Differential suspended single-layer graphene nanopore sensor, and preparation method therefor and use thereof
US-2024204190-A1 · Jun 20, 2024 · US
US9567214B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9567214-B2 |
| Application number | US-201314763491-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 25, 2013 |
| Priority date | Jan 25, 2013 |
| Publication date | Feb 14, 2017 |
| Grant date | Feb 14, 2017 |
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The present disclosure is drawn to chemical sensing devices and associated methods. In one example, a chemical sensing device can include a substrate; an elongated nanostructure having an attachment end and a free end opposite the attachment end, the attachment end affixed to the substrate and the free end including a metal; and a metal oxide coating applied to the elongated nanostructure. In one example, a functional group can be attached to the coating via a covalent bond.
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What is claimed is: 1. A chemical sensing device, comprising: a substrate; an elongated nanostructure having an attachment end and a free end opposite the attachment end, the attachment end affixed to the substrate and the free end comprising a metal, wherein the metal comprises at least one of a metal coating and a metal cap at the free end; and a metal oxide coating applied to the elongated nanostructure. 2. The chemical sensing device of claim 1 , further comprising a functional group attached to the metal oxide coating via covalent bond. 3. The chemical sensing device of claim 2 , wherein the functional group comprises an attachment functional group (A), a spacer group (B), and a target functional group (FG) according to formula I: A-B-FG (I) wherein A is an organic functional group bound to the nanostructure, B is substituted or unsubstituted, linear or branched alkyl or aryl, and FG is an organic functional group capable of adsorbing a target molecule. 4. The chemical sensing device of claim 2 , wherein the functional group is formulated to selectively bind a metal ion, an organic compound, or a hydrogen ion. 5. The chemical sensing device of claim 1 , wherein the metal oxide is selected from the group of silicon oxide, titanium oxide, zinc oxide, aluminum oxide, gallium oxide, indium oxide, zirconium oxide, hafnium oxide, tantalum oxide, and mixtures thereof. 6. The chemical sensing device of claim 1 , wherein the metal is selected from the group of gold, silver, copper, aluminum, platinum, and mixtures thereof. 7. The chemical sensing device of claim 6 , wherein the chemical sensing device is sensitive enough to detect the metal ion, the organic compound, or the hydrogen ion at a concentration of 1 ppt. 8. The chemical sensing device of claim 1 , further comprising a detector operatively coupled to the coated nanostructure, wherein the detector is selected from the group of a colorimeter, a reflectometer, a spectrometer, a spectrophotometer, a Raman spectrometer, an optical microscope, and an instrument for measuring luminescence. 9. The chemical sensing device of claim 1 , further comprising a plurality of the elongated nanostructures forming an array. 10. The chemical sensing device of claim 9 , wherein the array includes sub-arrays, the sub-arrays having individual selectivity for a target molecule, the target molecule individually selected from the group of a metal ion, an organic compound, and a hydrogen ion. 11. A method of stabilizing a nanostructure, comprising: disposing an elongated nanostructure on a substrate, the nanostructure having an attachment end attached to the substrate and a free end opposite the attachment end; forming a metal cap or a metal coating on the free end of the nanostructure; and coating the nanostructure with a metal oxide coating. 12. The method of claim 11 , wherein the metal oxide coating is selected from the group of silicon oxide, titanium oxide, zinc oxide, aluminum oxide, gallium oxide, indium oxide, zirconium oxide, hafnium oxide, tantalum oxide, and mixtures thereof. 13. A method of making a chemical sensing device, comprising: disposing a nanostructure to a substrate, the nanostructure having an attachment end attached to the substrate and a free end opposite the attachment end; depositing a metal on the free end of the nanostructure; and depositing a metal oxide on the nanostructure. 14. The method of claim 13 , further comprising the step of attaching a functional group to the metal oxide of the free end of the nanostructure. 15. The chemical sensing device of claim 1 , wherein the chemical sensing device comprises a chemical sensing device to analyze a chemical using Surface Enhanced Raman Spectroscopy. 16. The method of claim 11 , further comprising attaching a functional group to the metal oxide coating via a covalent bond. 17. The method of claim 16 , wherein the functional group comprises an attachment functional group (A), a spacer group (B), and a target functional group (FG) according to formula I: A-B-FG (I) wherein A is an organic functional group bound to the nanostructure, B is substituted or unsubstituted, linear or branched alkyl or aryl, and FG is an organic functional group capable of adsorbing a target molecule. 18. The method of claim 13 , wherein depositing the metal oxide comprises depositing using at least one of automatic layer deposition and E-beam sputtering. 19. The method of claim 13 , wherein depositing the metal oxide coating comprises depositing a metal oxide coating selected from the group of silicon oxide, titanium oxide, zinc oxide, aluminum oxide, gallium oxide, indium oxide, zirconium oxide, hafnium oxide, tantalum oxide, and mixtures thereof. 20. The method of claim 15 , wherein the functional group comprises an attachment functional group (A), a spacer group (B), and a target functional group (FG) according to formula I: A-B-FG (I) wherein A is an organic functional group bound to the nanostructure, B is substituted or unsubstituted, linear or branched alkyl or aryl, and FG is an organic functional group capable of adsorbing a target molecule.
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