Solid-state imaging device with photoelectric conversion region that is not transparent

Patent metadata

Field	Value
Publication number	US-9570495-B2
Application number	US-201113155060-A
Country	US
Kind code	B2
Filing date	Jun 7, 2011
Priority date	Jun 18, 2010
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

A solid-state imaging device includes a substrate and a photoelectric conversion region. The substrate has a charge accumulation region. The photoelectric conversion region is provided on the substrate. The photoelectric conversion region is configured to generate signal charges to be accumulated in the charge accumulation region. The photoelectric conversion region comprises a material that is not transparent.

First claim

What is claimed is:

1. A solid-state imaging device, comprising:
a substrate having a charge accumulation region, wherein the charge accumulation region is formed within the substrate;
a transparent electrode; and
a photoelectric conversion region configured to generate signal charges to be accumulated in the charge accumulation region, wherein the photoelectric conversion region is provided on and is in contact with the charge accumulation region and with the substrate,
wherein the photoelectric conversion region comprises a material that is not transparent and that blocks light from entering the charge accumulation region, wherein about 1.8×10 −3 % of light having a wavelength of 650 nm and incident on the photoelectric conversion region enters the charge accumulation region, whereby generation of noise is prevented, and wherein the photoelectric conversion region is the only structure between the charge accumulation region and the transparent electrode.

2. The solid-state imaging device of claim 1 , wherein the material comprises a compound semiconductor having a chalcopyrite structure.

3. The solid-state imaging device of claim 1 , wherein the charge accumulation region includes a first conductivity type region formed in the substrate, the first conductivity type region being configured to accumulate signal charges generated by the photoelectric conversion region.

4. The solid-state imaging device of claim 1 , further comprising:
a read-out circuit to output electric signals corresponding to the signal charges,
wherein,
the photoelectric conversion region is effective to block incident light from the read-out circuit.

5. The solid-state imaging device of claim 1 , wherein the photoelectric conversion region is adjacent to the charge accumulation region.

6. The solid-state imaging device of claim 5 , wherein the photoelectric conversion region is in direct contact with the charge accumulation region.

7. The solid-state imaging device of claim 1 , wherein the photoelectric conversion region overlies and is in contact with multiple charge accumulation regions.

8. The solid-state imaging device of claim 1 , wherein the solid-state imaging device is a back illumination type image sensor.

9. The solid-state imaging device of claim 1 , wherein the photoelectric conversion region further comprises a material that includes CuInGaS2.

10. An electronic apparatus, comprising:
a solid-state imaging device, the solid-state imaging device including: (a) a substrate, (b) a photoelectric conversion region configured to generate signal charges, wherein the photoelectric conversion region is provided on and is in contact with the substrate and with a charge accumulation region formed within the substrate, and (c) a transparent electrode, wherein no structure other than the photoelectric conversion region lies between the charge accumulation region and the transparent electrode; and
a signal processing unit to process an output of the solid-state imaging device,
wherein,
the photoelectric conversion region comprises a material that is not transparent and that blocks light from entering the charge accumulation region, wherein about 1.8×10 −3 % of light having a wavelength of 650 nm and incident on the photoelectric conversion region enters the charge accumulation region, whereby generation of noise is prevented.

11. The electronic apparatus of claim 10 , wherein the material comprises silicide or a compound semiconductor having a chalcopyrite structure.

12. The electronic apparatus of claim 10 ,
wherein,
the photoelectric conversion region overlies and is in contact with multiple charge accumulation regions.

13. The electronic apparatus of claim 10 , wherein the photoelectric conversion region further comprises a material that includes CuInGaS2.

14. A method for manufacturing a solid-state imaging device, said method comprising:
forming a charge accumulation region in a substrate;
forming a photoelectric conversion region electrically connected to the charge accumulation region, wherein the photoelectric conversion region is provided on and is in contact with the substrate and with the charge accumulation region, wherein the charge accumulation region is configured to accumulate signal charges generated by the photoelectric conversion region, and wherein the photoelectric conversion region comprises a material that is not transparent and blocks light from entering the charge accumulation region, wherein about 1.8×10 −3 % of light having a wavelength of 650 nm and incident on the photoelectric conversion region enters the change accumulation region, whereby generation of noise is prevented; and
forming a transparent electrode on a surface of the photoelectric conversion region, wherein the photoelectric conversion region is the only structure between the transparent electrode and the charge accumulation region.

15. The method of claim 14 , further comprising:
forming a layer having a first conductivity type on the photoelectric conversion region.

16. The method of claim 14 , wherein the material comprises a compound semiconductor having a chalcopyrite structure.

17. The method of claim 16 , wherein the photoelectric conversion region is formed by an epitaxial growth of the compound semiconductor.

18. The method of claim 14 , wherein the photoelectric conversion region further comprises a material that includes CuInGaS2.

Assignees

• Toda Atsushi
• Hirayama Teruo
• Sony Corp

Inventors

• Toda Atsushi
• Hirayama Teruo

Classifications

• Y10T29/49002

  Electrical device making · CPC title

• Y02E10/541

  CuInSe2 material PV cells · CPC title

• H10F39/8033 Primary

  Photosensitive area · CPC title

• H01L27/14621

  Electricity · mapped topic

• H01L27/1464

  Electricity · mapped topic