Stress-based sensor, method, and applications

Patent metadata

Field	Value
Publication number	US-9562888-B2
Application number	US-201113637861-A
Country	US
Kind code	B2
Filing date	Mar 31, 2011
Priority date	Mar 31, 2010
Publication date	Feb 7, 2017
Grant date	Feb 7, 2017

Abstract

A composite, analyte sensor includes a substrate; a micro- or nano-electro-mechanical (MEMS; NEMS) resonator that is coupled to the substrate at least two edge locations (i.e., it is at least doubly-clamped) of the resonator, wherein the resonator is in a statically-buckled state near a buckling transition point of the resonator; and a chemically-responsive substance covering at least a portion of the surface of the resonator that will undergo a conformational change upon exposure to a given analyte. The resonator may be a double-clamped, statically-buckled beam (or bridge), a multiply-clamped, statically-buckled dome (or crater), or other resonator geometry. The sensor may include two or more at least double-clamped, statically-buckled, composite MEMS or NEMS resonators each operating near a buckling transition point of the respective resonator, and each characterized by a different resonant frequency. A method for sensing an analyte in ambient air.

First claim

We claim:

1. An analyte sensor, comprising:
a substrate;
a composite micro- or nano-electro-mechanical (MEMS; NEMS) resonator comprising a structure configured to be driven into resonance and which is double-clamped such that it is coupled to the substrate at a plurality of edge locations of the structure, and a volume-sensitive reactive coating covering at least a portion of a surface of the structure, which is characterized by a volumetric change upon exposure to a given analyte, wherein the volumetric change comprises a change in a stress value of the resonator, further wherein the change in the stress value of the resonator comprises a measurable change in a resonance frequency of the resonator, further wherein the resonator is in a compressively-stressed, statically-buckled state that is not at a buckling transition point of the resonator when driven into resonance, wherein the resonator is in the form of a dome or drum.

2. The sensor of claim 1 , further comprising a plurality of the composite MEMS or NEMS resonators, each of which is characterized by a different resonant frequency.

3. The sensor of claim 1 , wherein the volume-sensitive reactive coating is a hygroscopic polymer.

4. A method for sensing an analyte, comprising:
providing a composite micro- or nano-electro-mechanical (MEMS; NEMS) resonator comprising a structure configured to be driven into resonance and which is double-clamped such that it is coupled to the substrate at least two edge locations of the structure, and a volume-sensitive reactive coating covering at least a portion of a surface of the structure, which is characterized by a volumetric change upon exposure to a given analyte, said volumetric change giving rise to a change in a stress value of the resonator providing a measurable change in a resonance frequency of the resonator, further wherein the resonator is in a compressively-stressed, statically-buckled state that is not at a buckling transition point of the resonator;
driving the resonator to resonate at a resonance frequency;
exposing the resonator to a given gas sample wherein the volume-sensitive reactive coating undergoes an increase or decrease in volume; and
measuring the change in the resonance frequency of the resonator at a selected time after exposing the resonator to the given gas sample.

5. The method of claim 4 , further comprising determining an amount of the analyte in the gas sample.

6. The method of claim 4 , further comprising sensing the presence of the analyte in the gas sample in a time period less than one second.

7. The method of claim 4 , further comprising providing a plurality of the composite MEMS or NEMS resonators, each of which is resonating at a different resonant frequency.

8. The method of claim 4 , further comprising exposing the resonator to a breath sample of a living subject.

9. The method of claim 5 , further comprising determining less than 100 parts per million (ppm) of the analyte.

10. The method of claim 4 , further comprising measuring one of an increase and a decrease of the resonance frequency of the resonator at the selected time after exposing the resonator to the given gas sample.

Assignees

• Parpia Jeevak M
• Craighead Harold G
• Southworth Darren R
• Bellan Leon M
• Univ Cornell

Inventors

• Parpia Jeevak M
• Craighead Harold G
• Southworth Darren R
• Bellan Leon M

Classifications

• G01N29/022

  Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B) · CPC title

• G01N33/497 Primary

  of gaseous biological material, e.g. breath · CPC title