Microelectronic method for etching a layer

Patent metadata

Field	Value
Publication number	US-9570317-B2
Application number	US-201314758440-A
Country	US
Kind code	B2
Filing date	Dec 20, 2013
Priority date	Dec 28, 2012
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

A microelectronic method for etching a layer to be etched, including: modifying the layer to be etched from a surface of the layer to be etched and over a depth corresponding to at least a portion of thickness of the layer to be etched to form a film, with the modifying including implanting light ions into the layer to be etched; and removing the film includes a selective etching of the film relative to at least one layer underlying the film.

First claim

The invention claimed is:

1. A microelectronic method for etching a layer to be etched, comprising:
modifying the layer to be etched to a depth extending from a surface of the layer to be etched and down to at least a portion of a thickness of the layer to be etched to form a film, the modifying comprising implanting light ions into the layer to be etched, the implanting being carried out by a plasma comprising light ions, and the light ions being selected from among helium and hydrogen; and
removing the film by a selective etching of the film relative to at least one layer underlying the film,
wherein the layer to be etched covers patterns including flanks, and the implanting of the light ions is performed anisotropically along a direction that is substantially parallel to a surface of the flanks.

2. The method according to claim 1 , wherein the implanting is carried out such that the implanted light ions are distributed without interruption from the surface of the layer to be etched down to the depth.

3. The method according to claim 2 , wherein the depth ranges from 1 nm to 30 nm.

4. The method according to claim 1 , wherein energy, duration, and dose of the implantation are provided such that the film can be selectively etched relative to the at least one layer underlying the film.

5. The method according to claim 1 , wherein the modifying of the layer to be etched is executed to a depth corresponding to a portion only of the thickness of the layer to be etched, so that removing the film removes only a portion of the thickness of the layer to be etched.

6. The method according to claim 1 , wherein the modifying of the layer to be etched is executed to a depth corresponding to an entire thickness of the layer to be etched, so that removing the film removes the entire layer to be etched.

7. The method according to claim 1 , wherein the removing the film comprises at least one of: wet cleaning, dry cleaning, and plasma etching.

8. The method according to claim 1 , wherein the removing the film comprises at least vapor phase etching using a gas reacting with the film to form a volatile reaction product.

9. The method according to claim 1 , wherein the implanting of light ions comprises adding to the plasma a gas containing one of the following gases: helium (He), hydrogen (H2), argon (Ar), or nitrogen (N2).

10. The method according to claim 1 , wherein the layer to be etched is made of a semiconductor-based material comprising: silicon (Si), germanium (Ge), and/or silicon germanium (SiGe).

11. The method according to claim 10 , wherein the layer to be etched is an oxide or a nitride of the semiconductor material.

12. The method according to claim 1 , wherein the layer to be etched is made of a type III-V and II-VI composite semiconductor material obtained by combining, respectively, two elements or more in columns II and III, and two elements or more in columns V and VI, of the Periodic Table.

13. The method according to claim 1 , wherein the layer to be etched is a metal oxide or boron-doped carbon (B:C).

14. The method according to claim 1 , wherein the material of the layer to be etched is a metal or a metal alloy.

15. The method according to claim 1 , wherein the modifying comprises, prior to the implanting light ions, an oxidation of a portion of the layer to be etched from the surface thereof.

16. The method according to claim 1 , wherein the modifying comprises, after the implanting the light ions and prior to the removing the film, an oxidation of a portion of the layer to be etched from the surface thereof.

17. The method according to claim 1 , wherein the modifying comprises an oxidation of a portion of the layer to be etched from the surface thereof simultaneously with the implanting of light ions.

18. The method according to claim 1 , wherein the implanting into the layer to be etched is executed through a mask.

19. The method according to claim 18 , wherein plural cycles of the method are carried out, with each cycle comprising an implantation into the layer to be etched through the mask and a removal of the film by selective etching of the film relative to at least an unmodified portion of the layer to be etched.

20. The method according to claim 18 , wherein the removal is executed so that the selective etching etches the film without selectivity relative to the mask, so that, upon removing, a mask thickness substantially equal to a thickness of the film is etched.

21. The method according to claim 18 , wherein the removal is executed so that the selective etching etches the film rather than the mask so as not to consume the mask during the removing or to consume a mask thickness smaller than a thickness of the film during the removal.

22. The method according to claim 1 , wherein the modifying the layer to be etched is executed to a depth corresponding to an entire thickness of the layer to be etched taken along a direction that is substantially perpendicular to the direction of the anisotropic implantation, so that removing the film removes the entire layer to be etched outside the flanks of the patterns and leaves at least a portion of the layer to be etched covering the flanks of the patterns.

23. The method according to claim 22 , wherein the layer comprises silicon nitride and the removing the film is carried out by dry etching in plasma formed in a confined chamber from nitrogen trifluoride (NF3) and ammonia (NH3), and wherein dry etching comprises: etching in forming solid salts and a sublimation of a solid species.

24. The method according to claim 1 ,
wherein the layer to be etched is covered with at least one masking block,
wherein the masking block and the layer to be etched are covered with a protective layer,
wherein the implanting is carried out to implant the light ions at least in areas of the layer to be etched located at a periphery of the masking block, with the light ions being selected so that the implanted areas are etched selectively relative to a rest of the layer to be etched not located at the periphery, and
wherein the implanting further comprises providing a concentration in light ions or dose used and a duration of the implanting so that doped areas located at the periphery of the masking block and a non-implanted region of the layer to be etched located beneath the masking block have a border positioned directly above or in line with one or more side faces of the masking block.

25. The method according to claim 24 , wherein the layer to be etched is an anti-reflective layer.

26. The method according to claim 1 , wherein the modifying and the removing the layer to be etched are performed in a same plasma reactor.

27. A microelectronic method for etching a layer to be etched, comprising:
modifying the layer to be etched to a depth extending from a surface of the layer to be etched and down to at least a portion of a thickness of the layer to be etched to form a film, the modifying comprising implanting light ions into the layer to be etched; and
removing the film by a selective etching of the film relative to at least one layer underlying the film,
wherein the modifying comprises, after the implanting the light ions and prior to the removing the film, oxidizing a part of the layer to be etched from the surface thereof,
wherein the layer to be etched covers patterns including flanks, and the implanting of the light ions is performed an

Assignees

• Commissariat Energie Atomique
• Centre Nat Rech Scient
• Univ Joseph Fourier

Inventors

• Posseme Nicolas
• Joubert Olivier
• Vallier Laurent

Classifications

• H10P70/20

  Cleaning during device manufacture · CPC title

• H10P50/642

  Chemical etching · CPC title

• H10P50/264

  by chemical means · CPC title

• H10P50/00 Primary

  Etching of wafers, substrates or parts of devices · CPC title

• H10P30/22

  using masks · CPC title