Plasma processing apparatus and plasma processing method
US-9253867-B2 · Feb 2, 2016 · US
US9565747B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9565747-B2 |
| Application number | US-201414208699-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 13, 2014 |
| Priority date | Mar 14, 2013 |
| Publication date | Feb 7, 2017 |
| Grant date | Feb 7, 2017 |
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Certain embodiments described herein are directed to devices, systems and methods that comprise asymmetric induction devices. In some instances, the device can include a plurality of plate electrodes which can be spaced asymmetrically or a plurality of coils which can be spaced asymmetrically.
Opening claim text (preview).
The invention claimed is: 1. A system comprising: a torch body; and an induction device comprising a plurality of asymmetrically spaced induction coils configured to receive a portion of the torch body to sustain an atomization source in the torch body, in which the asymmetrically spaced induction coils are coupled to each other and form an aperture to receive the portion of the torch body and in which longitudinal spacing, along a longitudinal direction of the torch body, between at least three coils of the plurality of induction coils is asymmetric. 2. The system of claim 1 , further comprising a detector fluidically coupled to the torch body and configured to receive analyte species from the atomization source sustained in the torch body. 3. The system of claim 2 , in which the detector is selected from the group consisting of an optical excitation detector, an absorption detector and a mass spectrometer. 4. The system of claim 1 , in which the induction device comprises a first coil, a second coil and a third coil, in which longitudinal spacing between the first coil and the second coil is greater than longitudinal spacing between the second coil and the third coil, and in which the third coil is configured to be positioned closest to a terminus of the torch body, and in which the first coil is coupled to the second coil and the second coil is coupled to the third coil. 5. The system of claim 1 , in which the induction device comprises a first coil, a second coil and a third coil, in which longitudinal spacing between the first coil and the second coil is less than longitudinal spacing between the second coil and the third coil, and in which the third coil is configured to be positioned closest to a terminus of the torch body, and in which the first coil is coupled to the second coil and the second coil is coupled to the third coil. 6. The system of claim 1 , further comprising a radio frequency source electrically coupled to the induction device. 7. The system of claim 6 , in which the radio frequency source is configured to provide radio frequencies of about 1 MHz to about 1000 MHz at a power of about 10 Watts to about 10,000 Watts. 8. The system of claim 1 , comprising a first radio frequency source electrically coupled to at least one coil of the induction device and a second radio frequency source electrically coupled to a different coil of the induction device. 9. The system of claim 8 , in which each of the first radio frequency source and the second radio frequency source is configured to provide radio frequencies of about 1 MHz to about 1,000 MHz at a power of about 10 Watts to about 10,000 Watts. 10. The system of claim 1 , in which the induction device comprises a first coil, a second coil and a third coil, in which longitudinal spacing between the first coil and the second coil is greater than longitudinal spacing between the second coil and the third coil, and in which the third coil is configured to be positioned closest to a terminus of the torch body, in which the first coil is coupled to the second coil and the second coil is coupled to the third coil, and in which the spacing between each coil is selected to shift a maximum analyte signal to occur at a lower nebulization gas flow rate. 11. The system of claim 10 , in which the spacing between the first coil and the second coil is about 4 mm and the spacing between the second coil and the third coil is about 2 mm. 12. The system of claim 1 , in which the induction device comprises a first coil, a second coil and a third coil, in which longitudinal pacing between the first coil and the second coil is less than longitudinal spacing between the second coil and the third coil, and in which the third coil is configured to be positioned closest to a terminus of the torch body, and in which the first coil is coupled to the second coil and the second coil is coupled to the third coil, and in which the spacing between each coil is selected to shift a maximum analyte signal to occur at a lower nebulization gas flow rate. 13. The system of claim 12 , in which the spacing between the first coil and the second coil is about 2 mm and the spacing between the second coil and the third coil is about 4 mm. 14. The system of claim 1 , in which the induction device comprises at least four coils coupled to each other with at least two of the coils spaced differently in the longitudinal direction than a longitudinal spacing between two other coils. 15. The system of claim 1 , in which the induction device comprises at least five coils coupled to each other with at least two of the coils spaced differently in the longitudinal direction than a longitudinal spacing between two other coils. 16. The system of claim 1 , further comprising a radio frequency source electrically coupled to the induction device, the radio frequency source comprising variable capacitors configured to permit adjustment of a plasma voltage with different coil spacing. 17. The system of claim 1 , further comprising a sampling interface fluidically coupled to the torch body. 18. The system of claim 17 , in which the sampling interface comprises a sampling cone. 19. The system of claim 1 , in which the induction device comprises a first coil, a second coil and a third coil, in which longitudinal spacing between the first coil and the second coil is less than longitudinal spacing between the second coil and the third coil, and in which the third coil is configured to be positioned closest to a terminus of the torch body, and in which the first coil is coupled to the second coil and the second coil is coupled to the third coil, and in which the spacing between each coil is selected to shift a maximum interfering oxide signal to occur at a higher nebulization gas flow rate. 20. The system of claim 1 , in which the induction device comprises a first coil, a second coil and a third coil, in which longitudinal spacing between the first coil and the second coil is less than longitudinal spacing between the second coil and the third coil, and in which the third coil is configured to be positioned closest to a terminus of the torch body, and in which the first coil is coupled to the second coil and the second coil is coupled to the third coil, and in which the spacing between each coil is selected to shift a maximum interfering oxide signal to occur at a higher nebulization gas flow rate.
using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/28 takes precedence) · CPC title
Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components · CPC title
by spectrometry · CPC title
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