Method of manufacturing a display device

Patent metadata

Field	Value
Publication number	US-9559302-B2
Application number	US-201514633750-A
Country	US
Kind code	B2
Filing date	Feb 27, 2015
Priority date	Dec 27, 1999
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

An organic material for a light emitting device is deposited over a substrate by evaporating the organic material from an evaporation source. The evaporation source comprises a plurality of discrete evaporation cells separated from each other, wherein each of the plurality of discrete evaporation cells contains the organic material. The evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width. The plurality of discrete evaporation cells is arranged along the first direction. When the organic material is evaporated, a relative location of the evaporation source with respect to the substrate is changed along the second direction, and the evaporation of the organic material is initiated by heating the plurality of discrete evaporation cells.

First claim

What is claimed is:

1. A method of manufacturing a light emitting device comprising a step of:
depositing an organic material over a substrate by evaporating the organic material from an evaporation source,
wherein the evaporation source comprises a plurality of discrete evaporation cells separated from each other,
wherein each of the plurality of discrete evaporation cells contains the organic material,
wherein the evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width,
wherein the plurality of discrete evaporation cells is arranged along the first direction,
wherein, when the organic material is evaporated, a relative location of the evaporation source with respect to the substrate is changed along the second direction, and
wherein the evaporation of the organic material is initiated by heating the plurality of discrete evaporation cells.

2. The method according to claim 1 , wherein the light emitting device is a display device.

3. The method according to claim 1 , wherein, when the relative location is changed by moving the substrate.

4. The method according to claim 1 , wherein the length of the evaporation source is from 300 mm to 1200 mm.

5. The method according to claim 1 , wherein the evaporation of the organic material from the plurality of evaporation cells is performed at the same time.

6. A method of manufacturing a light emitting device comprising a step of:
depositing an organic material over a substrate through a shadow mask attached to the substrate by evaporating the organic material from an evaporation source,
wherein the evaporation source comprises a plurality of discrete evaporation cells separated from each other,
wherein each of the plurality of discrete evaporation cells contains the organic material,
wherein the evaporation source has a length along a first direction and a width along a second direction orthogonal to the first direction, the length being greater than the width,
wherein the plurality of discrete evaporation cells is arranged along the first direction,
wherein, when the organic material is evaporated, a relative location of the evaporation source with respect to the substrate is changed along the second direction,
wherein the evaporation of the organic material is initiated by heating the plurality of discrete evaporation cells,
wherein a distance between the shadow mask and the evaporation source is 50a or less where “a” is a gap between adjacent ones of the plurality of discrete evaporation cells.

7. The method according to claim 6 , wherein the distance is equal to 2a or larger.

8. The method according to claim 6 , wherein the light emitting device is a display device.

9. The method according to claim 6 , wherein, when the relative location is changed by moving the substrate.

10. The method according to claim 6 , wherein the length of the evaporation source is from 300 mm to 1200 mm.

11. The method according to claim 6 , wherein the evaporation of the organic material from the plurality of evaporation cells is performed at the same time.

Assignees

• Semiconductor Energy Lab

Inventors

• Yamazaki Shunpei
• Fukunaga Takeshi

Classifications

• C23C14/28

  by wave energy or particle radiation (C23C14/32 - C23C14/48 take precedence) · CPC title

• H10K71/40

  Thermal treatment, e.g. annealing in the presence of a solvent vapour · CPC title

• C23C14/044 Primary

  using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient · CPC title

• H01L51/0008

  Electricity · mapped topic

• H01L51/0011 Primary

  Electricity · mapped topic