MEMS-Based Conformal Air Speed Sensor
US-2015377662-A1 · Dec 31, 2015 · US
US9574960B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9574960-B2 |
| Application number | US-201414327411-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 9, 2014 |
| Priority date | Jul 9, 2014 |
| Publication date | Feb 21, 2017 |
| Grant date | Feb 21, 2017 |
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This disclosure provides example methods, devices, and systems for an ultra-miniature, multi-hole flow angle probe. The construction, packaging of a multitude of absolute and or differential pressure transducers or sensors are invented for the purpose of providing highly accurate measurement of flow properties, flow angle in particular. The unique placement of sensors leads to further miniaturization relative to current state of the art. Further the use of closely coupled, differential transducer or transducers achieves higher accuracy measurement of small pressure variations coupled with large mean or average baseline pressures, as is demanded in modern aerodynamic or turbo-machinery devices. The use and installation of ultra-miniature sensors insider the device invented herein achieves higher frequency response than allowable via previous state of the part.
Opening claim text (preview).
What is claimed is: 1. A probe, comprising: a housing having a front portion with a first substantially flat oblique side and a second substantially flat oblique side; a first aperture and a second aperture, wherein the first aperture is disposed on the first oblique side and the second aperture is disposed on the second oblique side; a first transducer disposed in the housing and proximate the first aperture, wherein the first transducer is configured to measure a first environmental condition received at the first aperture; a second transducer disposed in the housing and proximate the second aperture, wherein the second transducer is configured to measure a second environmental condition received at the second aperture; wherein the width of the housing is less than about two tenths of an inch and the length is less than about three inches; and wherein the second transducer is configured to measure a difference between the second environmental condition and the first environmental condition. 2. The probe of claim 1 , further comprising: a first tube having a first end and a second end, wherein the first end of the first tube is coupled to the first aperture and the second end of the first tube is coupled to the first transducer; and a second tube having a first end and a second end, wherein the first end of the second tube is coupled to the second aperture and the second end of the second tube is coupled to the second transducer. 3. The probe of claim 2 , wherein the housing is disposed around and defines the first tube. 4. The probe of claim 2 , wherein the housing is disposed around and defines the second tube. 5. The probe of claim 2 , further comprising: a third tube having a first end and a second end; and wherein the second transducer is configured to have a first side and a second side, wherein the first side is coupled to the second end of the second tube and the second side is coupled to the second end of the third tube. 6. The probe of claim 5 , wherein the housing is disposed around and defines the third tube. 7. The probe of claim 1 , wherein each of the first transducer and the second transducer is a silicon-on-insulator (SOI) transducer. 8. The probe of claim 1 , wherein each of the first transducer and the second transducer is a piezoresistive transducer. 9. The probe of claim 1 , wherein the first transducer is an absolute transducer and the second transducer is a differential transducer. 10. The probe of claim 1 , wherein each of the first transducer and the second transducer is a differential transducer. 11. The probe of claim 1 , wherein the first oblique side of the front portion of the housing is about opposite to the second oblique side of the front portion of the housing. 12. The probe of claim 1 , wherein the first aperture on the first oblique side of the front portion of the housing is symmetrically opposite to the second aperture on the second oblique side of the front portion of the housing. 13. The probe of claim 1 , wherein a first distance from a front end of the front portion of the housing to the first aperture is about equidistant to a second distance from the front end of the front portion of the housing to the second aperture. 14. The probe of claim 1 , wherein a first angle of the first oblique side of the front portion of the housing is about orthogonal to a second angle of the second oblique side of the front portion of the housing. 15. The probe of claim 1 , wherein a shape of the front portion of the housing is spherical. 16. The probe of claim 1 , wherein a shape of the front portion of the housing is pyramidal. 17. The probe of claim 1 , wherein a shape of the front portion of the housing is wedge shaped. 18. The probe of claim 1 , wherein a shape of the front portion of the housing is tapered. 19. The probe of claim 1 , wherein a height of the housing is less than about one inch. 20. The probe of claim 1 , wherein the first transducer is connected to the first aperture. 21. The probe of claim 1 , wherein the second transducer is connected to the second aperture.
using Pitot tubes {, e.g. Machmeter} · CPC title
being part of the housing (other details about the housing G01L19/14) · CPC title
Arrangements or constructions of Pitot tubes · CPC title
Pitot tubes · CPC title
indicating air data, i.e. flight variables of an aircraft, e.g. angle of attack, side slip, shear, yaw · CPC title
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