System and method for direct fiber-end surface structuring

Patent metadata

Field	Value
Publication number	US-9558920-B2
Application number	US-201414498001-A
Country	US
Kind code	B2
Filing date	Sep 26, 2014
Priority date	Sep 27, 2013
Publication date	Jan 31, 2017
Grant date	Jan 31, 2017

Abstract

A fiber-end surface structuring chamber or system having a main body with multiple ports including a fiber-holder port, a process port that is either a stamp/shim holder port or a plasma etching enabler port, an evacuation port, a gas delivery port, and one or more observation ports, where the fiber-end surface structuring system forms structures directly into the end of the fiber to enhance transmission of light over a wide range of wavelengths and increase the laser damage threshold.

First claim

What is claimed as new and desired to be protected by Letters Patent of the United States is:

1. A fiber-end surface structuring system, comprising:
a main body comprising multiple ports;
a fiber-holder port comprising a fiber-holder port accessory that comprises means to attach an optical fiber such that the fiber extends out of the fiber-holder port from between 1 and 2000 microns;
a process port comprising a process port accessory that comprises means to mount a patterned shim and a laser delivery fiber mount, wherein the shim can be moved, tilted, or both with respect to the fiber;
an evacuation port;
a gas delivery port; and
one or more observation ports;
wherein said fiber-end surface structuring system forms structures directly into the end of the fiber.

2. The system of claim 1 , wherein the means to attach the optical fiber, the means to mount the patterned shim, or both comprise a vacuum flange.

3. The system of claim 1 , wherein the fiber extends out of the fiber-holder port from between 50 to 500 microns.

4. The system of claim 1 , wherein the process port is axially opposite to the fiber-holder port.

5. The system of claim 1 , wherein the process port accessory additionally comprises a thermocouple, a bolometer, a surface reflectance measurement device, or any combination thereof.

6. The system of claim 1 , wherein the structures on the end of the fiber have a quasi-random pattern.

7. The system of claim 1 , wherein the structures on the end of the fiber have a periodic pattern.

8. A method for creating a surface structure with quasi-random micro-scale features, nano-scale features, or a combination thereof directly into a fiber end using the system of claim 1 .

9. A fiber-end surface structuring system, comprising:
a main body comprising multiple ports;
a fiber-holder port comprising a fiber-holder port accessory that comprises a connector to attach an optical fiber such that the top surface of the connector is flush with the fiber-holder port accessory or below the fiber-holder port accessory by less than 250 microns;
a process port comprising a process port accessory that comprises a plasma gas delivery system and an electrode to generate and sustain a plasma; and
an evacuation port.

10. The system of claim 9 , wherein the connector comprises a vacuum flange.

11. The system of claim 9 , wherein the process port is axially opposite to the fiber-holder port.

12. The system of claim 9 , wherein the structures on the end of the fiber have a quasi-random pattern.

13. The system of claim 9 , wherein the system operates as a capacitive-coupled parallel-plate plasma etching system.

14. A method for creating a surface structure with quasi-random micro-scale features, nano-scale features, or a combination thereof directly into a fiber end using the system of claim 9 .

Assignees

• Sanghera Jasbinder S
• Florea Catalin M
• Aggarwal Ishwar D
• Shaw Leslie Brandon
• Busse Lynda E
• Kung Frederic H
• Us Navy

Inventors

• Sanghera Jasbinder S
• Florea Catalin M
• Aggarwal Ishwar D
• Shaw Leslie Brandon
• Busse Lynda E
• Kung Frederic H

Classifications

• H01J37/32715 Primary

  Workpiece holder · CPC title

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title

• H01J2237/334

  Etching · CPC title

• G02B6/4296

  coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title