Simultaneous multi-spot inspection and imaging

Patent metadata

Field	Value
Publication number	US-9568435-B2
Application number	US-201414465656-A
Country	US
Kind code	B2
Filing date	Aug 21, 2014
Priority date	Apr 18, 2002
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

A compact and versatile multi-spot inspection imaging system employs an objective for focusing an array of radiation beams to a surface and a second reflective or refractive objective having a large numerical aperture for collecting scattered radiation from the array of illuminated spots. The scattered radiation from each illuminated spot is focused to a corresponding optical fiber channel so that information about a scattering may be conveyed to a corresponding detector in a remote detector array for processing. In one embodiment, a one-dimensional array of illumination beams is directed at an oblique angle to the surface to illuminate a line of illuminated spots at an angle to the plane of incidence. Radiation scattered from the spots are collected along directions perpendicular to the line of spots or in a double dark field configuration.

First claim

What is claimed is:

1. A method for detecting anomalies of a surface, comprising:
focusing illumination beams of radiation to an array of spots on the surface in directions that are oblique to the surface;
imaging radiation scattered from said spots onto a first array of receivers or detectors in a dark field imaging scheme so that each receiver or detector in the first array receives radiation that is forward scattered from a corresponding spot in the array of spots in a direction that is a same direction as the illumination beams of radiation; and
imaging scattered radiation from said spots onto a second array of receivers or detectors different from the first array in a dark field imaging scheme so that each receiver or detector in the second array receives radiation that is back scattered from a corresponding spot in a direction that is opposite a direction of the illumination beams of radiation.

2. The method of claim 1 , wherein said scattered radiation from said spots is imaged in the dark field imaging scheme onto the first array by means of reflective optics.

3. The method of claim 1 , further comprising selecting a wavelength and supplying the illumination beams of radiation so that the radiation comprises a component of the selected wavelength in a UV, deep UV, visible or infrared wavelength range, said supplying comprising passing a beam of radiation of the selected wavelength component through a diffracting element to form the illumination beams.

4. The method of claim 1 , wherein the focusing focuses the beams to an array of elongated spots, said spots arranged along a substantially straight line.

5. The method of claim 4 , further comprising causing rotational motion of the surface while leaving the beams at substantially stationary positions.

6. The method of claim 4 , wherein the straight line is at an angle of 45 degrees to a plane of incidence of the beams.

7. The method of claim 6 , wherein said imaging images the scattered radiation to the first or second arrays of receivers or detectors along one or more directions that are substantially normal to the straight line.

8. The method of claim 1 , wherein the scattered radiation from said spots is imaged by means of reflective optics onto the first and second arrays.

9. An apparatus for detecting anomalies of a surface, comprising:
illumination optics for focusing illumination beams of radiation to an array of spots on the surface in directions that are oblique to the surface;
first dark field imaging optics for imaging radiation scattered from said spots onto a first array of receivers or detectors so that each receiver in the first array receives radiation that is forward scattered from a corresponding spot in the array of spots; and
second dark field imaging optics for imaging scattered radiation from said spots onto a second array of receivers or detectors different from the first array so that each receiver or detector in the second array receives radiation from that is back scattered from a corresponding spot.

10. The apparatus of claim 9 , further comprising means for supplying a beam of radiation of a selected wavelength in a UV, deep UV, visible or infrared wavelength range, and a diffracting element that diffracts the beam of radiation of the selected wavelength component to form the illumination beams.

11. The apparatus of claim 9 , wherein the illumination optics are further arranged to focus the beams to an array of elongated spots, said spots arranged along a substantially straight line.

12. The apparatus of claim 11 , herein the straight line is at an angle of 45 degrees to a plane of incidence of the beams.

13. The apparatus of claim 11 , wherein the first or second dark field imaging optics is further arranged for imaging the scattered radiation to the first or second arrays of receivers or detectors along one or more directions that are substantially normal to the straight line.

14. The apparatus of claim 9 , wherein the illumination optics are further arranged to focus the beams to a one dimensional array of spots, said apparatus further comprising an instrument for causing rotational motion between the surface and the beams, wherein the instrument is operable to cause rotational motion of the surface while leaving the beams at substantially stationary positions.

15. The apparatus of claim 9 , wherein the first dark field imaging optics includes reflective optics.

16. The method of claim 1 , wherein:
wherein the array of spots is arranged along a substantially straight line and scanned perpendicular to such straight line,
imaging scattered radiation from said spots onto the first array of receivers or detectors is accomplished by each receiver or detector in the first array receiving radiation that is forward scattered from a first direction that is substantially perpendicular to the straight line,
imaging scattered radiation from said spots onto the second array of receivers or detectors is accomplished by each receiver or detector in the second array receiving radiation that is back scattered from a second direction that is substantially perpendicular to the straight line, and
the first and second directions are on opposite sides of the straight line.

17. The apparatus of claim 9 , wherein:
wherein the array of spots is arranged along a substantially straight line and to scan perpendicular to such straight line,
the first dark field imaging optics are further arranged for imaging scattered radiation from said spots onto the first array of receivers or detectors by each receiver or detector in the first array receiving radiation that is forward scattered from a first direction that is substantially perpendicular to the straight line,
the second dark field imaging optics are further arranged imaging scattered radiation from said spots onto the second array of receivers or detectors by each receiver or detector in the second array receiving radiation that is back scattered from a second direction that is substantially perpendicular to the straight line, and
the first and second directions are on opposite sides of the straight line.

Assignees

• Kla Tencor Corp

Inventors

• Vaez-Iravani Mehdi
• Miller Lawrence Robert

Classifications

• G01N2201/12

  Circuits of general importance; Signal processing · CPC title

• G01N21/8806 Primary

  Specially adapted optical and illumination features · CPC title

• G01N21/95623

  using a spatial filtering method (per se G02B) · CPC title

• G01N2021/8822

  Dark field detection · CPC title

• G01N2021/8845

  Multiple wavelengths of illumination or detection · CPC title