one cell and the first active region;
a second dummy region between the first active region and the second active region; and
a third dummy region between a second cell boundary of the at least one cell and the second active region.

14. The semiconductor IC of claim 7 , wherein the at least one cell further comprises a plurality of metal lines arranged in parallel to the active fins and dummy fins, and above the first and second regions, and
wherein a pitch of the dummy fins is determined according to a number of the metal lines included in the at least one cell.

15. A semiconductor integrated circuit (IC), comprising:
at least one cell having at least one fin field-effect transistor (FET);
wherein the at least one call comprises a first region, and a second region that does not overlap the first region,
wherein the first region comprises at least two active fins arranged in parallel to each other with a first pitch, the first pitch being irrespective of a height of the at least one cell,
wherein the second region comprises at least two dummy fins arranged in parallel to each other with a second pitch, the second pitch being determined based on the height of the at least one cell.

16. The semiconductor IC of claim 15 , wherein the second pitch is greater than or equal to the first pitch.

17. The semiconductor IC of claim 15 , wherein the first region includes no dummy fins, and
wherein the second region includes no active fins.

18. The semiconductor IC of claim 15 , wherein two or more of the at least two active fins are arranged consecutively in a direction that is perpendicular to an arrangement direction of the at least two active fins,
wherein two or more of the at least two dummy fins are arranged consecutively in a direction that is perpendicular to an arrangement direction of the at least two dummy fins, or
wherein two or more of the at least two active fins are arranged consecutively in the direction that is perpendicular to the arrangement direction of the at least two active fins, and two or more of the at least two dummy fins are arranged consecutively in the direction that is perpendicular to the arrangement direction of the at least two dummy fins.

19. The semiconductor IC of claim 15 , wherein the at least one cell further comprises a plurality of metal lines arranged in parallel to the active fins and dummy fins, and above the first and second regions, and
wherein the second pitch is determined according to a number of the metal lines included in the at least one cell.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Baek Sang-Hoon
• Oh Sang-Kyu

Classifications

• H10W20/427

  Power or ground buses · CPC title

• H01L29/6681

  Electricity · mapped topic

• H01L27/0886

  Electricity · mapped topic

• H01L21/845

  Electricity · mapped topic

• H01L27/1211 Primary

  Electricity · mapped topic