Methods of forming near field transducers and near field transducers formed thereby

Patent metadata

Field	Value
Publication number	US-9570098-B2
Application number	US-201414561840-A
Country	US
Kind code	B2
Filing date	Dec 5, 2014
Priority date	Dec 6, 2013
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

A method of forming a near field transducer (NFT), the method including the steps of depositing a plasmonic material; depositing an encapsulant material on at least a portion of the plasmonic material; and implanting ions into at least a portion of the plasmonic material through the encapsulant material.

First claim

What is claimed is:

1. A method of forming a near field transducer (NFT), the method comprising the steps of:
depositing a plasmonic material;
depositing an encapsulant material on at least a portion of the plasmonic material; and
implanting ions into at least a portion of the plasmonic material through the encapsulant material.

2. The method according to claim 1 , wherein the plasmonic material is at least partially fabricated before the encapsulant material is deposited thereon.

3. The method according to claim 2 , wherein at least partially fabricated comprises defining a peg, forming a peg, or some combination thereof.

4. The method according to claim 1 , wherein the encapsulant material is deposited on plasmonic material that forms a peg of a NFT, on plasmonic material that forms a disc of a NFT, or on plasmonic material that forms both a peg and a disc of a NFT.

5. The method according to claim 1 , wherein the encapsulant material comprises dielectric material.

6. The method according to claim 1 , wherein the encapsulant material comprises diamond like carbon (DLC), and the plasmonic material is present on a device that includes a plurality of magnetic recording heads.

7. The method according to claim 1 , wherein the encapsulant material is deposited to a thickness from about 2 nm to about 50 nm.

8. The method according to claim 1 , wherein implanting ions into at least a portion of the plasmonic material comprises patterning steps.

9. The method according to claim 1 further comprising etching at least a portion of the encapsulant material after implanting ions into at least a portion of the plasmonic material.

10. The method according to claim 1 further comprising depositing additional encapsulant material after implantation of ions into at least a portion of the plasmonic material.

11. A method of forming a near field transducer (NFT), the method comprising the steps of:
depositing a plasmonic material;
depositing an encapsulant material on at least a portion of the plasmonic material;
implanting ions into at least a portion of the plasmonic material through the encapsulant material; and
forming a NFT from the plasmonic material.

12. The method according to claim 11 , wherein the NFT is formed from the plasmonic material before the encapsulant material is deposited thereon.

13. The method according to claim 11 , wherein the NFT includes a peg, a disc, and a heat sink and the encapsulant material is deposited on at least a portion of the peg, the disc and the heat sink.

14. The method according to claim 11 , wherein the encapsulant material comprises a dielectric material and the dielectric material is deposited to a thickness from about 2 nm to about 50 nm.

15. The method according to claim 11 further comprising etching at least a portion of the encapsulant material after implanting ions into at least a portion of the plasmonic material and depositing additional encapsulant material after implantation of ions into at least a portion of the plasmonic material.

16. The method according to claim 1 , wherein implanting ions into at least a portion of the plasmonic material comprises patterning steps.

Assignees

• Seagate Technology Llc

Inventors

• Jayashankar Sethuraman
• Brickner Hui

Classifications

• G11B5/3163 Primary

  Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers · CPC title

• G11B5/314

  where the layers are extra layers normally not provided in the transducing structure, e.g. optical layers (G11B5/3196 takes precedence) · CPC title

• G11B2005/0021

  Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal · CPC title

• C23C14/16

  on metallic substrates or on substrates of boron or silicon · CPC title

• C23C14/0605

  Carbon · CPC title