Induction type position measuring apparatus

Patent metadata

Field	Value
Publication number	US-9568300-B2
Application number	US-201514609791-A
Country	US
Kind code	B2
Filing date	Jan 30, 2015
Priority date	Feb 4, 2014
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

An induction type position measuring apparatus includes a scale and a sensor. The scale includes a track having a plurality of control patterns provided at equal intervals along a measurement reference line to control flow of an induced current, and a first edge portion and a second edge portion located on both sides of the measurement reference line. The sensor is provided to be capable of moving relatively to the scale along the measurement reference line to detect an induced current. The scale includes regulation patterns at least between the track and the first edge portion or between the track and the second edge portion to regulate a flow of an induced current.

First claim

What is claimed is:

1. An induction type position measuring apparatus comprising:
a scale including a track, a first edge portion and a second edge portion, the track including a plurality of control patterns provided on a conductive plate material or a conductive foil at equal intervals along a measurement reference line to control a flow of an induced current, the first edge portion, and the second edge portion being located on both sides of the measurement reference line; and
a sensor provided to be capable of moving relatively to the scale along the measurement reference line to detect the induced current,
the scale including regulation patterns provided on the conductive plate material or the conductive foil at least between the track and the first edge portion or between the track and the second edge portion to regulate the flow of the induced current.

2. The induction type position measuring apparatus according to claim 1 , wherein the regulation patterns are provided both between the track and the first edge portion and between the track and the second edge portion.

3. The induction type position measuring apparatus according to claim 1 , wherein a period of a plurality of the regulation patterns is equal to a period of the plurality of control patterns.

4. The induction type position measuring apparatus according to claim 2 , wherein a period of a plurality of the regulation patterns is equal to a period of the plurality of control patterns.

5. The induction type position measuring apparatus according to claim 1 , wherein
the track comprises:
a first track including a plurality of first control patterns provided with a first period along the measurement reference line; and
a second track provided in parallel to the first track and including a plurality of second control patterns provided with a second period different from the first period along the measurement reference line, and
the regulation patterns are provided at least between the first track and the first edge portion, between the first track and the second track, or between the second track and the second edge portion.

6. The induction type position measuring apparatus according to claim 5 , wherein
the induction type position measuring apparatus is an induction type position measuring apparatus of absolute form which finds an absolute position of the sensor relative to the measurement reference line on the basis of a detection result of the induced current on the first track and a detection result of the induced current on the second track,
the regulation patterns include intermediate regulation patterns provided between the first track and the second track, and
a period of a plurality of the intermediate regulation patterns is equal to a period of control patterns on the first track or the second track that exerts greater influence upon resolution of position detection.

7. The induction type position measuring apparatus according to claim 1 , wherein
the plurality of control patterns is in the conductive plate material or in the conductive foil; and
the regulation patterns are in the conductive plate material or in the conductive foil.

8. The induction type position measuring apparatus according to claim 1 , wherein
the plurality of control patterns is in direct contact with the conductive plate material or with the conductive foil; and
the regulation patterns are in direct contact with the conductive plate material or with the conductive foil.

Assignees

• Mitutoyo Corp

Inventors

• Tsuji Shozaburo
• Maeda Fujio

Classifications

• G01B2210/00

  Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors · CPC title

• G01B7/003

  for measuring position, not involving coordinate determination (coordinate measuring G01B7/004) · CPC title

• G01B7/14 Primary

  for measuring distance or clearance between spaced objects or spaced apertures (G01B7/30 takes precedence) · CPC title

• G01D1/00

  Measuring arrangements giving results other than momentary value of variable, of general application (G01D3/00 takes precedence; in tariff metering apparatus G01D4/00; transducers not specially adapted for a specific variable G01D5/00) · CPC title

• G01D5/202 Primary

  by movable a non-ferromagnetic conductive element (G01D5/2033 takes precedence) · CPC title