Memory device comprising a non-phase-changing amorphous chalcogenide memory layer and a metal chalcogenide ion-source layer

Patent metadata

Field	Value
Publication number	US-9564583-B2
Application number	US-51400904-A
Country	US
Kind code	B2
Filing date	Mar 18, 2004
Priority date	Mar 20, 2003
Publication date	Feb 7, 2017
Grant date	Feb 7, 2017

Abstract

A memory element includes an amorphous thin-film that is between a first electrode and a second electrode in which at least one of the first electrode and the second electrode contains Ag or Cu. The amorphous thin film is a non-phase changing, amorphous material. A storage device includes a plurality of memory elements. Each memory element includes a wiring connected to a side of the first electrode and a wiring connected to a side of the second electrode.

First claim

The invention claimed is:

1. A storage device, comprising:
a plurality of memory elements, each memory element including (a) a silicon substrate portion with an impurity imparting electric conductivity to the silicon substrate portion, (b) a first electrode portion on said silicon substrate portion, (c) an electrically insulating layer on said first electrode portion, (d) an opening in said electrically insulating layer exposing at least a section of said first electrode portion, (e) a thin-film on said electrically insulating layer and in contact with said first electrode portion within a perimeter of said opening, (f) a second electrode on said thin-film within said perimeter of said opening, said second electrode containing germanium (Ge), antimony (Sb), tellurium (Te), and copper (Cu), (g) an electrode layer on the second electrode within said perimeter of said opening, and (h) a conductive layer on said electrode layer and in electrical communication with said second electrode, said conductive layer being unique to that memory element and being shorter parallel to a surface of said silicon substrate portion than said first electrode portion,
wherein,
said first electrode is common to two or more memory elements,

said first electrode does not contain Cu in a memory state,
for each memory element, said thin-film is a non-phase changing, amorphous material comprising Ge, Sb, and Te,
for each memory element, said amorphous material of said thin film has a first surface in contact with said first electrode portion and a second surface in contact with the second electrode,
for each memory element, said electrode layer comprises a material excluding Cu and including a Ti/TiW multi-layer or a W/TiW multi-layer, said electrode layer being between and in contact with said conductive layer and said second electrode, and
for each memory element, when a positive voltage is applied to said first electrode portion or said second electrode, ions of Cu diffuse into the thin-film resulting in a reduction of electrical resistance of the thin-film, said reduction being persistent until an application of a negative voltage.

2. A memory element comprising:
a silicon substrate with an impurity imparting electric conductivity to the silicon substrate;
a first electrode on said silicon substrate;
an electrically insulating layer on said first electrode;
an opening in said electrically insulating layer exposing at least a portion of said first electrode;
a thin-film on said electrically insulating layer and in contact with said first electrode within a perimeter of said opening;
a second electrode on said thin-film within said perimeter of said opening, said second electrode containing germanium (Ge), antimony (Sb), tellurium (Te), and copper (Cu);
an electrode layer on the second electrode within said perimeter of said opening; and
a conductive layer on said electrode layer and in electrical communication with said second electrode, said conductive layer being unique to the memory element and being shorter parallel to a surface of said silicon substrate than said first electrode,
wherein,
said first electrode does not contain Cu in a memory state,
said thin-film is a non-phase changing, amorphous material comprising Ge, Sb, and Te,
said amorphous material of said thin film has a first surface in contact with said first electrode and a second surface in contact with the second electrode,
said electrode layer comprises a material excluding Cu and including a Ti/TiW multi-layer or a W/TiW multi-layer, said electrode layer being between and in contact with said conductive layer and said second electrode, and
when a positive voltage is applied to said first electrode or said second electrode, ions of Cu from said first electrode or said second electrode diffuse into the thin-film resulting in a reduction of electrical resistance of the thin-film, said reduction being persistent until an application of a negative voltage.

3. The memory element according to claim 2 , wherein said electrode layer includes an element whose valence is larger than that of the copper (Cu) contained in said second electrode when ionized.

4. The memory element of claim 2 , wherein said thin-film contains silicon (Si) as an impurity therein.

5. The memory element of claim 4 , wherein said thin-film contains silicon as the impurity in an amount of 15 to 23 percentage of atomic volume.

6. The memory element of claim 4 , wherein a thickness of said thin-film is in a range of 10 nm-51 nm, inclusive.

7. The memory element of claim 4 , wherein said thin-film is composed of (Ge 22 Sb 22 Te 56 ) z Si 100-z , where ‘z’ and ‘100-z’ are each representative of a percentage of atomic volume.

8. The memory element of claim 7 , wherein said thin-film contains silicon as the impurity in an amount of 15 to 23 percentage of atomic volume.

9. The memory element of claim 8 , wherein a thickness of said thin-film is in a range that is inclusive of 10 nm to 51 nm, inclusive.

Assignees

• Aratani Katsuhisa
• Kouchiyama Akira
• Ishida Minoru
• Sony Corp

Inventors

• Aratani Katsuhisa
• Kouchiyama Akira
• Ishida Minoru

Classifications

• H10N70/8833

  Binary metal oxides, e.g. TaOx · CPC title

• H10N70/883

  Oxides or nitrides · CPC title

• H10N70/8828

  Tellurides, e.g. GeSbTe · CPC title

• H10N70/8416

  adapted for supplying ionic species · CPC title

• H10N70/826

  adapted for essentially vertical current flow, e.g. sandwich or pillar type devices · CPC title