Thermal spray coating, member for semiconductor manufacturing equipment, feedstock material for thermal spray, and method for producing thermal spray coating

Patent metadata

Field	Value
Publication number	US-9567467-B2
Application number	US-201414557801-A
Country	US
Kind code	B2
Filing date	Dec 2, 2014
Priority date	Dec 6, 2013
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

A thermal spray coating according to the present invention contains mainly magnesium, aluminum, oxygen, and nitrogen and has, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide. The thermal spray coating is obtained by thermal spray of powder of a ceramic material containing mainly magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide.

First claim

What is claimed is:

1. A thermal spray coating comprising magnesium, aluminum, oxygen, and nitrogen and having, as a main phase, a crystal phase of a MgO—AlN solid solution in which aluminum nitride is dissolved with magnesium oxide.

2. The thermal spray coating according to claim 1 , wherein the XRD peak of the MgO (200) plane measured with CuKα radiation shifts to a higher angle side with respect to 2θ=42.90°, which corresponds to the peak of the cubic crystal of magnesium oxide.

3. The thermal spray coating according to claim 1 , wherein the full width at half maximum of the XRD peak of the MgO (200) plane measured with CuKα radiation is 0.55° or less.

4. The thermal spray coating according to claim 1 , wherein, in component analysis of the thermal spray coating, the Mg/(Mg+Al) molar ratio is 0.58 or more.

5. The thermal spray coating according to claim 1 , wherein the thermal spray coating contains, as a subphase, a magnesium aluminum oxide.

6. The thermal spray coating according to claim 1 , wherein the thermal spray coating contains, as a subphase, a magnesium-aluminum oxynitride phase whose XRD peak measured with CuKα radiation appears at, at least, 2θ=47° to 49°.

7. The thermal spray coating according to claim 1 , wherein the full width at half maximum of the XRD scale of the MgO (200) plane measured with CuKα radiation is 0.55° or less.

8. The thermal spray coating according to claim 1 , wherein the thermal spray coating has an open porosity of 20% or less.

9. The thermal spray coating according to claim 1 , wherein a nitrogen content in the thermal spray coating is less than 1.1 wt %.

10. A member for semiconductor manufacturing equipment whose surface is covered with the thermal spray coating according to claim 1 .

Assignees

• Ngk Insulators Ltd

Inventors

• Sato Yosuke
• Inoue Katsuhiro
• Katsuda Yuji

Classifications

• H10P14/69397

  the material containing two or more metal elements · CPC title

• C04B2235/80

  Phases present in the sintered or melt-cast ceramic products other than the main phase · CPC title

• C04B2235/3222

  Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4) · CPC title

• C04B2235/76

  Crystal structural characteristics, e.g. symmetry · CPC title

• C04B35/645

  Pressure sintering · CPC title