Undercoat agent and method of producing structure containing phase-separated structure

Patent metadata

Field	Value
Publication number	US-9567477-B2
Application number	US-201414324493-A
Country	US
Kind code	B2
Filing date	Jul 7, 2014
Priority date	Jul 24, 2013
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

An undercoat agent used for phase separating a layer containing a block copolymer having a block of a structural unit derived from an (α-substituted) acrylate ester on a substrate, and which contains a resin component including a structural unit represented by formula (ba0-1), and/or a structural unit represented by formula (ba0-2), and a structural unit (ba0-3) having a substrate interacting group,

wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R 1 and R 2 represent a halogen atom or an organic group of 1 to 20 carbon atoms which may contain an oxygen atom, a halogen atom, or a silicon atom, and n is 1 to 5.

First claim

What is claimed is:

1. A method of producing a structure containing a phase-separated structure, comprising:
coating an undercoat agent on a substrate to form a layer formed of the undercoat agent;
forming a layer containing a block copolymer having a block of a structural unit derived from an (α-substituted) acrylate ester and a block of a polyhedral oligomeric silsesquioxane structure-containing structural unit or a structural unit derived from a styrene or derivative thereof on the layer formed of the undercoat agent; and
phase-separating the layer containing the block copolymer,
the undercoat agent comprising:
a copolymer having a structural unit (ba0-1) represented by general formula (ba0-1) and a structural unit (ba0-3) selected from structural units represented by general formulae (ba0-3-1) to (ba0-3-4) shown below, or
a copolymer having a structural unit (ba0-2) represented by general formula (ba0-2) and the structural unit (ba0-3):

wherein in the formula (ba0-1), R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R 1 represents a t-butyl group; and
wherein in the formula (ba0-2), R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, and R 2 represents an organic group including a polyhedral oligomeric silsesquioxane structure selected from the group consisting of (ba0-3-1), (ba0-3-2), (ba0-3-3) and (ba0-3-4):

wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, R b represents a hydrogen atom or an alkyl group of 1 to 5 carbon atoms, Y 01 represents a divalent linking group, Y 02 represents a divalent linking group, Y 03 represents a single bond or a divalent linking group, and X 01 to X 04 each independently represents a carboxy group, a hydroxyl group, a cyano group, an azido group, an amino group, a trialkoxysilyl group, a dialkoxysilyl group, a monoalkoxy silyl group, a lactone-containing cyclic group, groups represented by the following formula (ba0-3-1′-r1) to (ba0-3-1′-r2), an ether-containing cyclic group, or a cyclooctatrienyl group:

wherein Ra′ 201 represents a hydrogen atom, an alkyl group of 1 to 10 carbon atoms, n is an integer of 1 to 3, and * represents a bond.

2. The method according to claim 1 , wherein the polyhedral oligomeric silsesquioxane structure-containing structural unit is a structural unit represented by general formula (a0-1):

wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, V 0 represents a divalent hydrocarbon group which may have a substituent, and R 0 represents a monovalent hydrocarbon group which may have a substituent, wherein the plurality of R 0 groups may be the same as or different from each other.

3. The method according to claim 1 , wherein R 2 in general formula (ba0-2) is a group represented by general formula (a0-r-1) shown below:

wherein R 0 represents a monovalent hydrocarbon group which may have a substituent, wherein the plurality of R 0 groups may be the same as or different from each other, and * represents a bond.

4. The method according to claim 1 , wherein the structural unit (ba0-2) is represented by general formula (a0-1) shown below:

wherein R represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms, V 0 represents a divalent hydrocarbon group which may have a substituent, and R 0 represents a monovalent hydrocarbon group which may have a substituent, wherein the plurality of R 0 groups may be the same as or different from each other.

Assignees

• Tokyo Ohka Kogyo Co Ltd

Inventors

• Seshimo Takehiro
• Matsumiya Tasuku
• Maehashi Takaya
• Dazai Takahiro
• Utsumi Yoshiyuki

Classifications

• C08F230/08

  containing silicon · CPC title

• C08F212/12

  Monomers containing a branched unsaturated aliphatic radical or a ring substituted by an alkyl radical · CPC title

• C08F220/06

  Acrylic acid; Methacrylic acid; Metal salts or ammonium salts thereof · CPC title

• C09D125/14

  with unsaturated esters · CPC title

• C08F212/08

  Styrene · CPC title