Method of using an environmental transmission electron microscope

Patent metadata

Field	Value
Publication number	US-9570270-B2
Application number	US-201414455802-A
Country	US
Kind code	B2
Filing date	Aug 8, 2014
Priority date	Aug 12, 2013
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

An environmental transmission electron microscope (ETEM) suffers from gas-induced resolution deterioration. Inventors conclude that the deterioration is due to ionization of gas in the sample chamber of the ETEM, and propose to use an electric field in the sample chamber to remove the ionized gas, thereby diminishing the gas-induced resolution deterioration. The electric field need not be a strong field, and can be caused by, for example, biasing the sample with respect to the sample chamber. A bias voltage of 100 V applied via voltage source is sufficient for a marked improvement the gas-induced resolution deterioration. Alternatively an electric field perpendicular to the optical axis can be used, for example by placing an electrically biased wire or gauze off-axis in the sample chamber.

First claim

The invention claimed is:

1. A method of using an environmental transmission electron microscope, the environmental transmission electron microscope comprising:
an electron source for generating a beam of electrons;
a condenser system for directing the beam of electrons on a sample, the sample located in a sample chamber;
an imaging system for imaging electrons transmitted through the sample on a detector system; and
a gas regulating system for regulating a gas pressure and a gas composition in the sample chamber, the gas regulation system maintaining a pressure of between 0.5 and 50 mbar in at least part of the sample chamber, the environmental transmission electron microscope suffering from gas-induced resolution deterioration,
the method comprising:
generating a beam of electrons
directing the beam of electrons on the sample in the sample chamber;
forming an image using electrons imaging transmitted through the sample and onto the detector system; and
removing ionized gas from the sample chamber by generating an electric field in the sample chamber, as a result of which gas-induced resolution deterioration is diminished.

2. The method of claim 1 in which the electric field is an electric field that is parallel to the beam of electrons.

3. The method of claim 1 in which the electric field is an electric field that is perpendicular to the beam of electrons.

4. The method of claim 3 in which a magnetic field perpendicular to the beam of electrons and perpendicular to the electric field counters an effect of the electric field on the beam of electrons.

5. The method of claim 1 in which the sample chamber is embedded in an evacuated chamber of the environmental transmission electron microscope.

6. The method of claim 1 further comprising holding the sample with a sample holder and in which generating an electric field such that a gas-induced resolution deterioration of the environmental transmission electron microscope is diminished comprises biasing the sample holder with respect to walls of the sample chamber.

7. An environmental transmission electron microscope comprising:
an electron source for generating a beam of electrons;
a condenser system for directing the beam of electrons on a sampled, the sample located in a sample chamber;
an imaging system for imaging electrons transmitted through the sample and detected on a detector system;
a gas regulating system for regulating a gas pressure and a gas composition in the sample chamber, the gas regulating system capable of maintaining the gas pressure between 0.5 mbar and 50 mbar in at least part of the sample chamber; and
a means for generating an electric field in the sample chamber, wherein the means for generating the electric field in the sample chamber is configured to remove ionized gas from the sample chamber such that a gas-induced resolution deterioration of the environmental transmission electron microscope is reduced.

8. The environmental transmission electron microscope of claim 7 in which the means for generating an electric field in the sample chamber is not part of or does not comprise a detector.

9. The environmental transmission electron microscope of claim 7 in which the means for generating an electric field in the sample chamber is configured to generate an electric field that is parallel to the beam of electrons.

10. The environmental transmission electron microscope of claim 9 wherein the means for generating the electric field comprises a voltage source and a sample holder configured to hold the sample, and wherein the voltage source is configured to bias the sample holder with respect to walls of the sample chamber to generate the electric field that is parallel to the beam of electrons.

11. The environmental transmission electron microscope of claim 7 in which the means for generating an electric field in the sample chamber is configured to generate an electric field that is perpendicular to the beam of electrons.

12. The environmental transmission electron microscope of claim 11 further comprising a wire or gauze placed off-center in the sample chamber and configured to generate the electric field that is perpendicular to the beam of electrons.

13. The environmental transmission electron microscope of claim 11 further comprising a one or more ring electrodes arranged around an optical axis of the environmental transmission electron microscope and configured to generate the electric field that is perpendicular to the beam of electrons.

14. The environmental transmission electron microscope of claim 13 wherein the one or more ring electrodes do not form a complete circle around the optical axis.

15. The environmental transmission electron microscope of claim 11 in which the environmental transmission electron microscope is configured to generate a magnetic field perpendicular to the beam of electrons and perpendicular to the electric field such that an effect of the electric field on the beam of electrons is countered.

16. The environmental transmission electron microscope of claim 15 in which the magnetic field and the electric field form a Wien filter for the beam of electrons that maintains a trajectory of the beam of electrons along a straight path.

17. The environmental transmission electron microscope of claim 7 further comprising an evacuated chamber, and wherein the sample chamber is embedded in the evacuated chamber.

18. The environmental transmission electron microscope of claim 7 further comprising a scanning means configured such that the environmental transmission electron microscope can operate as an environmental scanning transmission electron microscope.

19. A method of using an environmental transmission electron microscope comprising an electron source, a sample chamber, a condenser system, an imaging system, a detector system, and a gas regulating system, the method comprising:
generating a beam of electrons from the electron source;
directing the beam of electrons on a sample located in the sample chamber by using the condenser system;
imaging, using the imaging system, electrons transmitted through the sample and detected by the detector system;
maintaining a pressure between 0.5 mbar and 50 mbar in at least part of the sample chamber by using the gas regulating system; and
removing ionized gas from the sample chamber by generating an electric field such that a gas-induced resolution deterioration of the environmental transmission electron microscope is diminished.

20. The method of claim 19 in which the electric field is an electric field that is parallel to the beam of electrons.

21. The method of claim 19 in which the electric field is an electric field that is perpendicular to the beam of electrons.

Assignees

• Fei Co

Inventors

• Tiemeijer Peter Christiaan
• Konings Stan Johan Pieter
• Henstra Alexander

Classifications

• H01J2237/006

  Details of gas supplies, e.g. in an ion source, to a beam line, to a specimen or to a workpiece, (H01J37/3244 takes precedence; environmental cells for electron microscopes H01J2237/2003; microscopes with environmental specimen chamber H01J2237/2608) · CPC title

• H01J2237/262

  Non-scanning techniques · CPC title

• H01J2237/2605

  operating at elevated pressures, e.g. atmosphere · CPC title

• H01J37/26

  Electron or ion microscopes; Electron or ion diffraction tubes · CPC title

• H01J37/261 Primary

  Details · CPC title