Catalyst for producing higher silane and process for producing higher silane

Patent metadata

Field	Value
Publication number	US-9567228-B2
Application number	US-201415030802-A
Country	US
Kind code	B2
Filing date	Oct 16, 2014
Priority date	Oct 21, 2013
Publication date	Feb 14, 2017
Grant date	Feb 14, 2017

Abstract

Provided are a catalyst for producing a higher silane with high yield at low cost by performing a reaction at relatively low temperature while inhibiting decomposition into solid silicon; and a process using the catalyst for producing a higher silane. The catalyst for producing a higher silane includes a porous oxide and is used to convert a lower silane to a higher silane wherein the porous oxide has at least regularly arranged pores and is primarily composed of silicon oxide, wherein a content of alkali metals and alkali earth metals in the porous oxide is not less than 0.00 wt % and not more than 2.00 wt %.

First claim

The invention claimed is:

1. A catalyst for producing a higher silane which comprises a porous oxide and which by being contacted with a lower silane converts the lower silane to the higher silane having more silicon than the lower silane, wherein the porous oxide has at least regularly arranged pores and is primarily composed of silicon oxide, wherein a content of alkali metals and alkali earth metals in the porous oxide is not less than 0.00 wt % and not more than 2.00 wt %.

2. The catalyst for producing a higher silane according to claim 1 , wherein the porous oxide has a pore diameter of not less than 0.4 nm and not more than 0.6 nm.

3. The catalyst for producing a higher silane according to claim 1 , wherein the pore of the porous oxide is formed from an 8 to 12-membered oxygen ring.

4. The catalyst for producing a higher silane according to claim 1 , wherein the porous oxide has a crystalline zeolite structure formed from aluminosilicate or metallosilicate.

5. The catalyst for producing a higher silane according to claim 4 , wherein the crystalline zeolite structure is at least any one of BEA-type, FER-type, LTA-type, MFI-type, MOR-type and MWW-type.

6. The catalyst for producing a higher silane according to claim 4 , wherein alkali metal ions or alkali earth metal ions compensating for a negative charge of the aluminosilicate or metallosilicate skeleton in the porous oxide are substituted with hydrogen ions.

7. The catalyst for producing a higher silane according to claim 4 , wherein the porous oxide is aluminosilicate, and a SiO 2 /Al 2 O 3 molar ratio in the porous oxide is not less than 10 and not more than 3,000.

8. The catalyst for producing a higher silane according to claim 7 , wherein the SiO 2 /Al 2 O 3 molar ratio is not less than 20 and not more than 2,000.

9. A process for producing a higher silane comprising bringing a lower silane into contact with the catalyst for producing a higher silane according to claim 1 thereby converting the lower silane to the higher silane having more silicon than the lower silane.

10. The process for producing a higher silane according to claim 9 , wherein the lower silane is brought into contact with the catalyst for producing the higher silane at a temperature lower than a temperature at which the higher silane starts to be substantially produced through thermal decomposition of the lower silane under conditions where no catalysts are present.

11. The process for producing a higher silane according to claim 9 , wherein the temperature at which the lower silane is brought into contact with the catalyst for producing a higher silane is not lower than 100° C. and not higher than 400° C.

12. The process for producing a higher silane according to claim 11 , wherein the temperature is not lower than 120° C. and not higher than 350° C.

13. The process for producing a higher silane according to claim 11 , wherein the temperature is not lower than 140° C. and not higher than 300° C.

14. The process for producing a higher silane according to claim 9 , wherein the lower silane is supplied by a raw material gas including a lower silane, and a concentration of the lower silane in the raw material gas is not less than 50 vol % and not more than 100 vol %.

15. The process for producing a higher silane according to claim 9 , wherein the lower silane is monosilane, and the higher silane is disilane and trisilane.

16. The process for producing a higher silane according to claim 9 , wherein the lower silane is monosilane, and the higher silane is disilane.

17. The process for producing a higher silane according to claim 9 , wherein the lower silane is disilane, and the higher silane is trisilane.

18. The process for producing a higher silane according to claim 9 , comprising a step of subjecting the catalyst for producing a higher silane to an activation treatment using a hydrogen-containing gas.

19. The process for producing a higher silane catalyst according to claim 18 , wherein at the step of subjecting the catalyst for producing a higher silane to an activation treatment using a hydrogen-containing gas, the treatment temperature is not less than 20° C.

Assignees

• Mitsui Chemicals Inc

Inventors

• Matsushita Tatsumi
• Nouji Yoshinori
• Matsuura Akira

Classifications

• B01J35/1057

  Operations & Transport · mapped topic

• B01J38/10

  using elemental hydrogen · CPC title

• C01B33/04 Primary

  Hydrides of silicon · CPC title

• B01J29/061

  containing metallic elements added to the zeolite · CPC title

• Y02P20/584

  Recycling of catalysts · CPC title