High purity ozone generator for optics cleaning and recovery

Patent metadata

Field	Value
Publication number	US-9573111-B1
Application number	US-201313935765-A
Country	US
Kind code	B1
Filing date	Jul 5, 2013
Priority date	Jul 9, 2012
Publication date	Feb 21, 2017
Grant date	Feb 21, 2017

Abstract

An apparatus for producing a high purity stream of ozone including a reaction chamber having an inlet and an outlet, a gaseous feed stream having a first purified component and an ultraviolet source. The gaseous feed stream enters the reaction chamber through the inlet, the first purified component includes oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet.

First claim

What we claimed is:

1. An optical module comprising:
a high purity ozone generator comprising:
a reaction chamber comprising an inlet and an outlet;
a gaseous feed stream comprising a first purified component; and
an ultraviolet source;
wherein the gaseous feed stream enters the reaction chamber through the inlet, the first purified component comprises oxygen, the ultraviolet source forms ozone from the oxygen, and the ozone exits the reaction chamber through the outlet; and

at least one optical assembly comprising at least one lens, coupled to the high purity ozone generator and adapted for receiving the ozone from the outlet,
wherein the ozone cleans the at least one optical assembly.

2. The optical module of claim 1 wherein the reaction chamber comprises a hollow form.

3. The optical module of claim 1 wherein the hollow form is selected from the group consisting of: a hollow cylinder, a hollow rectangular prism, a hollow cone, a hollow sphere, a hollow prism, a hollow pyramid, a hollow cube, a hollow ellipsoid, a hollow spheroid, and a hollow barrel shape.

4. The optical module of claim 1 wherein the reaction chamber is formed from stainless steel, glass, aluminum, nickel plated aluminum, ceramic, or a combination thereof.

5. The optical module of claim 1 wherein the first purified component is selected from the group consisting of: oxygen, nitrogen, a noble gas and clean dry air.

6. The optical module of claim 1 wherein the gaseous feed stream further comprises a second purified component mixed with the first purified component.

7. The optical module of claim 1 wherein the ultraviolet source comprises power leads and the reaction chamber further comprises at least one opening adapted for receiving the power leads.

8. The optical module of claim 1 wherein the at least one opening comprises a feedthrough positioned therein, the feedthrough formed from stainless steel, glass, aluminum, nickel plated aluminum, ceramic, or a combination thereof.

9. The optical module of claim 1 wherein the outlet is adapted for exhausting the high purity stream of ozone from the reaction chamber and the outlet is formed from stainless steel, glass, aluminum, nickel plated aluminum, ceramic, or a combination thereof.

Assignees

• Kla Tencor Corp

Inventors

• Rose Garry A
• Delgado Gildardo R
• Larson H Steven

Classifications

• B01J19/123 Primary

  Ultraviolet light · CPC title

• C01B2201/82

  Treatment with ultraviolet light · CPC title

• C01B13/10

  Preparation of ozone · CPC title

• C01B2201/64

  Oxygen · CPC title